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Reel/Frame:	058482/0001			Pages:	63
		Recorded:	12/09/2021
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 618
Page 4 of 7
Pages: 1 2 3 4 5 6 7

Patent #:	9633881	Issue Dt:	04/25/2017	Application #:	12025752	Filing Dt:	02/05/2008
Publication #:	US20090196715	Pub Dt:	08/06/2009
Title:	Automatic handling buffer for bare stocker

Patent #:	8070410	Issue Dt:	12/06/2011	Application #:	12025769	Filing Dt:	02/05/2008
Publication #:	US20090196716	Pub Dt:	08/06/2009
Title:	SCALABLE STOCKER WITH AUTOMATIC HANDLING BUFFER

Patent #:	NONE	Issue Dt:		Application #:	12030707	Filing Dt:	02/13/2008
Publication #:	US20080226429	Pub Dt:	09/18/2008
Title:	MULTI-FUNCTION VACUUM LINK

Patent #:	NONE	Issue Dt:		Application #:	12030736	Filing Dt:	02/13/2008
Publication #:	US20080131238	Pub Dt:	06/05/2008
Title:	Particle-Reducing Load Lock Seal

Patent #:	NONE	Issue Dt:		Application #:	12030897	Filing Dt:	02/14/2008
Publication #:	US20080232933	Pub Dt:	09/25/2008
Title:	Robotic Chamber Support Pedestal

Patent #:	8434989	Issue Dt:	05/07/2013	Application #:	12030902	Filing Dt:	02/14/2008
Publication #:	US20080131237	Pub Dt:	06/05/2008
Title:	Batch Wafer Alignment

Patent #:	NONE	Issue Dt:		Application #:	12030922	Filing Dt:	02/14/2008
Publication #:	US20080145192	Pub Dt:	06/19/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	7894657	Issue Dt:	02/22/2011	Application #:	12032341	Filing Dt:	02/15/2008
Publication #:	US20080147333	Pub Dt:	06/19/2008
Title:	WAFER CENTER FINDING

Patent #:	NONE	Issue Dt:		Application #:	12032405	Filing Dt:	02/15/2008
Publication #:	US20080145194	Pub Dt:	06/19/2008
Title:	SENSOR ARRANGEMENTS FOR WAFER CENTER FINDING

Patent #:	NONE	Issue Dt:		Application #:	12032436	Filing Dt:	02/15/2008
Publication #:	US20080255798	Pub Dt:	10/16/2008
Title:	WAFER CENTER FINDING WITH A KALMAN FILTER

Patent #:	NONE	Issue Dt:		Application #:	12032463	Filing Dt:	02/15/2008
Publication #:	US20080135788	Pub Dt:	06/12/2008
Title:	WAFER CENTER FINDING WITH CONTACT IMAGE SENSORS

Patent #:	7859685	Issue Dt:	12/28/2010	Application #:	12032489	Filing Dt:	02/15/2008
Publication #:	US20080231866	Pub Dt:	09/25/2008
Title:	WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES

Patent #:	NONE	Issue Dt:		Application #:	12032567	Filing Dt:	02/15/2008
Publication #:	US20080208372	Pub Dt:	08/28/2008
Title:	SCHEDULING WITH NEURAL NETWORKS AND STATE MACHINES

Patent #:	8442667	Issue Dt:	05/14/2013	Application #:	12032733	Filing Dt:	02/18/2008
Publication #:	US20080147580	Pub Dt:	06/19/2008
Title:	APPLICATIONS OF NEURAL NETWORKS

Patent #:	10163667	Issue Dt:	12/25/2018	Application #:	12054160	Filing Dt:	03/24/2008
Publication #:	US20080232934	Pub Dt:	09/25/2008
Title:	LINEAR WAFER DRIVE FOR HANDLING WAFERS DURING SEMICONDUCTOR FABRICATION

Patent #:	8757026	Issue Dt:	06/24/2014	Application #:	12103505	Filing Dt:	04/15/2008
Publication #:	US20090255362	Pub Dt:	10/15/2009
Title:	Clean transfer robot

Patent #:	8777540	Issue Dt:	07/15/2014	Application #:	12104139	Filing Dt:	04/16/2008
Publication #:	US20080251473	Pub Dt:	10/16/2008
Title:	APPARATUS FOR STORING CONTAMINATION-SENSITIVE FLAT ARTICLES, IN PARTICULAR FOR STORING SEMICONDUCTOR WAFERS

Patent #:	NONE	Issue Dt:		Application #:	12104193	Filing Dt:	04/16/2008
Publication #:	US20080260499	Pub Dt:	10/23/2008
Title:	FACET ADAPTER FOR A WAFER HANDLER

Patent #:	8950998	Issue Dt:	02/10/2015	Application #:	12106975	Filing Dt:	04/21/2008
Publication #:	US20080260500	Pub Dt:	10/23/2008
Title:	BATCH SUBSTRATE HANDLING

Patent #:	8267636	Issue Dt:	09/18/2012	Application #:	12117355	Filing Dt:	05/08/2008
Publication #:	US20080298944	Pub Dt:	12/04/2008
Title:	SUBSTRATE TRANSPORT APPARATUS

Patent #:	8752449	Issue Dt:	06/17/2014	Application #:	12117415	Filing Dt:	05/08/2008
Publication #:	US20090087288	Pub Dt:	04/02/2009
Title:	SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM

Patent #:	8562271	Issue Dt:	10/22/2013	Application #:	12123329	Filing Dt:	05/19/2008
Publication #:	US20090003976	Pub Dt:	01/01/2009
Title:	COMPACT SUBSTRATE TRANSPORT SYSTEM

Patent #:	8272825	Issue Dt:	09/25/2012	Application #:	12123365	Filing Dt:	05/19/2008
Publication #:	US20090016855	Pub Dt:	01/15/2009
Title:	LOAD LOCK FAST PUMP VENT

Patent #:	9105673	Issue Dt:	08/11/2015	Application #:	12123391	Filing Dt:	05/19/2008
Publication #:	US20090129897	Pub Dt:	05/21/2009
Title:	SIDE OPENING UNIFIED POD

Patent #:	10586722	Issue Dt:	03/10/2020	Application #:	12131024	Filing Dt:	05/30/2008
Publication #:	US20080298936	Pub Dt:	12/04/2008
Title:	VACUUM SUBSTRATE STORAGE

Patent #:	7737567	Issue Dt:	06/15/2010	Application #:	12143197	Filing Dt:	06/20/2008
Publication #:	US20090001616	Pub Dt:	01/01/2009
Title:	METHOD AND APPARATUS FOR WAFER MARKING

Patent #:	8231322	Issue Dt:	07/31/2012	Application #:	12148346	Filing Dt:	04/18/2008
Publication #:	US20080253868	Pub Dt:	10/16/2008
Title:	FAST SWAP DUAL SUBSTRATE TRANSPORT FOR LOAD LOCK

Patent #:	8129984	Issue Dt:	03/06/2012	Application #:	12163716	Filing Dt:	06/27/2008
Publication #:	US20090224750	Pub Dt:	09/10/2009
Title:	MULTIPLE DIMENSION POSITION SENSOR

Patent #:	8222892	Issue Dt:	07/17/2012	Application #:	12163802	Filing Dt:	06/27/2008
Publication #:	US20090033316	Pub Dt:	02/05/2009
Title:	SENSOR FOR SIMULTANEOUS POSITION AND GAP MEASUREMENT

Patent #:	7834618	Issue Dt:	11/16/2010	Application #:	12163984	Filing Dt:	06/27/2008
Publication #:	US20090015248	Pub Dt:	01/15/2009
Title:	POSITION SENSOR SYSTEM

Patent #:	8659205	Issue Dt:	02/25/2014	Application #:	12163993	Filing Dt:	06/27/2008
Publication #:	US20090033173	Pub Dt:	02/05/2009
Title:	MOTOR STATOR WITH LIFT CAPABILITY AND REDUCED COGGING CHARACTERISTICS

Patent #:	8283813	Issue Dt:	10/09/2012	Application #:	12163996	Filing Dt:	06/27/2008
Publication #:	US20090243413	Pub Dt:	10/01/2009
Title:	ROBOT DRIVE WITH MAGNETIC SPINDLE BEARINGS

Patent #:	8008884	Issue Dt:	08/30/2011	Application #:	12175278	Filing Dt:	07/17/2008
Publication #:	US20090022571	Pub Dt:	01/22/2009
Title:	SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS

Patent #:	NONE	Issue Dt:		Application #:	12184194	Filing Dt:	07/31/2008
Publication #:	US20100028111	Pub Dt:	02/04/2010
Title:	Variable-Size Load Port and Method for Operating the Same

Patent #:	8178829	Issue Dt:	05/15/2012	Application #:	12195095	Filing Dt:	08/20/2008
Publication #:	US20090095886	Pub Dt:	04/16/2009
Title:	WAFER PRESENCE DETECTOR WITH END EFFECTORS HAVING OPTICAL COUPLERS AND FIBERS

Patent #:	8029225	Issue Dt:	10/04/2011	Application #:	12206382	Filing Dt:	09/08/2008
Publication #:	US20090067958	Pub Dt:	03/12/2009
Title:	STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM

Patent #:	8029226	Issue Dt:	10/04/2011	Application #:	12239717	Filing Dt:	09/26/2008
Publication #:	US20090087286	Pub Dt:	04/02/2009
Title:	SEMICONDUCTOR MANUFACTURING SYSTEMS

Patent #:	NONE	Issue Dt:		Application #:	12244693	Filing Dt:	10/02/2008
Publication #:	US20090092470	Pub Dt:	04/09/2009
Title:	END EFFECTOR WITH SENSING CAPABILITIES

Patent #:	NONE	Issue Dt:		Application #:	12253212	Filing Dt:	10/16/2008
Publication #:	US20090101067	Pub Dt:	04/23/2009
Title:	METHOD AND APPARATUS FOR WAFER SUPPORT

Patent #:	7988399	Issue Dt:	08/02/2011	Application #:	12260818	Filing Dt:	10/29/2008
Publication #:	US20090053016	Pub Dt:	02/26/2009
Title:	MID-ENTRY LOAD LOCK FOR SEMICONDUCTOR HANDLING SYSTEM

Patent #:	8293066	Issue Dt:	10/23/2012	Application #:	12325993	Filing Dt:	12/01/2008
Publication #:	US20090078374	Pub Dt:	03/26/2009
Title:	APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES

Patent #:	8960099	Issue Dt:	02/24/2015	Application #:	12330780	Filing Dt:	12/09/2008
Publication #:	US20090162179	Pub Dt:	06/25/2009
Title:	SUBSTRATE PROCESSING APPARATUS

Patent #:	NONE	Issue Dt:		Application #:	12348276	Filing Dt:	01/03/2009
Publication #:	US20090175707	Pub Dt:	07/09/2009
Title:	Controlled deflection of large area semiconductor substrates for shipping and manufacturing containers

Patent #:	9524896	Issue Dt:	12/20/2016	Application #:	12368241	Filing Dt:	02/09/2009
Publication #:	US20090191030	Pub Dt:	07/30/2009
Title:	APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES

Patent #:	9230838	Issue Dt:	01/05/2016	Application #:	12375065	Filing Dt:	06/20/2011
Publication #:	US20120027547	Pub Dt:	02/02/2012
Title:	APPARATUS FOR STORAGE OF OBJECTS FROM THE FIELD OF MANUFACTURE OF ELECTRONIC COMPONENTS

Patent #:	NONE	Issue Dt:		Application #:	12432359	Filing Dt:	04/29/2009
Publication #:	US20100034621	Pub Dt:	02/11/2010
Title:	END EFFECTOR TO SUBSTRATE OFFSET DETECTION AND CORRECTION

Patent #:	8424703	Issue Dt:	04/23/2013	Application #:	12434330	Filing Dt:	05/01/2009
Publication #:	US20090272743	Pub Dt:	11/05/2009
Title:	SUBSTRATE CONTAINER SEALING VIA MOVABLE MAGNETS

Patent #:	9033647	Issue Dt:	05/19/2015	Application #:	12499565	Filing Dt:	07/08/2009
Publication #:	US20100119349	Pub Dt:	05/13/2010
Title:	SUBSTRATE ALIGNMENT SYSTEM

Patent #:	NONE	Issue Dt:		Application #:	12516261	Filing Dt:	02/04/2010
Publication #:	US20100183420	Pub Dt:	07/22/2010
Title:	TRANSFER DEVICE FOR AN OVERHEAD CONVEYING SYSTEM

Patent #:	8602706	Issue Dt:	12/10/2013	Application #:	12542588	Filing Dt:	08/17/2009
Publication #:	US20110038692	Pub Dt:	02/17/2011
Title:	SUBSTRATE PROCESSING APPARATUS

Patent #:	8328495	Issue Dt:	12/11/2012	Application #:	12544064	Filing Dt:	08/19/2009
Publication #:	US20100054897	Pub Dt:	03/04/2010
Title:	REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM

Patent #:	8459922	Issue Dt:	06/11/2013	Application #:	12651160	Filing Dt:	12/31/2009
Publication #:	US20110118875	Pub Dt:	05/19/2011
Title:	MANIPULATOR AUO-TEACH AND POSITION CORRECTION SYSTEM

Patent #:	8454293	Issue Dt:	06/04/2013	Application #:	12723837	Filing Dt:	03/15/2010
Publication #:	US20100172721	Pub Dt:	07/08/2010
Title:	SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER

Patent #:	8425172	Issue Dt:	04/23/2013	Application #:	12761499	Filing Dt:	04/16/2010
Publication #:	US20100292826	Pub Dt:	11/18/2010
Title:	RETICLE MANIPULATION DEVICE

Patent #:	NONE	Issue Dt:		Application #:	12776235	Filing Dt:	05/07/2010
Publication #:	US20100221915	Pub Dt:	09/02/2010
Title:	METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING

Patent #:	8851820	Issue Dt:	10/07/2014	Application #:	12780761	Filing Dt:	05/14/2010
Publication #:	US20100290872	Pub Dt:	11/18/2010
Title:	SUBSTRATE CONTAINER STORAGE SYSTEM

Patent #:	8882433	Issue Dt:	11/11/2014	Application #:	12780846	Filing Dt:	05/14/2010
Publication #:	US20100290873	Pub Dt:	11/18/2010
Title:	INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEMS

Patent #:	8591664	Issue Dt:	11/26/2013	Application #:	12817306	Filing Dt:	06/17/2010
Publication #:	US20100319730	Pub Dt:	12/23/2010
Title:	Integrated cleaner and dryer system

Patent #:	11443962	Issue Dt:	09/13/2022	Application #:	12817310	Filing Dt:	06/17/2010
Publication #:	US20100319733	Pub Dt:	12/23/2010
Title:	INTEGRATED HANDLING SYSTEM FOR SEMICONDUCTOR ARTICLES

Patent #:	8870516	Issue Dt:	10/28/2014	Application #:	12828236	Filing Dt:	06/30/2010
Publication #:	US20120000816	Pub Dt:	01/05/2012
Title:	PORT DOOR POSITIONING APPARATUS AND ASSOCIATED METHODS

Patent #:	8182192	Issue Dt:	05/22/2012	Application #:	12843659	Filing Dt:	07/26/2010
Publication #:	US20110014016	Pub Dt:	01/20/2011
Title:	EQUIPMENT STORAGE FOR SUBSTRATE PROCESSING APPARATUS

Patent #:	8419341	Issue Dt:	04/16/2013	Application #:	12875414	Filing Dt:	09/03/2010
Publication #:	US20100329827	Pub Dt:	12/30/2010
Title:	LINEAR VACUUM ROBOT WITH Z MOTION AND ARTICULATED ARM

Patent #:	8270702	Issue Dt:	09/18/2012	Application #:	12875462	Filing Dt:	09/03/2010
Publication #:	US20100324732	Pub Dt:	12/23/2010
Title:	WAFER CENTER FINDING WITH A KALMAN FILTER

Patent #:	NONE	Issue Dt:		Application #:	12886301	Filing Dt:	09/20/2010
Publication #:	US20110008136	Pub Dt:	01/13/2011
Title:	REDUCED CAPACITY CARRIER, TRANSPORT LOAD PORT, BUFFER SYSTEM

Patent #:	8678734	Issue Dt:	03/25/2014	Application #:	12897440	Filing Dt:	10/04/2010
Publication #:	US20110142575	Pub Dt:	06/16/2011
Title:	ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM

Patent #:	11002566	Issue Dt:	05/11/2021	Application #:	12901146	Filing Dt:	10/08/2010
Publication #:	US20110025310	Pub Dt:	02/03/2011
Title:	POSITION FEEDBACK FOR SELF BEARING MOTOR

Patent #:	8851817	Issue Dt:	10/07/2014	Application #:	12943198	Filing Dt:	11/10/2010
Publication #:	US20120213614	Pub Dt:	08/23/2012
Title:	UNIVERSAL MODULAR WAFER TRANSPORT SYSTEM

Patent #:	8125652	Issue Dt:	02/28/2012	Application #:	12977514	Filing Dt:	12/23/2010
Publication #:	US20110093237	Pub Dt:	04/21/2011
Title:	WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES

Patent #:	9947565	Issue Dt:	04/17/2018	Application #:	13007580	Filing Dt:	01/14/2011
Publication #:	US20110129321	Pub Dt:	06/02/2011
Title:	Workpiece stocker with circular configuration

Patent #:	8356207	Issue Dt:	01/15/2013	Application #:	13008559	Filing Dt:	01/18/2011
Publication #:	US20110173496	Pub Dt:	07/14/2011
Title:	INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE

Patent #:	9020617	Issue Dt:	04/28/2015	Application #:	13011970	Filing Dt:	01/24/2011
Publication #:	US20110118855	Pub Dt:	05/19/2011
Title:	SCALABLE MOTION CONTROL SYSTEM

Patent #:	10770323	Issue Dt:	09/08/2020	Application #:	13028180	Filing Dt:	02/15/2011
Publication #:	US20110198256	Pub Dt:	08/18/2011
Title:	Stackable substrate carriers

Patent #:	8951002	Issue Dt:	02/10/2015	Application #:	13030856	Filing Dt:	02/18/2011
Publication #:	US20120045308	Pub Dt:	02/23/2012
Title:	DUAL ARM ROBOT

Patent #:	8403619	Issue Dt:	03/26/2013	Application #:	13030926	Filing Dt:	02/18/2011
Publication #:	US20120045300	Pub Dt:	02/23/2012
Title:	HIGH SPEED SUBSTRATE ALIGNER APPARATUS

Patent #:	8801069	Issue Dt:	08/12/2014	Application #:	13036876	Filing Dt:	02/28/2011
Publication #:	US20110241367	Pub Dt:	10/06/2011
Title:	ROBOT EDGE CONTACT GRIPPER

Patent #:	8303764	Issue Dt:	11/06/2012	Application #:	13042407	Filing Dt:	03/07/2011
Publication #:	US20110158773	Pub Dt:	06/30/2011
Title:	APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES

Patent #:	8795785	Issue Dt:	08/05/2014	Application #:	13081504	Filing Dt:	04/07/2011
Publication #:	US20120258262	Pub Dt:	10/11/2012
Title:	Methods and apparatuses for roll-on coating.

Patent #:	8739728	Issue Dt:	06/03/2014	Application #:	13081506	Filing Dt:	04/07/2011
Publication #:	US20120255488	Pub Dt:	10/11/2012
Title:	Methods and apparatuses for roll-on coating

Patent #:	8651796	Issue Dt:	02/18/2014	Application #:	13113476	Filing Dt:	05/23/2011
Publication #:	US20110224822	Pub Dt:	09/15/2011
Title:	SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE INDEPENDENTLY MOVABLE ARTICULATED ARMS

Patent #:	8753063	Issue Dt:	06/17/2014	Application #:	13151287	Filing Dt:	06/02/2011
Publication #:	US20110236176	Pub Dt:	09/29/2011
Title:	REMOVABLE COMPARTMENTS FOR WORKPIECE STOCKER

Patent #:	8807905	Issue Dt:	08/19/2014	Application #:	13158883	Filing Dt:	06/13/2011
Publication #:	US20120148374	Pub Dt:	06/14/2012
Title:	LINEAR SEMICONDUCTOR PROCESSING FACILITIES

Patent #:	8651789	Issue Dt:	02/18/2014	Application #:	13159034	Filing Dt:	06/13/2011
Publication #:	US20110232844	Pub Dt:	09/29/2011
Title:	SUBSTRATE PROCESSING APPARATUS

Patent #:	8371792	Issue Dt:	02/12/2013	Application #:	13195401	Filing Dt:	08/01/2011
Publication #:	US20110280693	Pub Dt:	11/17/2011
Title:	SUBSTRATE PROCESSING APPARATUS

Patent #:	8720370	Issue Dt:	05/13/2014	Application #:	13210373	Filing Dt:	08/16/2011
Publication #:	US20120258240	Pub Dt:	10/11/2012
Title:	Methods and apparatuses for roll-on coating

Patent #:	8237391	Issue Dt:	08/07/2012	Application #:	13219267	Filing Dt:	08/26/2011
Publication #:	US20110316370	Pub Dt:	12/29/2011
Title:	SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS

Patent #:	8888434	Issue Dt:	11/18/2014	Application #:	13225547	Filing Dt:	09/05/2011
Publication #:	US20130058743	Pub Dt:	03/07/2013
Title:	Container storage add-on for bare workpiece stocker

Patent #:	8590956	Issue Dt:	11/26/2013	Application #:	13230280	Filing Dt:	09/12/2011
Publication #:	US20120089251	Pub Dt:	04/12/2012
Title:	SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION

Patent #:	8523507	Issue Dt:	09/03/2013	Application #:	13248386	Filing Dt:	09/29/2011
Publication #:	US20120020759	Pub Dt:	01/26/2012
Title:	SEMICONDUCTOR MANUFACTURING SYSTEMS

Patent #:	8944738	Issue Dt:	02/03/2015	Application #:	13248600	Filing Dt:	09/29/2011
Publication #:	US20120014769	Pub Dt:	01/19/2012
Title:	STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM

Patent #:	9656386	Issue Dt:	05/23/2017	Application #:	13270844	Filing Dt:	10/11/2011
Publication #:	US20120128450	Pub Dt:	05/24/2012
Title:	COAXIAL DRIVE VACUUM ROBOT

Patent #:	8764370	Issue Dt:	07/01/2014	Application #:	13284963	Filing Dt:	10/30/2011
Publication #:	US20120045301	Pub Dt:	02/23/2012
Title:	SCALABLE STOCKERS WITH AUTOMATIC HANDLING BUFFER

Patent #:	9691649	Issue Dt:	06/27/2017	Application #:	13286186	Filing Dt:	10/31/2011
Publication #:	US20120076626	Pub Dt:	03/29/2012
Title:	LINEAR VACUUM ROBOT WITH Z MOTION AND ARTICULATED ARM

Patent #:	9623555	Issue Dt:	04/18/2017	Application #:	13293717	Filing Dt:	11/10/2011
Publication #:	US20120141235	Pub Dt:	06/07/2012
Title:	DUAL ARM ROBOT

Patent #:	9324594	Issue Dt:	04/26/2016	Application #:	13334181	Filing Dt:	12/22/2011
Publication #:	US20120195717	Pub Dt:	08/02/2012
Title:	WORKPIECE HANDLING MODULES

Patent #:	8800774	Issue Dt:	08/12/2014	Application #:	13337028	Filing Dt:	12/23/2011
Publication #:	US20120125808	Pub Dt:	05/24/2012
Title:	WORKPIECE SUPPORT STRUCTURES AND APPARATUS FOR ACCESSING SAME

Patent #:	8509938	Issue Dt:	08/13/2013	Application #:	13366968	Filing Dt:	02/06/2012
Publication #:	US20120136471	Pub Dt:	05/31/2012
Title:	SUBSTRATE APPARATUS CALIBRATION AND SYNCHRONIZATION PROCEDURE

Patent #:	8253948	Issue Dt:	08/28/2012	Application #:	13406252	Filing Dt:	02/27/2012
Publication #:	US20120154822	Pub Dt:	06/21/2012
Title:	WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES

Patent #:	8803513	Issue Dt:	08/12/2014	Application #:	13412392	Filing Dt:	03/05/2012
Publication #:	US20120223597	Pub Dt:	09/06/2012
Title:	MULTIPLE DIMENSION POSITION SENSOR

Patent #:	8918203	Issue Dt:	12/23/2014	Application #:	13417837	Filing Dt:	03/12/2012
Publication #:	US20120232690	Pub Dt:	09/13/2012
Title:	SUBSTRATE PROCESSING APPARATUS

100

Patent #:	8628288	Issue Dt:	01/14/2014	Application #:	13436155	Filing Dt:	03/30/2012
Publication #:	US20120189406	Pub Dt:	07/26/2012
Title:	SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER

Assignor

BROOKS AUTOMATION HOLDING, LLC

Exec Dt:

10/01/2021

Assignee

BROOKS AUTOMATION US, LLC

15 ELIZABETH DRIVE

CHELMSFORD, MASSACHUSETTS 01824

Correspondence name and address
	PERMAN AND GREEN LLP
	99 HAWLEY LANE
	STRATFORD, CT 06614

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