Total properties:
618
Page
2
of
7
Pages:
1 2 3 4 5 6 7
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/01/2003
|
Application #:
|
09884824
|
Filing Dt:
|
06/19/2001
|
|
Publication #:
|
|
Pub Dt:
|
12/19/2002
| | | | |
|
Title:
|
SYSTEM FOR TRANSPORTING SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/17/2002
|
Application #:
|
09890839
|
Filing Dt:
|
08/02/2001
|
|
Title:
|
METHOD OF USING A SPECIMEN SENSING END EFFECTOR TO ALIGN A ROBOT ARM WITH A SPECIMEN STORED ON OR IN A CONTAINER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/10/2004
|
Application #:
|
09892945
|
Filing Dt:
|
06/27/2001
|
|
Publication #:
|
|
Pub Dt:
|
04/18/2002
| | | | |
|
Title:
|
RETICLE STORAGE SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/19/2005
|
Application #:
|
09897202
|
Filing Dt:
|
07/02/2001
|
|
Publication #:
|
|
Pub Dt:
|
01/02/2003
| | | | |
|
Title:
|
FAST SWAP DUAL SUBSTRATE TRANSPORT FOR LOAD LOCK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/06/2004
|
Application #:
|
09898693
|
Filing Dt:
|
07/03/2001
|
|
Publication #:
|
|
Pub Dt:
|
01/09/2003
| | | | |
|
Title:
|
SUBSTRATE HANDLING END EFFECTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/13/2003
|
Application #:
|
09900526
|
Filing Dt:
|
07/06/2001
|
|
Publication #:
|
|
Pub Dt:
|
05/30/2002
| | | | |
|
Title:
|
RETICLE STORAGE AND RETRIEVAL SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/11/2003
|
Application #:
|
09905339
|
Filing Dt:
|
07/13/2001
|
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
|
Title:
|
SMIF LOAD PORT INTERFACE INCLUDING SMART PORT DOOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/15/2003
|
Application #:
|
09905490
|
Filing Dt:
|
07/13/2001
|
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
|
Title:
|
CLEAN METHOD FOR VACUUM HOLDING OF SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/04/2004
|
Application #:
|
09918973
|
Filing Dt:
|
07/31/2001
|
|
Publication #:
|
|
Pub Dt:
|
04/10/2003
| | | | |
|
Title:
|
FAST SERIAL INTERFACE USED FOR CONTROLLER TO ROBOT COMMUNICATIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/20/2002
|
Application #:
|
09920353
|
Filing Dt:
|
08/01/2001
|
|
Publication #:
|
|
Pub Dt:
|
04/11/2002
| | | | |
|
Title:
|
METHOD OF USING A SPECIMEN SENSING END EFFECTOR TO DETERMINE THE THICKNESS OF A SPECIMEN
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/26/2003
|
Application #:
|
09924146
|
Filing Dt:
|
08/07/2001
|
|
Publication #:
|
|
Pub Dt:
|
04/18/2002
| | | | |
|
Title:
|
HANDLER FOR THE TRANSPORTING OF FLAT SUBSTRATES FOR APPLICATION IN THE SEMI-CONDUCTOR INDUSTRY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/23/2004
|
Application #:
|
09935919
|
Filing Dt:
|
08/23/2001
|
|
Publication #:
|
|
Pub Dt:
|
07/18/2002
| | | | |
|
Title:
|
WEB BASED TOOL CONTROL IN A SEMICONDUCTOR FABRICATION FACILITY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/15/2003
|
Application #:
|
09943555
|
Filing Dt:
|
08/30/2001
|
|
Publication #:
|
|
Pub Dt:
|
04/25/2002
| | | | |
|
Title:
|
EDGE GRIP ALIGNER WITH BUFFERING CAPABILITIES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/18/2004
|
Application #:
|
09958504
|
Filing Dt:
|
10/09/2001
|
|
Title:
|
DEVICE FOR MANIPULATING AN OBJECT FOR LOADING AND UNLOADING A CLEAN ROOM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/13/2004
|
Application #:
|
10006263
|
Filing Dt:
|
12/04/2001
|
|
Publication #:
|
|
Pub Dt:
|
06/05/2003
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS WITH INDEPENDENTLY CONFIGURABLE INTEGRAL LOAD LOCKS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/14/2006
|
Application #:
|
10009218
|
Filing Dt:
|
02/05/2002
|
|
Title:
|
DEVICE FOR HANDLING SUBSTRATES INSIDE AND OUTSIDE A CLEAN ROOM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/26/2003
|
Application #:
|
10012142
|
Filing Dt:
|
11/13/2001
|
|
Publication #:
|
|
Pub Dt:
|
07/11/2002
| | | | |
|
Title:
|
LOADING AND UNLOADING STATION FOR SEMICONDUCTOR PROCESSING INSTALLATIONS
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10056158
|
Filing Dt:
|
01/24/2002
|
|
Publication #:
|
|
Pub Dt:
|
11/07/2002
| | | | |
|
Title:
|
Control system for transfer and buffering
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/13/2013
|
Application #:
|
10074411
|
Filing Dt:
|
02/12/2002
|
|
Publication #:
|
|
Pub Dt:
|
08/15/2002
| | | | |
|
Title:
|
SECURE REMOTE DIAGNOSTIC CUSTOMER SUPPORT NETWORK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/15/2007
|
Application #:
|
10087092
|
Filing Dt:
|
03/01/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/06/2003
| | | | |
|
Title:
|
SEMICONDUCTOR MATERIAL HANDLING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/27/2006
|
Application #:
|
10087400
|
Filing Dt:
|
03/01/2002
|
|
Title:
|
WAFER ENGINE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/05/2006
|
Application #:
|
10087638
|
Filing Dt:
|
03/01/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/06/2003
| | | | |
|
Title:
|
UNIFIED FRAME FOR SEMICONDUCTOR MATERIAL HANDLING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/24/2004
|
Application #:
|
10104846
|
Filing Dt:
|
03/22/2002
|
|
Publication #:
|
|
Pub Dt:
|
09/25/2003
| | | | |
|
Title:
|
DEVICE FOR HANDLING FLAT PANELS IN A VACUUM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/22/2004
|
Application #:
|
10106571
|
Filing Dt:
|
03/26/2002
|
|
Publication #:
|
|
Pub Dt:
|
09/26/2002
| | | | |
|
Title:
|
AUTOMATIC JACKETING OF A CABLE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/22/2004
|
Application #:
|
10106571
|
Filing Dt:
|
03/26/2002
|
|
Publication #:
|
|
Pub Dt:
|
09/26/2002
| | | | |
|
Title:
|
AUTOMATIC JACKETING OF A CABLE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/23/2003
|
Application #:
|
10120673
|
Filing Dt:
|
04/11/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/20/2003
| | | | |
|
Title:
|
ROBOT ARM EDGE GRIPPING DEVICE FOR HANDLING SUBSTRATES USING TWO FOUR-BAR LINKAGES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/14/2004
|
Application #:
|
10120744
|
Filing Dt:
|
04/11/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/17/2002
| | | | |
|
Title:
|
SEMICONDUCTOR LOAD PORT ALIGNMENT DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/05/2005
|
Application #:
|
10121152
|
Filing Dt:
|
04/11/2002
|
|
Publication #:
|
|
Pub Dt:
|
07/17/2003
| | | | |
|
Title:
|
ROBOT ARM EDGE GRIPPING DEVICE FOR HANDLING SUBSTRATES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/25/2009
|
Application #:
|
10159726
|
Filing Dt:
|
05/29/2002
|
|
Publication #:
|
|
Pub Dt:
|
12/04/2003
| | | | |
|
Title:
|
DUAL ARM SUBSTRATE TRANSPORT APPARATUS
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10179916
|
Filing Dt:
|
06/24/2002
|
|
Publication #:
|
|
Pub Dt:
|
02/06/2003
| | | | |
|
Title:
|
Continuous processing automated workstation
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/02/2008
|
Application #:
|
10194702
|
Filing Dt:
|
07/12/2002
|
|
Publication #:
|
|
Pub Dt:
|
05/15/2003
| | | | |
|
Title:
|
INTEGRATED SYSTEM FOR TOOL FRONT-END WORKPIECE HANDLING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/18/2004
|
Application #:
|
10196066
|
Filing Dt:
|
07/15/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
|
Title:
|
SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE INDEPENDENT END EFFECTORS
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10196679
|
Filing Dt:
|
07/15/2002
|
|
Publication #:
|
|
Pub Dt:
|
02/20/2003
| | | | |
|
Title:
|
Centering double side edge grip end effector with integrated mapping sensor
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/04/2003
|
Application #:
|
10196685
|
Filing Dt:
|
07/15/2002
|
|
Publication #:
|
|
Pub Dt:
|
06/12/2003
| | | | |
|
Title:
|
TRAJECTORY PLANNING AND MOTION CONTROL STRATEGIES FOR A PLANAR THREE-DEGREE-OF-FREEDOM ROBOTIC ARM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/22/2005
|
Application #:
|
10200818
|
Filing Dt:
|
07/22/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/22/2004
| | | | |
|
Title:
|
SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10202401
|
Filing Dt:
|
07/22/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/22/2004
| | | | |
|
Title:
|
Robotic hand with multi-wafer end effector
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/09/2003
|
Application #:
|
10223075
|
Filing Dt:
|
08/15/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/20/2003
| | | | |
|
Title:
|
METHOD OF USING A SPECIMEN SENSING END EFFECTOR TO DETERMINE ANGULAR ORIENTATION OF A SPECIMEN
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/07/2004
|
Application #:
|
10223122
|
Filing Dt:
|
08/19/2002
|
|
Publication #:
|
|
Pub Dt:
|
02/19/2004
| | | | |
|
Title:
|
MODULAR FRAME FOR A WAFER FABRICATION SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/13/2007
|
Application #:
|
10234640
|
Filing Dt:
|
09/03/2002
|
|
Publication #:
|
|
Pub Dt:
|
07/10/2003
| | | | |
|
Title:
|
UNIVERSAL MODULAR WAFER TRANSPORT SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/20/2007
|
Application #:
|
10244852
|
Filing Dt:
|
09/16/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/23/2003
| | | | |
|
Title:
|
METHOD OF REMOVING SUBSTRATES FROM A STORAGE SITE AND A MULTIPLE SUBSTRATE BATCH LOADER
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10253735
|
Filing Dt:
|
09/24/2002
|
|
Publication #:
|
|
Pub Dt:
|
04/24/2003
| | | | |
|
Title:
|
Person-guided vehicle
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/11/2009
|
Application #:
|
10266072
|
Filing Dt:
|
10/07/2002
|
|
Publication #:
|
|
Pub Dt:
|
04/08/2004
| | | | |
|
Title:
|
SUBSTRATE ALIGNMENT SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2004
|
Application #:
|
10267008
|
Filing Dt:
|
10/08/2002
|
|
Publication #:
|
|
Pub Dt:
|
04/08/2004
| | | | |
|
Title:
|
SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/03/2004
|
Application #:
|
10267465
|
Filing Dt:
|
10/08/2002
|
|
Publication #:
|
|
Pub Dt:
|
04/08/2004
| | | | |
|
Title:
|
APPARATUS FOR ALIGNMENT AND ORIENTATION OF A WAFER FOR PROCESSING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/17/2006
|
Application #:
|
10297485
|
Filing Dt:
|
04/16/2003
|
|
Publication #:
|
|
Pub Dt:
|
11/06/2003
| | | | |
|
Title:
|
DEVICE FOR POSITIONING DISK-SHAPED OBJECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/23/2006
|
Application #:
|
10312396
|
Filing Dt:
|
02/19/2003
|
|
Publication #:
|
|
Pub Dt:
|
08/28/2003
| | | | |
|
Title:
|
DEVICE AND METHOD FOR CLEANING ARTICLES USED IN THE PRODUCTION OF SEMICONDUCTOR COMPONENTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/31/2004
|
Application #:
|
10328749
|
Filing Dt:
|
12/24/2002
|
|
Publication #:
|
|
Pub Dt:
|
09/18/2003
| | | | |
|
Title:
|
SEMICONDUCTOR PROCESSING TOOL ALIGNMENT TECHNIQUE IMPLEMENTED IN A FIMS SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/09/2004
|
Application #:
|
10328853
|
Filing Dt:
|
12/24/2002
|
|
Publication #:
|
|
Pub Dt:
|
09/18/2003
| | | | |
|
Title:
|
SPECIMEN SCANNING MECHANISM ADAPTED FOR IMPLEMENTATION IN A FIMS SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/20/2004
|
Application #:
|
10335134
|
Filing Dt:
|
12/30/2002
|
|
Publication #:
|
|
Pub Dt:
|
09/18/2003
| | | | |
|
Title:
|
DETECTION OF MOTIVE FORCE APPLIED TO TRANSPORT BOX MOUNTED ON A FIMS SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/16/2010
|
Application #:
|
10339150
|
Filing Dt:
|
01/09/2003
|
|
Publication #:
|
|
Pub Dt:
|
07/15/2004
| | | | |
|
Title:
|
WAFER SHIPPING CONTAINER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/14/2007
|
Application #:
|
10413102
|
Filing Dt:
|
04/14/2003
|
|
Publication #:
|
|
Pub Dt:
|
10/28/2004
| | | | |
|
Title:
|
SUBSTRATE CASSETTE MAPPER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/22/2011
|
Application #:
|
10434582
|
Filing Dt:
|
05/09/2003
|
|
Publication #:
|
|
Pub Dt:
|
01/01/2004
| | | | |
|
Title:
|
DUAL ARM ROBOT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/09/2006
|
Application #:
|
10438470
|
Filing Dt:
|
05/15/2003
|
|
Publication #:
|
|
Pub Dt:
|
03/04/2004
| | | | |
|
Title:
|
PRE-ALIGNER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/04/2004
|
Application #:
|
10444327
|
Filing Dt:
|
05/22/2003
|
|
Publication #:
|
|
Pub Dt:
|
10/23/2003
| | | | |
|
Title:
|
EDGE GRIP ALIGNER WITH BUFFERING CAPABILITIES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/04/2005
|
Application #:
|
10460698
|
Filing Dt:
|
06/12/2003
|
|
Publication #:
|
|
Pub Dt:
|
11/06/2003
| | | | |
|
Title:
|
LOADING AND UNLOADING STATION FOR SEMICONDUCTOR PROCESSING INSTALLATIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/20/2007
|
Application #:
|
10465677
|
Filing Dt:
|
06/19/2003
|
|
Publication #:
|
|
Pub Dt:
|
12/23/2004
| | | | |
|
Title:
|
SEMICONDUCTOR WAFER HAVING AN EDGE BASED IDENTIFICATION FEATURE
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10489627
|
Filing Dt:
|
08/16/2004
|
|
Publication #:
|
|
Pub Dt:
|
12/30/2004
| | | | |
|
Title:
|
Mobile transponder reader
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10509664
|
Filing Dt:
|
09/29/2004
|
|
Publication #:
|
|
Pub Dt:
|
08/11/2005
| | | | |
|
Title:
|
Controlling device for monitoring the spatial or mechanical delimitation of producer goods or materials in the production cycle by using of transponder technology
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/13/2005
|
Application #:
|
10613697
|
Filing Dt:
|
07/03/2003
|
|
Publication #:
|
|
Pub Dt:
|
01/06/2005
| | | | |
|
Title:
|
SUBSTRATE APPARATUS CALIBRATION AND SYNCHRONIZATION PROCEDURE
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10618313
|
Filing Dt:
|
07/10/2003
|
|
Publication #:
|
|
Pub Dt:
|
01/13/2005
| | | | |
|
Title:
|
Data collection and diagnostic system for a semiconductor fabrication facility
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/21/2006
|
Application #:
|
10618446
|
Filing Dt:
|
07/10/2003
|
|
Publication #:
|
|
Pub Dt:
|
01/13/2005
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR LOCATING/SIZING CONTAMINANTS ON A POLISHED PLANAR SURFACE OF A DIELECTRIC OR SEMICONDUCTOR MATERIAL
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10622261
|
Filing Dt:
|
07/18/2003
|
|
Publication #:
|
|
Pub Dt:
|
09/30/2004
| | | | |
|
Title:
|
Bi-directional arm and storage system
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/16/2010
|
Application #:
|
10623970
|
Filing Dt:
|
07/21/2003
|
|
Publication #:
|
|
Pub Dt:
|
07/22/2004
| | | | |
|
Title:
|
SUBSTRATE LOADING AND UPLOADING STATION WITH BUFFER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/2007
|
Application #:
|
10624133
|
Filing Dt:
|
07/21/2003
|
|
Publication #:
|
|
Pub Dt:
|
01/27/2005
| | | | |
|
Title:
|
ACTIVE EDGE GRIPPING END EFFECTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/18/2009
|
Application #:
|
10624987
|
Filing Dt:
|
07/22/2003
|
|
Publication #:
|
|
Pub Dt:
|
08/05/2004
| | | | |
|
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/02/2006
|
Application #:
|
10626504
|
Filing Dt:
|
07/23/2003
|
|
Publication #:
|
|
Pub Dt:
|
01/27/2005
| | | | |
|
Title:
|
ROBOT END EFFECTOR POSITION ERROR CORRECTION USING AUTO-TEACH METHODOLOGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/20/2009
|
Application #:
|
10628294
|
Filing Dt:
|
07/28/2003
|
|
Publication #:
|
|
Pub Dt:
|
06/17/2004
| | | | |
|
Title:
|
MANIPULATING DEVICE FOR PHOTOMASKS THAT PROVIDES POSSIBILITIES FOR CLEANING AND INSPECTION OF PHOTOMASKS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/20/2010
|
Application #:
|
10628980
|
Filing Dt:
|
07/29/2003
|
|
Publication #:
|
|
Pub Dt:
|
05/13/2004
| | | | |
|
Title:
|
RETICLE MANIPULATING DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/13/2005
|
Application #:
|
10635231
|
Filing Dt:
|
08/06/2003
|
|
Publication #:
|
|
Pub Dt:
|
09/23/2004
| | | | |
|
Title:
|
RETICLE TRACKING AND CLEANING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/24/2005
|
Application #:
|
10649116
|
Filing Dt:
|
08/26/2003
|
|
Publication #:
|
|
Pub Dt:
|
02/26/2004
| | | | |
|
Title:
|
SPECIMEN SENSING AND EDGE GRIPPING END EFFECTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/19/2005
|
Application #:
|
10654107
|
Filing Dt:
|
09/03/2003
|
|
Publication #:
|
|
Pub Dt:
|
05/13/2004
| | | | |
|
Title:
|
DEVICE AND PROCESS FOR READING OUT IDENTIFICATION INFORMATION ON RETICLES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/19/2006
|
Application #:
|
10692047
|
Filing Dt:
|
10/23/2003
|
|
Publication #:
|
|
Pub Dt:
|
09/30/2004
| | | | |
|
Title:
|
DEVICE FOR THE DETECTION OF SUBSTRATES STACKED WITH A SPECIFIC SPACING
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10719069
|
Filing Dt:
|
11/21/2003
|
|
Publication #:
|
|
Pub Dt:
|
06/10/2004
| | | | |
|
Title:
|
Distributed control system architecture and method for a material transport system
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/24/2006
|
Application #:
|
10739375
|
Filing Dt:
|
12/18/2003
|
|
Publication #:
|
|
Pub Dt:
|
08/26/2004
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR ON-THE-FLY ECCENTRICITY RECOGNITION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/17/2007
|
Application #:
|
10741146
|
Filing Dt:
|
12/19/2003
|
|
Publication #:
|
|
Pub Dt:
|
10/07/2004
| | | | |
|
Title:
|
THREE-DEGREE-OF-FREEDOM PARALLEL ROBOT ARM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/06/2006
|
Application #:
|
10888819
|
Filing Dt:
|
07/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
03/10/2005
| | | | |
|
Title:
|
ULTRA LOW CONTACT AREA END EFFECTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/05/2006
|
Application #:
|
10895484
|
Filing Dt:
|
07/20/2004
|
|
Publication #:
|
|
Pub Dt:
|
12/23/2004
| | | | |
|
Title:
|
MULTI-AXIAL POSITIONING MECHANISM FOR A FIMS SYSTEM PORT DOOR
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10927703
|
Filing Dt:
|
08/27/2004
|
|
Publication #:
|
|
Pub Dt:
|
09/08/2005
| | | | |
|
Title:
|
Method and apparatus for semiconductor processing
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/02/2011
|
Application #:
|
10962787
|
Filing Dt:
|
10/09/2004
|
|
Publication #:
|
|
Pub Dt:
|
05/19/2005
| | | | |
|
Title:
|
LINEAR SUBSTRATE TRANSPORT APPARATUS
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10975824
|
Filing Dt:
|
10/28/2004
|
|
Publication #:
|
|
Pub Dt:
|
08/04/2005
| | | | |
|
Title:
|
Method for cleaning reaction vessels in place
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/01/2007
|
Application #:
|
10985727
|
Filing Dt:
|
11/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
06/09/2005
| | | | |
|
Title:
|
METHODS AND SYSTEMS FOR HANDLING A WORKPIECE IN VACUUM-BASED MATERIAL HANDLING SYSTEM
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10985730
|
Filing Dt:
|
11/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
10/13/2005
| | | | |
|
Title:
|
Methods and systems for driving robotic components of a semiconductor handling system
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/02/2008
|
Application #:
|
10985834
|
Filing Dt:
|
11/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
05/26/2005
| | | | |
|
Title:
|
MID-ENTRY LOAD LOCK FOR SEMICONDUCTOR HANDLING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/09/2008
|
Application #:
|
10985839
|
Filing Dt:
|
11/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
06/02/2005
| | | | |
|
Title:
|
STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10985843
|
Filing Dt:
|
11/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
05/26/2005
| | | | |
|
Title:
|
Methods and systems for reducing the effect of vibration in a vacuum-based semiconductor handling system
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10985844
|
Filing Dt:
|
11/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
05/26/2005
| | | | |
|
Title:
|
Sensor methods and systems for semiconductor handling
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10985846
|
Filing Dt:
|
11/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
05/26/2005
| | | | |
|
Title:
|
Software controller for handling system
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/06/2007
|
Application #:
|
11014401
|
Filing Dt:
|
12/16/2004
|
|
Publication #:
|
|
Pub Dt:
|
06/22/2006
| | | | |
|
Title:
|
ACTIVE EDGE GRIP REST PAD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/13/2011
|
Application #:
|
11045545
|
Filing Dt:
|
01/28/2005
|
|
Publication #:
|
|
Pub Dt:
|
12/01/2005
| | | | |
|
Title:
|
SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11070443
|
Filing Dt:
|
03/02/2005
|
|
Publication #:
|
|
Pub Dt:
|
09/07/2006
| | | | |
|
Title:
|
Reduced cost process modules
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/22/2011
|
Application #:
|
11093479
|
Filing Dt:
|
03/30/2005
|
|
Publication #:
|
|
Pub Dt:
|
11/02/2006
| | | | |
|
Title:
|
HIGH SPEED SUBSTRATE ALIGNER APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/04/2015
|
Application #:
|
11093480
|
Filing Dt:
|
03/30/2005
|
|
Publication #:
|
|
Pub Dt:
|
11/02/2006
| | | | |
|
Title:
|
TRANSFER CHAMBER BETWEEN WORKSTATIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/01/2012
|
Application #:
|
11093481
|
Filing Dt:
|
03/30/2005
|
|
Publication #:
|
|
Pub Dt:
|
10/05/2006
| | | | |
|
Title:
|
SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/20/2008
|
Application #:
|
11104397
|
Filing Dt:
|
04/12/2005
|
|
Publication #:
|
|
Pub Dt:
|
08/24/2006
| | | | |
|
Title:
|
FAST SWAP DUAL SUBSTRATE TRANSPORT FOR LOAD LOCK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/19/2007
|
Application #:
|
11136078
|
Filing Dt:
|
05/23/2005
|
|
Publication #:
|
|
Pub Dt:
|
03/02/2006
| | | | |
|
Title:
|
METHOD OF DETERMINING AXIAL ALIGNMENT OF THE CENTROID OF AN EDGE GRIPPING END EFFECTOR AND THE CENTER OF A SPECIMEN GRIPPED BY IT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/19/2013
|
Application #:
|
11148871
|
Filing Dt:
|
06/09/2005
|
|
Publication #:
|
|
Pub Dt:
|
05/11/2006
| | | | |
|
Title:
|
DUAL SCARA ARM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/27/2009
|
Application #:
|
11154787
|
Filing Dt:
|
06/15/2005
|
|
Publication #:
|
|
Pub Dt:
|
03/02/2006
| | | | |
|
Title:
|
SUBTRATE PROCESSING APPARATUS WITH REMOVABLE COMPONENT MODULE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/23/2012
|
Application #:
|
11168908
|
Filing Dt:
|
06/28/2005
|
|
Publication #:
|
|
Pub Dt:
|
03/16/2006
| | | | |
|
Title:
|
NONPRODUCTIVE WAFER BUFFER MODULE FOR SUBSTRATE PROCESSING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/08/2011
|
Application #:
|
11178615
|
Filing Dt:
|
07/11/2005
|
|
Publication #:
|
|
Pub Dt:
|
01/11/2007
| | | | |
|
Title:
|
SCALABLE MOTION CONTROL SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/05/2013
|
Application #:
|
11178830
|
Filing Dt:
|
07/11/2005
|
|
Publication #:
|
|
Pub Dt:
|
01/25/2007
| | | | |
|
Title:
|
Substrate transport apparatus
|
|
