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Patent Assignment Assignee Details

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Assignee Name : CARL ZEISS SMT GMBH

Total Assignments: 1587

Assignment: 1

Reel/Frame:	016909/0879			Pages:	3
		Recorded:	08/22/2005
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignor

SCHLETTERER, THOMAS

Exec Dt:

08/03/2005

Assignee

CARL ZEISS SMT GMBH

CARL-ZEISS STRASS 22

73447 OBERKOCHEN, GERMANY

Property

Pat #

Pub #

Intl #

App #

7369332

US20050286146

11104853

Correspondence name and address
	OHLANDT, GREELEY, RUGGIERO, ET AL.
	CHARLES N.J. RUGGIERO
	ONE LANDMARK SQUARE
	STAMFORD, CT 06901-2682

Assignment: 2

Reel/Frame:	035318/0693			Pages:	4
		Recorded:	04/02/2015
Attorney Dkt #:	24548-0051RE1
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors

FIOLKA, DAMIAN

Exec Dt:

09/12/2006

MAUL, MANFRED

Exec Dt:

09/12/2006

SCHOLZ, AXEL

Exec Dt:

09/18/2006

DEGUENTHER, MARKUS

Exec Dt:

09/18/2006

WANGLER, JOHANNES

Exec Dt:

09/18/2006

DAVYDENKO, VLADIMIR

Exec Dt:

09/18/2006

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8730455

US20110285978

13181033

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O. BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 3

Reel/Frame:	026535/0706			Pages:	2
		Recorded:	07/01/2011
Attorney Dkt #:	17979-0188002
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignor

MANN, HANS-JUERGEN

Exec Dt:

10/02/2007

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8614785

US20110261338

13173560

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 4

Reel/Frame:	041147/0460			Pages:	2
		Recorded:	02/01/2017
Attorney Dkt #:	2902.0002CON
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors

WEISER, MARTIN

Exec Dt:

01/23/2008

BURKART, STEFAN

Exec Dt:

01/23/2008

MALTOR, HOLGER

Exec Dt:

01/23/2008

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8466047

US20120206795

13453798

Correspondence name and address
	EDELL, SHAPIRO & FINNAN, LLC
	9801 WASHINGTONIAN BOULEVARD
	SUITE 750
	GAITHERSBURG, MD 20878

Assignment: 5

Reel/Frame:	026234/0844			Pages:	10
		Recorded:	04/15/2011
Conveyance:	RE-RECORD TO CHANGE CORRESPONDENCE INFORMATION OF ASSIGNMENT RECORDED AT REEL/FRAME 027760/0938

Assignors

EHM, DIRK HEINRICH

Exec Dt:

03/09/2009

MUELLENDER, STEPHAN

Exec Dt:

03/12/2009

STEIN, THOMAS

Exec Dt:

03/12/2009

MOORS, JOHANNES HUBERTUS JOSEPHINA

Exec Dt:

03/10/2009

WOLSCHRJIN, BASTIAAN THEODOOR

Exec Dt:

03/27/2009

KRAUS, DIETER

Exec Dt:

04/02/2009

VERSLUIS, RICHARD

Exec Dt:

03/26/2009

MEIJERINK, MARCUS GERHARDUS HENDRIKUS

Exec Dt:

03/31/2009

Assignees

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

73447 OBERKOCHEN, GERMANY

ASML NETHERLANDS B.V.

DE RUN 6501

5504 DR VELDHOVEN, NETHERLANDS

Property

Pat #

Pub #

Intl #

App #

8382301

US20090231707

12403233

Correspondence name and address
	WALTER OTTESEN
	PATENT ATTORNEY
	P.O. BOX 4026
	GAITHERSBURG, MARYLAND 20885-4026

Assignment: 6

Reel/Frame:	044552/0487			Pages:	6
		Recorded:	11/30/2017
Attorney Dkt #:	24548-0070004
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors

SCHUBERT, ERICH

Exec Dt:

06/18/2010

KOHL, ALEXANDER

Exec Dt:

06/24/2010

ZIEGLER, GERHARD-WILHELM

Exec Dt:

06/23/2010

PATRA, MICHAEL

Exec Dt:

06/21/2010

DEGUENTHER, MARKUS

Exec Dt:

06/29/2010

LAYH, MICHAEL

Exec Dt:

06/18/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9977333

US20170351183

15461824

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 7

Reel/Frame:	029062/0730			Pages:	3
		Recorded:	10/02/2012
Attorney Dkt #:	18239-0090001
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors

EXLER, MATTHIAS

Exec Dt:

09/14/2010

LOERING, ULRICH

Exec Dt:

10/02/2012

GRUNER, TORALF

Exec Dt:

09/11/2012

WALTER, HOLGER

Exec Dt:

09/12/2012

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9081310

US20130016331

13604941

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 8

Reel/Frame:	029993/0569			Pages:	6
		Recorded:	03/14/2013
Attorney Dkt #:	Z10678-US & -US-0
Conveyance:	MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

09/23/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 22

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9336981

US20130032729

13639491

Correspondence name and address
	BRUCE RITER
	101 FIRST STREET PMB 208
	LOS ALTOS, CA 94022

Assignment: 9

Reel/Frame:	025221/0424			Pages:	4
		Recorded:	10/29/2010
Attorney Dkt #:	18239-0081001
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors

RENNON, SIEGFRIED

Exec Dt:

10/10/2010

MANN, HANS-JUERGEN

Exec Dt:

10/22/2010

SCHICKETANZ, THOMAS

Exec Dt:

10/25/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8693098

US20110090559

12904513

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 10

Reel/Frame:	025763/0367			Pages:	28
		Recorded:	01/18/2011
Attorney Dkt #:	17979-0001009
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

73447 OBERKOCHEN, GERMANY

Properties

Pat #	Pub #	Intl #	App #	Pat #	Pub #	Intl #	App #	Pat #	Pub #	Intl #	App #
6198793	NONE		09305017	6244717	NONE		09322813	6108144	NONE		09362228
6388823	NONE		09486017	6353470	NONE		09503640	6570168	NONE		09627559
6400794	NONE		09705662	6631036	US20030011894		09741863	6665126	US20020039175		09751352
6801364	US20020149855		09760066	7333216	US20020001088		09792607	6656575	US20020012797		09821448
6466380	US20010028998		09825665	6483597	US20010038456		09836654	6867923	US20020008861		09847658
6577443	US20020114089		09878697	6829107	US20020021503		09882564	6867913	US20020056815		09920285
6597763	US20020075996		09933879	6593998	US20020075466		09934252	7274430	US20020008858		09934817
6674577	US20020063965		09955910	6844994	US20020048096		09956715	7248667	US20020186811		09961819
6768600	US20020074115		09975920	6580570	US20020085292		10002097	6788387	US20020122164		10025605
6594093	US20020089766		10039841	6964485	US20030043455		10055608	6650399	US20020145717		10073119
6897599	US20020109437		10075797	6824277	US20020145808		10079580	6777166	US20020126366		10087601
6891980	US20020154814		10090975	7082693	US20020152627		10106962	6870632	US20020176094		10108878
6756599	US20020179845		10115886	7014328	US20020171952		10119182	6774984	US20020186462		10145138
6856379	US20020176166		10151867	6903337	US20030066961		10185729	6750949	US20030058422		10193688
6697199	US20030137733		10199503	6859328	US20030095622		10201652	6740159	US20030101923		10230232
6864960	US20030090638		10234143	6863398	US20030082298		10244419	6678240	US20030071986		10247270
7304717	US20040263812		10250495	6733369	NONE		10261455	7075633	US20030137655		10280090
7212289	NONE		10299030	6943965	US20030147150		10351901	7145720	US20040105170		10367989
6724548	US20030169517		10375320	6891596	US20030174408		10379809	7109497	US20040028175		10381945
6796664	US20030210458		10385643	6912042	US20030234992		10402316	7071476	US20040036037		10429927
6806942	US20040017554		10434952	7019846	US20040032579		10445076	7209292	US20040109237		10448339
7151592	US20040070743		10454830	6985210	US20040051857		10454831	7154666	US20040061930		10466961
7060993	US20050104015		10506555	7385764	US20060221456		10562257	7755833	US20070183017		10562577
7911584	US20070058274		10563175	8009343	US20090021820		10566196	7781750	US20070058244		10569574
7564636	US20070183063		10570021	7551361	US20070258134		10571267	7714983	US20070165202		10571475
7572556	US20070082272		10572149	7448763	US20070014037		10573216	7697198	US20080037111		10576265
7751129	US20080043345		10576754	7557902	US20070035814		10577163	8854602	US20080002170		10580179
8279524	US20070081114		10580698	7492509	US20070258152		10581651	8004690	US20090116036		10585402
7593095	US20070206381		10590537	7551261	US20070279535		10590783	7940375	US20070279613		10591591
8072700	US20070076184		10595469	7684125	US20070053076		10595583	7755839	US20070091451		10596626
7719658	US20070285637		10597776	7692881	US20070165311		10597872	8018664	US20090303626		10598014
NONE	US20070285643		10598481	7400460	US20070171552		10599784	7286245	US20040114150		10628431
7050175	NONE		10637217	7085075	US20050036213		10639780	6891683	US20040120051		10645302
6954257	US20040105083		10647784	6816325	NONE		10661183	6906866	US20050083583		10688212
7119910	NONE		10697239	6903802	US20040233409		10702501	7183674	US20050099069		10704534
7261957	US20040121134		10706826	7545481	US20050110973		10719683	7342667	NONE		10721232
7053988	US20040184019		10721378	7027235	US20040169937		10728814	7283204	US20040169836		10731011
7126692	US20040146336		10735977	7116394	US20040218157		10738976	6842284	US20040179272		10740125
7088458	NONE		10743107	NONE	US20050150758		10754151	7329886	US20040256575		10755846
7112772	US20040144915		10759964	7289223	US20040262500		10765904	7336371	NONE		10766014
7237915	US20040160666		10771986	7091505	US20040227103		10775037	7193794	US20040174619		10779392
7031428	US20040202278		10779516	6900946	US20040257669		10793247	7372539	US20040263810		10815116
7417745	US20050007602		10816896	7180667	US20040190151		10817527	7581305	US20050223539		10821959
7126137	US20040232354		10827916	7090362	US20050030656		10841846	7354168	US20050030653		10848210
7023627	US20040228001		10873292	7164964	US20050177270		10874070	7068436	US20050018312		10878611
7277182	US20050146789		10883739	7092069	US20050030506		10886696	7443500	US20050046832		10886717
7540983	US20050018311		10888314	7446849	US20060017894		10896000	7203007	US20050030634		10915972
RE40743	NONE		10916650	7532306	US20050068499		10917371	7271876	US20050134826		10919376
7583433	US20050083503		10921447	7312462	US20050093041		10930302	7190527	US20050231813		10931051
7239447	US20050157401		10931745	7019824	US20050122506		10935320	7203008	US20050141098		10935321
7246909	US20050111067		10936317	7118449	NONE		10943952	7242537	US20060007563		10944135
7154677	US20050030635		10944566	7408616	US20050146704		10949396	7084412	US20050094764		10952412
7408631	US20050264819		10960082	7433015	US20050179877		10961369	7352433	US20050128445		10961395
7362520	US20050052760		10964601	7352435	US20050174550		10964816	7369216	US20060082751		10964817
7133225	NONE		10965909	7265917	US20050134972		10966388	7336342	US20050146701		10975496
7623620	US20050201514		10983362	7292388	US20050170748		10983569	7268890	US20050200940		10983593
7265919	US20050099704		10985450	7408622	US20050140958		10994141	7317508	US20050146798		10997455
7187503	US20050190455		11011610	7405808	US20050152046		11014199	7429116	US20050134980		11014537
7542217	US20050219495		11015312	7460206	US20050225737		11015553	7387395	US20050134973		11015696
7524072	US20050185307		11016059	7312852	US20060139611		11022938	7274467	US20060146342		11027989
7126765	US20050122594		11029788	7385756	US20050190435		11035103	7436520	NONE		11035723
7301646	US20050190376		11038519	7423727	US20060164621		11041873	7428037	US20050207001		11042779
7093937	US20050146683		11052751	7239462	US20050190462		11063113	7319509	US20050275818		11064594
7362414	US20060001854		11065327	6992834	US20050200966		11071523	7154678	US20050157400		11079225
7561253	US20050213070		11080500	7408652	US20050243328		11080525	7312847	US20050231814		11085602
7473907	US20050274897		11091238	7277231	US20050219707		11097398	7345740	US20060139612		11101630
7372545	US20050231700		11102102	7209286	US20050180011		11102524	7442908	US20050178944		11102818
7233386	US20050237506		11102835	7369332	US20050286146		11104853	7079331	US20050248858		11109316
7166168	NONE		11120195	7489441	US20050286827		11130173	7221516	US20050264787		11133531
7400388	US20060007429		11138430	7365861	US20060012799		11144748	7227616	US20050264780		11149568
7629055	US20050276988		11150740	7466489	US20060012885		11151465	7145637	US20060033895		11155213
7283209	US20060050261		11175172	7239450	US20060109560		11181694	RE41350	NONE		11183303
7199922	US20050248835		11183877	7423765	US20060023179		11190555	7301707	US20060056064		11219594
7456933	US20060077371		11220643	7352452	US20060118703		11228286	7167251	NONE		11230455
7474469	US20060066962		11232606	7471469	US20060158749		11233846	7522260	NONE		11239266
7244954	US20060097202		11243403	7355678	US20060050258		11243407	7483223	US20060093253		11245288
7388696	US20060109533		11246633	RE42570	NONE		11247002	7508488	US20060098210		11248279
7355791	US20060066764		11251300	7256932	US20060119750		11252598	7477355	US20060119822		11256164
7436521	US20060119838		11271806	7511886	US20060146384		11271976	7548387	US20060230413		11278850
7623218	US20060139583		11282154	7426082	US20060077366		11282587	7570343	US20060187430		11285283
7508489	US20060146304		11294860	7375897	US20060146411		11298019	7486382	US20060164619		11316160
7682031	US20060232867		11317851	7491951	US20070146660		11319193	7199864	US20060119826		11336945
7411656	US20060152701		11337491	7724351	US20070177122		11341894	7686505	US20060222044		11343471
7218453	US20060187555		11346201	7511890	US20060198028		11347316	7289279	US20060176573		11350941
7190530	US20060171040		11356525	7728975	NONE		11358119	7244949	US20060289804		11366533
7944628	US20060238892		11370464	7522292	US20060215177		11372159	7580207	US20060279856		11383012
7405809	US20060208206		11384636	7551375	US20060243779		11386236	7230220	US20060231731		11387945
7209241	US20060164655		11389053	7382536	US20060171020		11392027	7760327	US20060262704		11395719
7408621	US20060170897		11396051	7679721	US20060238895		11401789	7551263	US20060244941		11409387
7715107	US20070247605		11410282	7557996	US20060256447		11412925	7321126	US20060291062		11416447
7589903	US20080273248		11420103	7808615	US20080002167		11427183	7684013	US20070002300		11436058
7646004	US20070114466		11439854	8270077	US20060291057		11440479	7359036	US20060268253		11441482
7986472	US20070146906		11444191	7411201	US20070019170		11460706	7545482	US20070036494		11464934
NONE	US20070039543		11465244	7307707	US20060244950		11477393	NONE	US20070019305		11479574
7663735	US20070024837		11488412	7362514	US20070035848		11492725	8004656	US20070206171		11505408
NONE	US20080073596		11509069	7603010	US20070047876		11509154	7414781	US20070058269		11520558
NONE	US20070143032		11522783	7481543	NONE		11523396	7339743	US20070019301		11528379
7294814	US20070012871		11533632	7457059	US20070014038		11533660	7403290	NONE		11541180
7629594	US20080083885		11544930	7671347	US20080083878		11544931	8064040	US20080198353		11547085
7916391	US20080130109		11569001	8064041	US20080123069		11570263	NONE	US20110134403		11573628
NONE	US20090213342		11577531	7712905	US20080213703		11578098	7446952	US20080002265		11578100
8363315	US20110261444		11578101	7515359	US20070216888		11578361	7529046	US20070201151		11578364
NONE	US20080193201		11579458	7525640	US20080123066		11593648	7728987	US20080043247		11596187
8107162	US20090034061		11596868	8711331	US20080198352		11597297	7605386	US20070146853		11598180
7518797	US20070128453		11607024	7764427	US20070195411		11614536	7457043	US20070171539		11627158
7796274	US20080252876		11628061	8605257	US20080094599		11628356	7738193	US20070206297		11631370
7659976	US20070132989		11635293	7348565	US20070120072		11649199	7408716	US20070109659		11649274
8208198	US20070236674		11653366	7576934	US20070195317		11656878	7375798	US20070153252		11657420
7463422	US20070195423		11657925	8212988	US20080252987		11658574	8134687	US20080212327		11660754
8068279	US20070217013		11685620	7859748	US20070153398		11686157	7869138	US20070223112		11689672
7626770	US20070236784		11696956	7847920	US20080239273		11703259	7924436	US20070182969		11703570
7382540	US20070247722		11716679	8570488	US20090201478		11718146	7782440	US20080106711		11719074
7800849	US20090015947		11722091	8092029	US20080137192		11722595	7798676	US20080113281		11722631
7495840	US20070188880		11723441	7450301	US20070171558		11723831	7920338	US20070252094		11723854
7952685	US20080225260		11724331	7738188	US20080037112		11727013	NONE	US20070285647		11728799
7903333	US20070211246		11739232	7834981	US20080117400		11747630	7934390	US20070266733		11748151
8027091	US20080032207		11750547	7586113	US20070295919		11755334	7508581	US20070273965		11757760
7428105	US20080030869		11758363	7791811	US20080018992		11775991	8085382	US20080013065		11777845
7910900	US20080018876		11781010	7310187	US20070188881		11783966	7869147	US20070285645		11784511
NONE	US20080266686		11789072	7995280	US20080225921		11792099	7957069	US20070268594		11793678
7848031	US20080137090		11795598	7848016	US20080007822		11797571	NONE	US20080013063		11804632
7570345	US20080007706		11808316	7554094	US20080054184		11808845	NONE	US20080111983		11813529
NONE	US20080198455		11813902	NONE	US20080273186		11814685	7791826	US20080170303		11814713
NONE	US20080192224		11814928	NONE	US20090009744		11814929	7826155	US20080285161		11815048
7907347	US20090036289		11816981	8081295	US20090053618		11817903	7460212	US20080013680		11825078
7679831	US20080043331		11838995	7609464	US20080043349		11840568	NONE	US20080100815		11842313
7589921	US20090052066		11844232	8035803	US20080055580		11850255	7999913	US20080024746		11851852
7959310	US20080143981		11854621	7763870	US20080315134		11855849	7884922	US20080013066		11860193
7684131	US20080080070		11861851	7672044	US20080019013		11864193	7573655	US20080117532		11870025
7515363	US20070297074		11895990	7760425	US20090059358		11896689	8441747	US20080204689		11901130
9134501	US20090147229		11901131	7738117	US20080117436		11905235	8134716	US20080231840		11908911
7982854	US20080192225		11911454	8873151	US20080192359		11911904	7973908	US20090079952		11913598
NONE	US20090207511		11914055	7777963	US20080310029		11915191	8199333	US20090051927		11915705
NONE	US20090115986		11916162	8717534	US20110051110		11916470	8049964	US20080192335		11917500
NONE	US20090213345		11919858	7643149	US20090231593		11920838	8831170	US20080144202		11934509
NONE	US20080117397		11935719	7710542	US20080174757		11936768	7791737	US20090237672		11939382
7760345	US20080204729		11942507	7858957	US20080123807		11945401	7817248	US20080212083		11947900
8194230	US20080165415		11949376	7483121	US20080088816		11949981	NONE	US20080151245		11950153
8163632	US20080149858		11950208	NONE	US20080151211		11951746	7463423	US20080144184		11955662
7990520	US20080212059		11957647	NONE	US20080165925		11961431	8027088	US20080158665		11964527
7929114	US20080170216		11969476	7830611	US20080239503		11971328	8018650	US20080170310		11971640
8023104	US20080174759		11971659	RE42065	NONE		11981032	RE41667	NONE		11981033
RE42118	NONE		11981511	8027023	US20080186467		11985884	8039813	US20090114818		11991546
NONE	US20090256075		11991547	NONE	US20100149500		11993422	NONE	US20080278828		11994482
NONE	US20090059189		11994747	7545483	US20080192215		12008879	7456408	US20080130076		12009984
7532304	US20080204679		12010705	7929116	US20080143992		12010819	7835073	US20080174858		12014496
7859641	US20080239270		12015894	7649702	US20080212211		12019830	7787177	US20090296204		12026592
8027024	US20080174758		12029165	8259392	US20080192223		12030646	NONE	US20080297754		12031595
7751127	US20080165426		12032010	NONE	US20080144043		12032623	7791711	US20080143984		12036903
8031326	US20080204877		12042621	NONE	US20080218716		12044743	9046795	US20080225247		12046186
7729065	US20080218721		12046605	7446951	US20080151381		12046809	8179519	US20080309907		12046836
8077289	US20080218725		12052507	7999916	US20080204875		12053993	NONE	US20080204692		12054991
7760366	US20080180688		12057098	7885021	US20090040638		12057130	NONE	US20090040495		12058173
8031327	US20080266540		12058993	7965377	US20080192220		12060543	NONE	US20080284998		12061339
7961293	US20080170215		12076307	NONE	US20090159810		12095198	7875865	US20080258070		12098739
7961298	US20080186469		12099533	7672047	US20080186567		12099882	7869122	US20080212170		12100233
NONE	US20080259303		12103185	NONE	US20080259308		12104091	7605905	US20080278699		12107879
7929115	US20080297884		12129161	8228485	US20090002663		12129235	8199315	US20080285002		12131430
7738187	US20080304035		12134062	8435726	US20080309905		12135781	7710640	US20080278799		12138851
7875418	US20080311526		12142138	7768721	US20080316621		12143322	NONE	US20090316256		12143598
8102506	US20090002668		12146186	7817250	US20090021719		12146200	8587765	US20090091727		12158340
7719772	US20090046357		12166406	NONE	US20090015814		12169466	7999917	US20090021713		12171596
8208127	US20090021714		12173595	8027022	US20090027644		12174131	7847921	US20090040496		12177715
7755748	US20080285018		12181774	7679821	US20080297889		12184818	7880969	US20090021839		12186365
NONE	US20080309904		12188652	NONE	US20080304032		12190007	8705005	US20090021715		12190179
8395756	US20090021716		12190308	8081293	US20090027646		12191069	8339574	US20080304037		12192676
NONE	US20080316456		12194005	NONE	US20080304033		12194229	NONE	US20080309894		12195566
7733501	US20090015845		12195920	8054446	US20100045948		12196075	8528461	US20090091720		12196391
7605926	NONE		12197035	8675178	US20090040498		12197567	8861084	US20080316598		12200068
8482717	US20080316459		12201767	8237915	US20090002661		12203738	8320043	US20090002675		12205572
8339575	US20090073412		12206550	8107054	US20090073398		12210514	7656595	US20090009892		12211978
7602502	US20080316500		12216106	8174674	US20090021707		12230979	8094287	US20090027638		12232861
8174677	US20090091731		12233914	NONE	US20100071720		12234447	NONE	US20090041182		12235277
8970819	US20090051890		12235957	8243281	US20090079992		12238193	7965456	US20090021950		12241640
7961294	US20090040487		12247597	8908149	US20090097000		12251132	7697211	US20090080086		12257156
7592598	US20090073410		12257910	8104905	US20090128829		12263564	7692868	US20090103184		12265090
8363206	US20090135385		12267074	7782538	US20090059385		12269686	8040492	US20090135397		12270994
NONE	US20090115991		12272297	8582081	US20090122288		12274583	7583443	US20090128894		12321220
7982969	US20090284831		12330980	8605253	US20090153829		12334685	NONE	US20090135395		12337262
7802891	US20090097142		12338049	7699480	US20090103199		12341597	8211627	US20090191490		12345960
7605914	US20090225308		12348204	8795839	US20090174934		12350474	8169595	US20090174876		12357126
8003960	US20090173895		12357927	NONE	US20090185148		12358722	8325323	US20090153831		12361842
7816022	US20090142615		12368027	8390784	US20090185153		12369460	8269947	US20090207396		12372095
8305558	US20090213356		12390676	8269948	US20090225297		12390685	NONE	US20090219497		12390849
7952797	US20090251772		12399775	8025777	US20090223812		12399887	7768723	US20090168207		12400965
8279402	US20090233233		12403132	8382301	US20090231707		12403233	8705006	US20090244508		12403972
7928412	US20090173360		12405831	8542342	US20090190116		12408577	NONE	US20090213352		12409277
8208199	US20090190208		12409394	8542346	US20090244509		12409961	8248578	US20090237636		12410640
8411251	US20090201481		12413170	8310752	US20090207487		12413981	8269981	NONE		12414390
9274435	US20090195766		12415173	8126669	US20090306921		12421996	8102502	US20090197211		12422140
NONE	US20090260654		12430633	8462315	US20090231565		12432921	8097847	US20100181479		12459078
8472006	US20090214986		12463242	NONE	US20090262324		12464730	NONE	US20090225296		12467879
8279397	US20090314931		12469546	8253927	US20090257040		12470092	NONE	US20090251677		12473137
8169694	US20090262443		12474247	8917379	US20090280437		12483733	8163667	US20090251673		12488059
8120763	US20090257049		12489639	8264668	US20100002217		12496762	7914955	US20090268189		12498226
8237918	US20090323042		12498475	8164046	US20110012010		12504591	NONE	US20100007866		12504844
8339577	US20100039629		12506364	7920344	US20090284849		12506450	8537332	US20100020302		12507694
8169594	US20090323043		12509738	NONE	US20100020390		12511515	8253925	US20090323044		12533513
8416390	US20100060873		12533756	7919004	US20100027106		12534659	8227770	US20090316130		12535249
8144830	US20100027107		12536251	7787104	US20100039636		12536925	NONE	US20100024865		12538998
NONE	US20100026978		12539136	NONE	US20090296066		12540107	7977651	US20090316128		12547135
NONE	US20100066990		12549541	NONE	US20100112494		12552483	NONE	US20100014065		12552894
7995884	US20090324174		12555269	7911598	US20100034349		12555620	8199400	US20100014153		12561019
8305701	US20100065252		12561800	8446665	US20110038061		12562693	NONE	US20100033696		12563766
8760744	US20100060988		12565481	8711472	US20100149632		12568306	9104026	US20100188738		12568483
9329499	US20100079737		12569262	NONE	US20100079738		12569430	8345222	US20100097592		12580369
NONE	US20100103420		12604670	8259393	US20100045957		12607438	NONE	US20100112465		12607612
NONE	US20100085644		12609437	NONE	US20100045952		12611999	8345350	US20100128240		12621239
NONE	US20100134768		12623744	NONE	US20100079741		12624755	9063439	US20100079739		12624993
8164077	US20100067653		12625336	NONE	US20100182710		12626437	8212991	US20100073655		12628294
NONE	US20100149510		12631536	8773639	US20100103400		12632055	NONE	US20100149504		12637889
7800732	US20100157266		12643637	7782443	US20100157268		12646021	7965453	US20100172019		12651829
8419862	US20100288302		12662840	7936521	US20100177320		12684600	8089634	US20100177321		12684632
8294991	US20100134891		12687299	NONE	US20100134880		12687325	7955767	US20100183962		12690571
8228483	US20100195070		12698242	8358402	US20100149503		12698780	8873022	US20100201962		12699529
8325322	US20100201958		12700122	8004755	US20100134908		12700169	8089707	US20100134777		12700351
NONE	US20100134907		12702040	8330935	US20100141912		12703068	8279404	US20100195075		12703417
8218148	US20100208254		12703829	8454230	US20100141917		12706422	8400618	US20100208230		12706560
8717531	US20100261120		12707783	8351139	US20100214675		12708034	8944615	US20100149517		12710487
9007563	US20100157269		12711059	NONE	US20100220302		12711993	NONE	US20100149671		12712808
8054557	US20100157435		12715473	8179621	US20100157270		12716357	9316920	US20100165318		12717696
8164759	US20100214565		12722706	NONE	US20100208225		12723456	8436982	US20100201959		12723496
8553202	US20100201964		12724496	8634060	US20100173250		12725223	8934085	US20100231882		12726081
8773638	US20100231883		12727482	8289623	US20100177293		12729948	NONE	US20110019171		12730395
8065103	US20100235127		12731564	8300211	US20110075121		12748862	9075321	US20100195076		12748896
8553200	US20100231877		12751849	8057053	US20100200777		12755193	9036772	US20100265480		12756456
8558991	US20100231884		12758530	NONE	US20100195077		12758554	7920275	US20100201960		12765285
8576376	US20100231885		12767521	8717538	US20100231886		12767574	8605255	US20100265481		12767627
8035903	US20100245847		12768286	8049973	US20100214551		12776047	8625071	US20100220303		12778649
8319945	US20100231887		12779133	8488103	US20100290021		12780035	8379188	US20100231888		12782831
8937708	US20100253926		12789772	8467031	US20100265482		12795014	9348232	US20100309449		12797188
NONE	US20110188019		12814269	8416490	US20100265572		12816863	8339701	US20100253999		12817628
NONE	US20100321649		12817915	8891057	US20100283984		12818501	8724086	US20100283985		12818844
7969663	US20100323299		12819861	NONE	US20100259742		12823403	8319944	US20100265478		12825001
7929227	US20100271607		12829491	7995296	US20100271716		12830913	8004756	US20110007387		12834485
9069263	US20100290024		12836176	9013680	US20100277708		12836436	NONE	US20100277707		12836982
9001304	US20110013171		12838393	NONE	US20100284652		12842624	8705000	US20110019172		12846470
9411241	US20110001947		12848603	8351023	US20100315616		12850131	8488127	US20100315651		12850740
8174771	US20100296160		12851073	NONE	US20110063597		12851074	8467033	US20100321661		12853971
8025427	US20100309450		12855305	NONE	US20110001948		12871979	9046794	US20110043774		12883247
8416392	US20110001949		12883639	8395753	US20110007293		12884485	8629972	US20110026003		12884670
8710471	US20110014799		12887139	NONE	US20110058147		12893762	8687169	US20110063595		12894890
7990622	US20110019169		12896128	8068276	US20110026110		12899297	8928855	US20110037961		12937498
8094380	US20110063596		12949985	8902406	US20110141446		12951216	NONE	US20110063590		12951777
8645608	US20120005398		13171394

Correspondence name and address
	TIMOTHY A. FRENCH
	FISH & RICHARDSON P.C.
	ONE MARINA PARK DRIVE
	BOSTON, MASSACHUSETTS 02210-1878

Assignment: 11

Reel/Frame:	025792/0679			Pages:	7
		Recorded:	02/15/2011
Attorney Dkt #:	23080-0009002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20110063590

12951777

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 12

Reel/Frame:	025827/0651			Pages:	7
		Recorded:	02/18/2011
Attorney Dkt #:	20228-0022002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8213079

US20110109894

13008282

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 13

Reel/Frame:	025857/0517			Pages:	7
		Recorded:	02/28/2011
Attorney Dkt #:	17979-0202001
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20110063597

12851074

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 14

Reel/Frame:	025857/0775			Pages:	7
		Recorded:	02/28/2011
Attorney Dkt #:	18239-0070002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9013680

US20100277708

12836436

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 15

Reel/Frame:	025858/0053			Pages:	7
		Recorded:	02/28/2011
Attorney Dkt #:	18239-0049002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

7990622

US20110019169

12896128

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 16

Reel/Frame:	025907/0357			Pages:	7
		Recorded:	03/06/2011
Attorney Dkt #:	18239-0037002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9046787

US20110109893

13007039

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 17

Reel/Frame:	025986/0481			Pages:	7
		Recorded:	03/21/2011
Attorney Dkt #:	17979-0192002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8513628

US20110079737

12969115

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 18

Reel/Frame:	025987/0244			Pages:	7
		Recorded:	03/21/2011
Attorney Dkt #:	24548-0010002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20110188019

12814269

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 19

Reel/Frame:	025987/0400			Pages:	7
		Recorded:	03/21/2011
Attorney Dkt #:	17979-0197002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8094380

US20110063596

12949985

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 20

Reel/Frame:	025990/0315			Pages:	7
		Recorded:	03/21/2011
Attorney Dkt #:	22942-0029002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8508854

US20110080569

12966552

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 21

Reel/Frame:	026005/0391			Pages:	6
		Recorded:	03/23/2011
Attorney Dkt #:	24548-0018002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8120763

US20090257049

12489639

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 22

Reel/Frame:	026116/0759			Pages:	6
		Recorded:	04/13/2011
Attorney Dkt #:	23080-0026004
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8256912

US20110176234

13074759

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 23

Reel/Frame:	026151/0333			Pages:	6
		Recorded:	04/19/2011
Attorney Dkt #:	22942-0038003/002/001
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Properties

Pat #

Pub #

Intl #

App #

Pat #

Pub #

Intl #

App #

Pat #

Pub #

Intl #

App #

6655808

US20020113954

09950186

7410265

US20040130809

10675471

7871171

US20080297755

12218400

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 24

Reel/Frame:	026159/0452			Pages:	6
		Recorded:	04/20/2011
Attorney Dkt #:	22942-0032002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

7995296

US20100271716

12830913

Correspondence name and address
	MICHAEL R. HAMLIN
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 25

Reel/Frame:	026162/0177			Pages:	12
		Recorded:	04/21/2011
Attorney Dkt #:	18233-0019002
Conveyance:	CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE NAME PREVIOUSLY RECORDED ON REEL 026116 FRAME 0654. ASSIGNOR(S) HEREBY CONFIRMS THE CORRECT ASSIGNEE IS CARL ZEISS SMT GMBH.

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8441613

US20110164235

13050346

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 26

Reel/Frame:	026168/0035			Pages:	6
		Recorded:	04/22/2011
Attorney Dkt #:	23080-0036002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8599502

US20110279914

13081996

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 27

Reel/Frame:	026168/0367			Pages:	6
		Recorded:	04/22/2011
Attorney Dkt #:	21070-0021002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8643824

US20110157572

13045723

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 28

Reel/Frame:	026170/0411			Pages:	6
		Recorded:	04/22/2011
Attorney Dkt #:	22942-0003003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8570676

US20110181857

13046170

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 29

Reel/Frame:	026207/0197			Pages:	6
		Recorded:	05/02/2011
Attorney Dkt #:	17979-0054004
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8514371

US20110199597

13096112

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 30

Reel/Frame:	026233/0612			Pages:	6
		Recorded:	05/05/2011
Attorney Dkt #:	24548-0010001
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8482717

US20080316459

12201767

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 31

Reel/Frame:	026271/0404			Pages:	6
		Recorded:	05/12/2011
Attorney Dkt #:	17979-0189002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20110199599

13091868

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 32

Reel/Frame:	026304/0587			Pages:	6
		Recorded:	05/18/2011
Attorney Dkt #:	23523-0020003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20110211180

13104467

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 33

Reel/Frame:	026307/0413			Pages:	6
		Recorded:	05/19/2011
Attorney Dkt #:	22942-0035002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20110216428

13108549

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 34

Reel/Frame:	026329/0669			Pages:	6
		Recorded:	05/24/2011
Attorney Dkt #:	22942-0037003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20110216303

13109383

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 35

Reel/Frame:	026340/0012			Pages:	6
		Recorded:	05/25/2011
Attorney Dkt #:	18239-0053002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9733395

US20110222043

13112357

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 36

Reel/Frame:	026341/0707			Pages:	6
		Recorded:	05/26/2011
Attorney Dkt #:	23080-0022002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

7995884

US20090324174

12555269

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 37

Reel/Frame:	026359/0697			Pages:	6
		Recorded:	05/31/2011
Attorney Dkt #:	17979-0138005
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8355201

US20110211252

13081394

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 38

Reel/Frame:	026359/0703			Pages:	6
		Recorded:	05/31/2011
Attorney Dkt #:	18239-0023002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20110228246

13115741

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 39

Reel/Frame:	026404/0993			Pages:	6
		Recorded:	06/07/2011
Attorney Dkt #:	18233-0005010
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8289619

US20110235167

13153544

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 40

Reel/Frame:	026516/0874			Pages:	6
		Recorded:	06/28/2011
Attorney Dkt #:	21070-0013002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8854606

US20110242517

13161011

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 41

Reel/Frame:	026516/0882			Pages:	6
		Recorded:	06/28/2011
Attorney Dkt #:	18239-0059002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8520307

US20110083542

12973234

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 42

Reel/Frame:	026525/0336			Pages:	6
		Recorded:	06/29/2011
Attorney Dkt #:	21070-0019002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8643825

US20110255067

13164860

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 43

Reel/Frame:	026533/0708			Pages:	6
		Recorded:	06/30/2011
Attorney Dkt #:	22942-0032003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8488261

US20110255181

13170951

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 44

Reel/Frame:	026539/0461			Pages:	6
		Recorded:	07/01/2011
Attorney Dkt #:	18239-0062002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8325426

US20110235013

13156819

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 45

Reel/Frame:	026544/0530			Pages:	6
		Recorded:	07/05/2011
Attorney Dkt #:	23505-0011002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20120013878

13173207

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 46

Reel/Frame:	026547/0206			Pages:	6
		Recorded:	07/06/2011
Attorney Dkt #:	17979-0188002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8614785

US20110261338

13173560

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 47

Reel/Frame:	026610/0065			Pages:	6
		Recorded:	07/18/2011
Attorney Dkt #:	17979-0025003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8317345

US20110273791

13183823

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 48

Reel/Frame:	026631/0230			Pages:	6
		Recorded:	07/22/2011
Attorney Dkt #:	23523-0019002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8174676

US20110279803

13187003

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 49

Reel/Frame:	026718/0641			Pages:	6
		Recorded:	08/09/2011
Attorney Dkt #:	21070-0007002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8208200

US20110292367

13205278

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 50

Reel/Frame:	026776/0500			Pages:	6
		Recorded:	08/19/2011
Attorney Dkt #:	17979-0001009
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKCOHEN, GERMANY 73447

Properties

Pat #

Pub #

Intl #

App #

Pat #

Pub #

Intl #

App #

Pat #

Pub #

Intl #

App #

6927901

US20030099034

10208842

6995930

US20050117224

10734623

6967771

US20040174587

10768665

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O. BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 51

Reel/Frame:	026812/0643			Pages:	6
		Recorded:	08/26/2011
Attorney Dkt #:	18233-0015002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8411356

US20110304926

13217793

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 52

Reel/Frame:	026873/0656			Pages:	6
		Recorded:	09/08/2011
Attorney Dkt #:	18233-0027002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8780441

US20120002273

13226615

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 53

Reel/Frame:	027015/0625			Pages:	6
		Recorded:	10/04/2011
Attorney Dkt #:	17979-0180003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8416515

US20120019798

13230398

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 54

Reel/Frame:	027074/0764			Pages:	6
		Recorded:	10/17/2011
Attorney Dkt #:	18239-0027002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8902407

US20120033296

13272440

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 55

Reel/Frame:	027103/0603			Pages:	6
		Recorded:	10/21/2011
Attorney Dkt #:	23523-0004004
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8879159

US20120019800

13245116

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 56

Reel/Frame:	027259/0636			Pages:	6
		Recorded:	11/21/2011
Attorney Dkt #:	18233-0009002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9110383

US20120069318

13299062

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 57

Reel/Frame:	027301/0400			Pages:	6
		Recorded:	11/30/2011
Attorney Dkt #:	17979-0001009
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Properties

Pat #

Pub #

Intl #

App #

Pat #

Pub #

Intl #

App #

8767181

US20110069296

12946380

8264695

US20110141484

13030748

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 58

Reel/Frame:	027323/0295			Pages:	6
		Recorded:	12/05/2011
Attorney Dkt #:	22942-0034003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20120075611

13307550

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 59

Reel/Frame:	027407/0312			Pages:	6
		Recorded:	12/19/2011
Attorney Dkt #:	22942-0021001
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8159648

US20080316444

12171394

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 60

Reel/Frame:	027464/0834			Pages:	6
		Recorded:	12/30/2011
Attorney Dkt #:	20228-0028002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8982325

US20120092637

13333350

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 61

Reel/Frame:	027464/0856			Pages:	6
		Recorded:	12/30/2011
Attorney Dkt #:	17979-0197003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8810927

US20120075608

13312196

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 62

Reel/Frame:	027479/0705			Pages:	6
		Recorded:	01/04/2012
Attorney Dkt #:	21070-0003003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9223226

US20120081686

13325734

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 63

Reel/Frame:	027486/0293			Pages:	6
		Recorded:	01/05/2012
Attorney Dkt #:	21070-0003002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9052611

US20120081685

13325642

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 64

Reel/Frame:	027668/0830			Pages:	6
		Recorded:	02/07/2012
Attorney Dkt #:	17979-0133002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9360775

US20120134016

13364565

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 65

Reel/Frame:	027925/0795			Pages:	6
		Recorded:	03/26/2012
Attorney Dkt #:	22942-0021002
Conveyance:	MERGER (SEE DOCUMENT FOR DETAILS).

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20120176591

13423965

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 66

Reel/Frame:	027926/0132			Pages:	6
		Recorded:	03/26/2012
Attorney Dkt #:	23505-0015002
Conveyance:	MERGER (SEE DOCUMENT FOR DETAILS).

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8451458

US20120176670

13423760

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 67

Reel/Frame:	027970/0614			Pages:	6
		Recorded:	04/02/2012
Attorney Dkt #:	22942-0011002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8705185

US20120194795

13431378

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 68

Reel/Frame:	028010/0959			Pages:	6
		Recorded:	04/09/2012
Attorney Dkt #:	23523-0019003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8659744

US20120188636

13440226

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 69

Reel/Frame:	028011/0072			Pages:	6
		Recorded:	04/09/2012
Attorney Dkt #:	18239-0065002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9116441

US20120188527

13438179

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 70

Reel/Frame:	028011/0086			Pages:	6
		Recorded:	04/09/2012
Attorney Dkt #:	21070-0011004
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9465300

US20120188525

13438428

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 71

Reel/Frame:	028069/0820			Pages:	6
		Recorded:	04/18/2012
Attorney Dkt #:	17979-0196003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8246211

US20110299285

13215910

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 72

Reel/Frame:	028316/0454			Pages:	6
		Recorded:	06/04/2012
Attorney Dkt #:	21070-0007003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8810903

US20120236282

13481431

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 73

Reel/Frame:	028316/0460			Pages:	6
		Recorded:	06/04/2012
Attorney Dkt #:	23136-0007002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8436985

US20120236272

13479768

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 74

Reel/Frame:	028349/0610			Pages:	6
		Recorded:	06/08/2012
Attorney Dkt #:	21070-0039002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8328374

US20120026476

13268303

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 75

Reel/Frame:	028434/0145			Pages:	6
		Recorded:	06/25/2012
Attorney Dkt #:	18233-0005011
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8804234

US20120274918

13495763

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 76

Reel/Frame:	028457/0289			Pages:	6
		Recorded:	06/28/2012
Attorney Dkt #:	18233-0005012
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20120274919

13532282

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 77

Reel/Frame:	028487/0921			Pages:	6
		Recorded:	06/29/2012
Attorney Dkt #:	24548-0019006
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8730572

US20120250147

13470956

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 78

Reel/Frame:	028619/0666			Pages:	6
		Recorded:	07/23/2012
Attorney Dkt #:	17979-0196004
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8480261

US20120281198

13553005

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 79

Reel/Frame:	028651/0850			Pages:	6
		Recorded:	07/26/2012
Attorney Dkt #:	18239-0066002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9013684

US20120293784

13556408

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 80

Reel/Frame:	028701/0676			Pages:	6
		Recorded:	08/01/2012
Attorney Dkt #:	36865-0002001
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

73447 OBERKOCHEN, GERMANY

Property

Pat #

Pub #

Intl #

App #

8537460

US20120293779

13530192

Correspondence name and address
	MARC M. WEFERS
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 81

Reel/Frame:	028733/0993			Pages:	6
		Recorded:	08/06/2012
Attorney Dkt #:	17979-0060002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9588434

US20120300185

13562515

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 82

Reel/Frame:	028736/0289			Pages:	6
		Recorded:	08/07/2012
Attorney Dkt #:	20228-0043002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8928859

US20120293786

13564419

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 83

Reel/Frame:	028768/0719			Pages:	6
		Recorded:	08/08/2012
Attorney Dkt #:	24548-0013002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20130114056

13564857

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 84

Reel/Frame:	028852/0732			Pages:	6
		Recorded:	08/27/2012
Attorney Dkt #:	22942-0028002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9383544

US20120327385

13590509

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 85

Reel/Frame:	028885/0882			Pages:	6
		Recorded:	08/31/2012
Attorney Dkt #:	24548-0018003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20120113429

13351710

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 86

Reel/Frame:	029035/0795			Pages:	6
		Recorded:	09/25/2012
Attorney Dkt #:	23080-0028US1
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8300210

US20090174874

11664896

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 87

Reel/Frame:	029036/0671			Pages:	6
		Recorded:	09/25/2012
Attorney Dkt #:	18233-0031002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9013678

US20130010352

13613390

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 88

Reel/Frame:	029058/0113			Pages:	6
		Recorded:	09/28/2012
Attorney Dkt #:	23080-0028002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9104016

US20130044304

13626810

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 89

Reel/Frame:	029197/0572			Pages:	6
		Recorded:	10/25/2012
Attorney Dkt #:	21070-0092004
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8632195

US20130063710

13657091

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 90

Reel/Frame:	029200/0095			Pages:	6
		Recorded:	10/26/2012
Attorney Dkt #:	72261.128
Conveyance:	MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY D-73447

Property

Pat #

Pub #

Intl #

App #

9933707

US20120194793

13279368

Correspondence name and address
	DONALD S. SHOWALTER
	401 EAST LAS OLAS BOULEVARD
	SUITE 1850
	FORT LAUDERDALE, FL 33301

Assignment: 91

Reel/Frame:	029217/0360			Pages:	6
		Recorded:	10/30/2012
Attorney Dkt #:	18239-0035003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9164396

US20130070224

13660347

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 92

Reel/Frame:	029396/0314			Pages:	6
		Recorded:	12/03/2012
Attorney Dkt #:	23080-0025002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

10215948

US20130100547

13690227

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 93

Reel/Frame:	029480/0840			Pages:	6
		Recorded:	12/17/2012
Attorney Dkt #:	24548-0018004
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8836929

US20140022524

13713870

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 94

Reel/Frame:	029486/0094			Pages:	6
		Recorded:	12/17/2012
Attorney Dkt #:	18239-0020003
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9436095

US20130120723

13682474

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 95

Reel/Frame:	029486/0115			Pages:	6
		Recorded:	12/17/2012
Attorney Dkt #:	23080-0020002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8902401

US20130114057

13712576

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 96

Reel/Frame:	029564/0742			Pages:	6
		Recorded:	01/02/2013
Attorney Dkt #:	24548-0020002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20130120728

13717439

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 97

Reel/Frame:	029564/0767			Pages:	6
		Recorded:	01/02/2013
Attorney Dkt #:	23375-0005002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9025137

US20130120726

13718224

Correspondence name and address
	CHRIS C. BOWLEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 98

Reel/Frame:	029646/0874			Pages:	6
		Recorded:	01/17/2013
Attorney Dkt #:	22942-0031002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

NONE

US20130100426

13683138

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 99

Reel/Frame:	030128/0075			Pages:	6
		Recorded:	04/01/2013
Attorney Dkt #:	17979-0180004
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

8493674

US20130135760

13751284

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

Assignment: 100

Reel/Frame:	030508/0686			Pages:	7
		Recorded:	05/29/2013
Attorney Dkt #:	18239-0056002
Conveyance:	A MODIFYING CONVERSION

Assignor

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Property

Pat #

Pub #

Intl #

App #

9217931

US20130258303

13902100

Correspondence name and address
	SEAN P. DALEY
	FISH & RICHARDSON P.C.
	P.O.BOX 1022
	MINNEAPOLIS, MN 55440-1022

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