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NONE
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13436304
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03/30/2012
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Pub Dt:
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07/26/2012
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Title:
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METHOD AND APPARATUS FOR WAFER SUPPORT
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03/01/2016
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13457278
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04/26/2012
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11/29/2012
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Title:
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Horizontal Displacement Mechanism for Cleanroom Material Transfer Systems
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Patent #:
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11/10/2015
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Application #:
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13464923
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05/04/2012
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Pub Dt:
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12/20/2012
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Title:
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Narrow Width Loadport Mechanism for Cleanroom Material Transfer Systems
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Patent #:
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Issue Dt:
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11/17/2015
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Application #:
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13475723
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Filing Dt:
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05/18/2012
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12/20/2012
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Title:
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DYNAMIC STORAGE AND TRANSFER SYSTEM INTEGRATED WITH AUTONOMOUS GUIDED/ROVING VEHICLE
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Patent #:
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Issue Dt:
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08/07/2018
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Application #:
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13531500
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Filing Dt:
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06/23/2012
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Pub Dt:
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12/27/2012
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Title:
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SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
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Patent #:
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Issue Dt:
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10/09/2018
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Application #:
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13531501
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06/23/2012
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Pub Dt:
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12/27/2012
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Title:
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SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
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Patent #:
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Issue Dt:
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04/15/2014
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13531502
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06/23/2012
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Pub Dt:
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12/27/2012
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Title:
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SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
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Patent #:
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Issue Dt:
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05/09/2017
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Application #:
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13531503
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Filing Dt:
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06/23/2012
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Pub Dt:
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12/27/2012
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Title:
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SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
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Patent #:
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Issue Dt:
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05/09/2017
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Application #:
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13531504
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06/23/2012
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Pub Dt:
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12/27/2012
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Title:
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Semiconductor cleaner systems and methods
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Patent #:
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Issue Dt:
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01/03/2017
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Application #:
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13537009
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Filing Dt:
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06/28/2012
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Pub Dt:
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01/03/2013
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Title:
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SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
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Patent #:
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Issue Dt:
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12/20/2016
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Application #:
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13537016
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Filing Dt:
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06/28/2012
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Publication #:
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Pub Dt:
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01/03/2013
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Title:
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Semiconductor stocker systems and methods
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Patent #:
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Issue Dt:
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06/01/2021
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Application #:
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13537022
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Filing Dt:
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06/28/2012
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Publication #:
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Pub Dt:
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01/03/2013
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Title:
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A ROBOT WITH GAS FLOW SENSOR COUPLED TO ROBOT ARM
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Patent #:
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Issue Dt:
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10/02/2018
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Application #:
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13537031
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Filing Dt:
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06/28/2012
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Publication #:
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Pub Dt:
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01/03/2013
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Title:
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Semiconductor Stocker Systems And Methods
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Patent #:
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Issue Dt:
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11/17/2015
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Application #:
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13547786
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Filing Dt:
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07/12/2012
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Pub Dt:
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01/17/2013
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Title:
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COMPACT DIRECT DRIVE SPINDLE
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Patent #:
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Issue Dt:
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10/09/2018
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Application #:
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13557223
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Filing Dt:
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07/25/2012
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Pub Dt:
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01/24/2013
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Title:
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Simultaneous wafer ID reading
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Patent #:
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Issue Dt:
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01/02/2018
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Application #:
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13561873
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Filing Dt:
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07/30/2012
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Publication #:
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Pub Dt:
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01/31/2013
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Title:
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FAST SWAP DUAL SUBSTRATE TRANSPORT FOR LOAD LOCK
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Patent #:
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Issue Dt:
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03/25/2014
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Application #:
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13567812
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Filing Dt:
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08/06/2012
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Publication #:
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Pub Dt:
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11/29/2012
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Title:
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SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS
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Patent #:
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Issue Dt:
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11/04/2014
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Application #:
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13605941
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Filing Dt:
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09/06/2012
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Publication #:
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Pub Dt:
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03/06/2014
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Title:
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ACCESS ARBITRATION MODULE AND SYSTEM FOR SEMICONDUCTOR FABRICATION EQUIPMENT AND METHODS FOR USING AND OPERATING THE SAME
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Patent #:
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Issue Dt:
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10/28/2014
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Application #:
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13616683
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Filing Dt:
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09/14/2012
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Publication #:
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Pub Dt:
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05/16/2013
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Title:
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SEMICONDUCTOR MANUFACTURING PROCESS MODULE
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Patent #:
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Issue Dt:
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06/10/2014
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Application #:
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13617171
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Filing Dt:
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09/14/2012
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Publication #:
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Pub Dt:
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03/21/2013
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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01/21/2014
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Application #:
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13617333
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Filing Dt:
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09/14/2012
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Publication #:
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Pub Dt:
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04/04/2013
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Title:
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WAFER CENTER FINDING WITH KALMAN FILTER
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Patent #:
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Issue Dt:
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12/29/2015
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Application #:
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13625442
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Filing Dt:
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09/24/2012
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Publication #:
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Pub Dt:
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04/11/2013
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Title:
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REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
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Patent #:
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03/04/2014
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13625704
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09/24/2012
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Publication #:
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Pub Dt:
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03/28/2013
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Title:
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LOAD LOCK FAST PUMP VENT
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Patent #:
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08/08/2017
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13632229
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10/01/2012
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01/31/2013
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Title:
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Transfer mechanism with multiple wafer handling capability
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Patent #:
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05/05/2015
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13646282
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10/05/2012
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Publication #:
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Pub Dt:
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01/31/2013
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Title:
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ROBOT DRIVE WITH MAGNETIC SPINDLE BEARINGS
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Patent #:
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09/09/2014
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13692749
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12/03/2012
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Publication #:
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Pub Dt:
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12/19/2013
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Title:
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TRANSPORT SYSTEM
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02/17/2015
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13703234
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12/10/2012
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Pub Dt:
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03/28/2013
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Title:
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INVENTORY MONITORING OF LIVE-STORAGE SYSTEMS BY MEANS OF RFID
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08/11/2015
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13739831
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01/11/2013
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Pub Dt:
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07/17/2014
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Title:
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INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
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02/18/2014
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13740257
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01/13/2013
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Title:
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INTEGRATED GRIPPER FOR WORKPIECE TRANSFER
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Patent #:
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09/09/2014
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13764373
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02/11/2013
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09/05/2013
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Title:
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SUBSTRATE PROCESSING APPARATUS
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09/29/2015
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13768495
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02/15/2013
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02/27/2014
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DUAL SCARA ARM
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01/17/2017
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13830692
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03/14/2013
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09/18/2014
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Title:
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TRAY ENGINE WITH SLIDE ATTACHED TO AN END EFFECTOR BASE
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02/12/2019
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13861693
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04/12/2013
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09/05/2013
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Title:
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06/23/2015
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13863354
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04/15/2013
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11/14/2013
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06/06/2017
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06/03/2013
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12/19/2013
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11/18/2014
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13914397
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06/10/2013
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12/26/2013
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MANIPULATOR AUTO-TEACH AND POSITION CORRECTION SYSTEM
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10/02/2018
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14014910
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08/30/2013
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12/26/2013
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Title:
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SEMICONDUCTOR MANUFACTURING SYSTEMS
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03/21/2017
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14042248
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09/30/2013
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05/29/2014
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HIGH SPEED SUBSTRATE ALIGNER APPARATUS
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07/26/2016
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14058436
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10/21/2013
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02/13/2014
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COMPACT SUBSTRATE TRANSPORT SYSTEM
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09/04/2018
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14071314
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11/04/2013
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05/08/2014
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SUBSTRATE TRANSPORT APPARATUS
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10/14/2014
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14088345
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11/23/2013
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03/13/2014
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INTEGRATED CLEANER AND DRYER SYSTEM
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06/27/2017
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14089439
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11/25/2013
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08/18/2016
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SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION
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02/12/2019
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14148785
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01/07/2014
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05/01/2014
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SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER
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01/13/2015
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01/20/2014
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07/24/2014
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WAFER CENTER FINDING WITH KALMAN FILTER
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08/27/2019
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01/22/2014
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07/24/2014
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SUBSTRATE TRANSPORT
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02/14/2017
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02/14/2014
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06/12/2014
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SUBSTRATE PROCESSING APPARATUS
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07/11/2017
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02/16/2014
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06/12/2014
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Integrated gripper for workpiece transfer
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10/25/2016
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03/03/2014
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06/26/2014
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02/06/2018
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03/17/2014
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07/17/2014
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SEMICONDUCTOR WAFER HANDLING TRANSPORT
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01/30/2018
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03/19/2014
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09/25/2014
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06/14/2016
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03/24/2014
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11/20/2014
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ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM
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04/14/2015
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14251564
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04/11/2014
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08/07/2014
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Semiconductor cleaner systems and methods
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NONE
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14274679
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05/10/2014
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09/18/2014
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Methods and apparatuses for roll-on coating
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NONE
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14274771
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05/12/2014
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10/02/2014
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Title:
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Methods and apparatuses for roll-on coating
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NONE
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14294141
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06/02/2014
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09/18/2014
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Title:
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Methods and apparatuses for roll-on coating
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06/02/2020
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14304996
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06/16/2014
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10/02/2014
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Removable compartments for workpiece stocker
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05/05/2020
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14305003
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06/16/2014
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10/02/2014
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Title:
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Removable compartments for workpiece stocker
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Patent #:
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Issue Dt:
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07/02/2019
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Application #:
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14305715
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Filing Dt:
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06/16/2014
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Publication #:
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Pub Dt:
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10/02/2014
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Title:
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SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM
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Patent #:
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Issue Dt:
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04/17/2018
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Application #:
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14311340
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Filing Dt:
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06/22/2014
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Publication #:
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Pub Dt:
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10/09/2014
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Title:
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CLEAN TRANSFER ROBOT
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Patent #:
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Issue Dt:
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03/29/2016
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Application #:
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14318707
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Filing Dt:
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06/30/2014
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Publication #:
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Pub Dt:
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11/06/2014
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Title:
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SCALABLE STOCKERS WITH AUTOMATIC HANDLING BUFFER
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Patent #:
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Issue Dt:
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12/06/2016
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Application #:
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14325702
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Filing Dt:
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07/08/2014
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Publication #:
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Pub Dt:
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01/08/2015
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Title:
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PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERING
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Patent #:
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12/13/2016
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Application #:
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14342035
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Filing Dt:
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05/09/2014
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Publication #:
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Pub Dt:
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09/04/2014
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Title:
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TIME-OPTIMAL TRAJECTORIES FOR ROBOTIC TRANSFER DEVICES
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Patent #:
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11/07/2017
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Application #:
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14344930
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Filing Dt:
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07/10/2014
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Publication #:
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Pub Dt:
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09/03/2015
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Title:
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LOAD STATION
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Patent #:
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Issue Dt:
|
01/09/2018
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Application #:
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14353153
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Filing Dt:
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04/21/2014
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Publication #:
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Pub Dt:
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09/18/2014
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Title:
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SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
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Patent #:
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Issue Dt:
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11/27/2018
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14365277
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06/13/2014
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Publication #:
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Pub Dt:
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10/09/2014
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Title:
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TRANSPORT APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14377987
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Filing Dt:
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08/11/2014
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Publication #:
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Pub Dt:
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01/15/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14451422
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Filing Dt:
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08/04/2014
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Publication #:
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Pub Dt:
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12/04/2014
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Title:
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Methods and apparatuses for roll-on coating
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Patent #:
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Issue Dt:
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01/30/2018
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Application #:
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14452490
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Filing Dt:
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08/05/2014
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Publication #:
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Pub Dt:
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12/04/2014
| | | | |
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Title:
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Workpiece Structures and Apparatus for Accessing Same
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Patent #:
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Issue Dt:
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12/14/2021
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Application #:
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14469260
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Filing Dt:
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08/26/2014
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Publication #:
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Pub Dt:
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05/14/2015
| | | | |
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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09/14/2021
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Application #:
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14472678
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Filing Dt:
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08/29/2014
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Publication #:
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Pub Dt:
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12/18/2014
| | | | |
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Title:
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LOAD PORT MODULE
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Patent #:
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Issue Dt:
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03/20/2018
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Application #:
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14497324
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Filing Dt:
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09/26/2014
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Publication #:
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Pub Dt:
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01/08/2015
| | | | |
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Title:
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BUFFER STATION FOR STOCKER SYSTEM
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Patent #:
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Issue Dt:
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06/28/2016
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Application #:
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14508974
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Filing Dt:
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10/07/2014
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Publication #:
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Pub Dt:
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01/22/2015
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Title:
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Port Door Positioning Apparatus and Associated Methods
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Patent #:
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Issue Dt:
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01/07/2020
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14513214
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Filing Dt:
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10/14/2014
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Publication #:
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Pub Dt:
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08/25/2016
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Title:
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Container storage add-on for bare workpiece stocker
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14517900
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Filing Dt:
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10/19/2014
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Publication #:
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Pub Dt:
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10/20/2016
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Title:
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Cleaning Systems and Methods for Semiconductor Substrate Storage Articles
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Patent #:
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Issue Dt:
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01/14/2020
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Application #:
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14530102
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Filing Dt:
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10/31/2014
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Publication #:
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Pub Dt:
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02/26/2015
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Title:
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Access Arbitration System for Semiconductor Fabrication Equipment and Methods for Using and Operating the Same
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Patent #:
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Issue Dt:
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12/12/2017
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Application #:
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14537696
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Filing Dt:
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11/10/2014
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Publication #:
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Pub Dt:
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03/05/2015
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Title:
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INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEMS
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Patent #:
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Issue Dt:
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07/09/2019
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Application #:
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14540055
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Filing Dt:
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11/13/2014
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Publication #:
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Pub Dt:
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05/21/2015
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Title:
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SEALED SWITCHED RELUCTANCE MOTOR
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Patent #:
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Issue Dt:
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08/11/2020
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Application #:
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14540058
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Filing Dt:
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11/13/2014
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Publication #:
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Pub Dt:
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06/09/2016
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Title:
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POSITION FEEDBACK FOR SEALED ENVIRONMENTS
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Patent #:
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Issue Dt:
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04/17/2018
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Application #:
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14540072
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Filing Dt:
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11/13/2014
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Publication #:
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Pub Dt:
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05/21/2015
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Title:
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SEALED ROBOT DRIVE
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Patent #:
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Issue Dt:
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02/18/2020
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14540077
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11/13/2014
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Pub Dt:
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06/18/2015
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Title:
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METHOD AND APPARATUS FOR BRUSHLESS ELECTRICAL MACHINE CONTROL
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Patent #:
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01/30/2018
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14541934
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11/14/2014
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06/04/2015
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Title:
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REDUCED CAPACITY CARRIER AND METHOD OF USE
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11/20/2018
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14568742
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12/12/2014
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Pub Dt:
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07/23/2015
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Title:
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SUBSTRATE TRANSPORT APPARATUS
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Patent #:
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Issue Dt:
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04/12/2016
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14569662
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12/13/2014
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Pub Dt:
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06/18/2015
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Title:
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RECIRCULATION SUBSTRATE CONTAINER PURGING SYSTEMS AND METHODS
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01/05/2016
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14579067
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12/22/2014
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Publication #:
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Pub Dt:
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04/23/2015
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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NONE
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14611697
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02/02/2015
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Pub Dt:
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08/06/2015
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Title:
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STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM
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07/24/2018
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14617052
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02/09/2015
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Publication #:
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08/06/2015
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Title:
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DUAL ARM ROBOT
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Issue Dt:
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07/26/2016
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14682059
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04/08/2015
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10/15/2015
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Title:
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Semiconductor cleaner systems and methods
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11/26/2019
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14698110
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04/28/2015
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01/21/2016
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Title:
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SCALABLE MOTION CONTROL SYSTEM
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05/26/2020
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14740214
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06/15/2015
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10/01/2015
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SUBSTRATE CARRIER HAVING DRIP EDGE CONFIGURATIONS
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11/06/2018
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14822310
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08/10/2015
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12/03/2015
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INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
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05/22/2018
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14822392
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08/10/2015
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02/04/2016
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Title:
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SIDE OPENING UNIFIED POD
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02/13/2018
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14840359
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08/31/2015
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02/11/2016
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Title:
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REDUNDANTABLE ROBOT ASSEMBLY FOR WORKPIECE TRANSFER
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11/27/2018
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14868689
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09/29/2015
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01/21/2016
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Title:
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DUAL SCARA ARM
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08/25/2020
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14928352
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10/30/2015
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05/05/2016
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Title:
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WAFER ALIGNER
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06/19/2018
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14937676
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11/10/2015
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05/12/2016
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Title:
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TOOL AUTO-TEACH METHOD AND APPARATUS
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09/05/2017
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14941888
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11/16/2015
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05/19/2016
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Title:
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COMPACT DIRECT DRIVE SPINDLE
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Issue Dt:
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06/09/2020
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14976952
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12/21/2015
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Pub Dt:
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04/21/2016
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Title:
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REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
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12/26/2017
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Application #:
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14988256
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01/05/2016
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Publication #:
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Pub Dt:
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05/12/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/10/2019
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Application #:
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15012425
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02/01/2016
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Pub Dt:
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08/04/2016
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Title:
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UNEQUAL LINK SCARA ARM
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Patent #:
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09/04/2018
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15031334
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04/22/2016
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Pub Dt:
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09/22/2016
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Title:
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CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE ARTICLES
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