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04/23/2002
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09467622
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12/20/1999
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Title:
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METHOD AND APPARATUS FOR DETECTING PRESENCE OF RESIDUAL POLISHING SLURRY SUBSEQUENT TO POLISHING OF A SEMICONDUCTOR WAFER
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04/23/2002
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09469090
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12/21/1999
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Title:
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01/29/2002
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09469579
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12/22/1999
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09/18/2001
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09472332
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12/23/1999
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Title:
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11/27/2001
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09474666
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12/29/1999
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05/14/2002
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09476511
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01/03/2000
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05/06/2003
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09477310
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01/04/2000
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10/16/2001
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09478725
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01/06/2000
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Title:
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METHOD OF FORMING A CAPACITOR HAVING A TUNGSTEIN BOTTOM ELECTRODE IN A SEMICONDUCTOR WAFER
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03/19/2002
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09480224
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01/10/2000
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Title:
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Multi-Layered Metal Silicide Resistor For Si Ic's
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10/30/2001
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09480387
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01/11/2000
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04/01/2003
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09481992
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01/11/2000
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06/11/2002
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09482390
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01/12/2000
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07/19/2001
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10/15/2002
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09483297
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01/14/2000
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04/23/2002
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09483576
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01/14/2000
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Polishing Fluid Polishing Method Semiconductor Device andSemiconductor Device Fabrication Method
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12/11/2001
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09483785
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01/14/2000
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Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method
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08/20/2002
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09484310
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01/18/2000
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METHOD FOR MAKING AN INTERCONNECT LAYER AND A SEMICONDUCTOR DEVICE INCLUDING THE SAME
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09/10/2002
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09487984
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01/20/2000
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MULTIPLE METAL ETCHANT SYSTEM FOR INTEGRATED CIRCUITS
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10/28/2003
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09488662
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01/20/2000
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PHASE-SHIFTING MASK AND SEMICONDUCTOR DEVICE
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12/12/2000
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09490655
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01/24/2000
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MICROMAGNETIC DEVICE FOR POWER PROCESSING APPLICATIONS AND METHOD OF MANUFACTURE THEREFOR
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06/17/2003
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09490912
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01/25/2000
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04/09/2002
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09491836
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01/26/2000
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Electrochemical mechanical planarization apparatus and method
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03/12/2002
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09494705
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01/31/2000
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Title:
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Apparatus and method for in-situ measurement of polishing pad thickness loss
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02/27/2001
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09495512
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02/01/2000
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INTEGRATED CIRCUIT HAVING LOW VOLTAGE AND HIGH VOLTAGE DEVICES ON A COMMON SEMICONDUCTOR SUBSTRATE
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01/07/2003
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09496971
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02/02/2000
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INTERCONNECT-EMBEDDED METAL-INSULATOR-METAL CAPACITOR
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10/23/2001
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09497982
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02/04/2000
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Selective etching of thin films
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11/20/2007
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09497993
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02/04/2000
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METHOD OF ISOLATION FOR ACOUSTIC RESONATOR DEVICE
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06/11/2002
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09499411
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02/07/2000
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Title:
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HIGH DIELECTRIC CONSTANT GATE OXIDES FOR SILICON-BASED DEVICES
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03/26/2002
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09510015
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02/22/2000
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Title:
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Dark spin rinse/dry
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08/27/2002
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09511343
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02/23/2000
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Title:
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METHOD OF MAKING INTEGRATED CIRCUIT HAVING A MICROMAGNETIC DEVICE
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08/27/2002
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09514832
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02/28/2000
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POLISHING PAD HAVING A WATER-REPELLANT FILM THERON AND A METHOD OF MANUFACTURE THEREFOR
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11/12/2002
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09517150
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03/02/2000
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CAPACITOR HAVING A TANTALUM LOWER ELECTRODE AND METHOD OF FORMING THE SAME
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12/18/2001
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09519193
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03/06/2000
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Title:
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Titanium-tantalum barrier layer film and method for forming the same
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07/08/2003
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09519909
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03/07/2000
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MOS TRANSISTORS WITH IMPROVED GATE DIELECTRICS
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08/26/2003
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09520670
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03/07/2000
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SYSTEM AND METHOD FOR INTRODUCING MULTIPLE COMPONENT-TYPE FACTORS INTO AN INTEGRATED CIRCUIT YIELD PREDICTION
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07/02/2002
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09521312
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03/09/2000
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Title:
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PROCESS FOR FORMING THIN GATE OXIDE WITH ENHANCED RELIABILITY BY NITRIDATION OF UPPER SURFACE OF GATE OXIDE TO FORM BARRIER OF NITROGEN ATOMS IN UPPER SURFACE REGION OF GATE OXIDE, AND RESULTING PRODUCT
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11/20/2001
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09521768
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03/09/2000
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Title:
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Colloidal suspension of abrasive particles containing magnesium
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10/31/2000
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09523210
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03/10/2000
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Title:
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METHOD OF MANUFACTURING SCHOTTKY GATE TRANSISTOR UTILIZING ALIGNMENT TECHNIQUES WITH MULITIPLE PHOTORESIST LAYERS
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03/26/2002
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09523782
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03/13/2000
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Method for fabricating mos device with halo implanted region
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08/27/2002
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09525489
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03/15/2000
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ENCAPSULATED-METAL VERTICAL-INTERDIGITATED CAPACITOR AND DAMASCENE METHOD OF MANUFACTURING SAME
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03/04/2003
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09528071
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03/17/2000
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APPARATUS FOR VERIFICATION OF IC MASK SETS
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07/23/2002
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09532688
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03/22/2000
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APPARATUS AND METHOD FOR GRADIENT CLEANING OF SEMICONDUCTOR WAFERS
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11/06/2001
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09533428
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03/23/2000
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Thin film deposition of mixed metal oxides
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09/09/2003
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09533429
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03/23/2000
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NON-HYDROLYTIC SOL-GEL PROCESS FOR HIGH K DIELECTRIC
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07/10/2001
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09534652
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03/24/2000
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Endpoint detection method and apparatus which utilize an endpoint polishing layer of catalyst material
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04/16/2002
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09540473
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03/31/2000
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Title:
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Apparatus and method for determining process width variations in integrated circuits
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03/19/2002
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09542362
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04/04/2000
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Title:
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Direct drive spindle for use in chemical vapor deposition
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02/12/2002
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09543412
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04/05/2000
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Title:
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Process for treating damaged surfaces of low k carbon doped silicon oxide dielectric material after plasma etching and plasma cleaning steps
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09/16/2003
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09546037
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04/10/2000
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INTERCONNECTIONS TO COPPER IC'S
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10/08/2002
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09547132
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04/11/2000
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Title:
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LOCAL AREA ALLOYING FOR PREVENTING DISHING OF COPPER DURING CHEMICAL-MECHANICAL POLISHING (CMP)
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04/08/2003
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09550381
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04/14/2000
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LINEAR CAPACITOR AND PROCESS FOR MAKING SAME
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12/17/2002
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09552627
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04/19/2000
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DEVICE COMPRISING MICROMAGNETIC COMPONENTS FOR POWER APPLICATIONS AND PROCESS FOR FORMING DEVICE
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07/06/2010
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09553140
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04/20/2000
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DETERMINATION OF FILM THICKNESS DURING CHEMICAL MECHANICAL POLISHING
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03/30/2004
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09558130
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04/25/2000
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INTEGRATED CIRCUIT EARLY LIFE FAILURE DETECTION BY MONITORING CHANGES IN CURRENT SIGNATURES
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11/26/2002
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09559494
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04/27/2000
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Anisotropic wet etching method
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05/21/2002
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09562346
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05/01/2000
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METHOD OF DETERMINING A TRAP DENSITY OF A SEMICONDUCTOR/OXIDE INTERFACE BY A CONTACTLESS CHARGE TECHNIQUE
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02/11/2003
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09567359
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05/09/2000
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CALIBRATION METHOD FOR QUANTITATIVE ELEMENTAL ANALYSIS
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02/11/2003
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09567373
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05/09/2000
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Title:
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METHOD OF TESTING AN UNKNOWN SAMPLE WITH AN ANALYTICAL TOOL
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04/30/2002
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09568265
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05/10/2000
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PROCESS FOR SEMICONDUCTOR DEVICE FABRICATION HAVING COPPER INTERCONNECTS
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01/14/2003
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09574771
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05/19/2000
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Title:
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INTEGRATED CIRCUIT STRUCTURES HAVING LOW K POROUS ALUMINUM OXIDE DIELECTRIC MATERIAL SEPARATING ALUMINUM LINES, AND METHOD OF MAKING SAME
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07/30/2002
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09574804
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05/19/2000
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METHOD OF MAKING IC INTERCONNECTION SYSTEM WITH LATERAL BARRIER LAYER
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01/20/2004
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09575214
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05/18/2000
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DAMASCENE STRUCTURE HAVING A METAL-OXIDE-METAL CAPACITOR ASSOCIATED THEREWITH
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04/29/2003
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09580522
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05/30/2000
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DEVICE AND METHOD FOR PROTECTING ELECTRONIC COMPONENT
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03/04/2003
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09580939
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05/30/2000
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METHOD FOR ENHANCING ANTI-REFLECTIVE COATINGS USED IN PHOTOLITHOGRAPHY OF ELECTRONIC DEVICES
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05/07/2002
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09583434
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05/31/2000
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ENDPOINT DETECTION METHOD AND APPARATUS WHICH UTILIZE A CHELATING AGENT TO DETECT A POLISHING ENDPOINT
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12/31/2002
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09586384
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06/02/2000
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METHOD FOR REDUCING DISHING RELATED ISSUES DURING THE FORMATION OF SHALLOW TRENCH ISOLATION STRUCTURES
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09/17/2002
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09591037
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06/09/2000
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METHOD OF FORMING BIPOLAR TRANSISTORS COMPRISING A NATIVE OXIDE LAYER FORMED ON A SUBSTRATE BY RINSING THE SUBSTRATE IN OZONATED WATER
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02/04/2003
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09591108
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06/09/2000
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SEMICONDUCTOR DEVICE WITH A PAIR OF TRANSISTORS HAVING DUAL WORK FUNCTION GATE ELECTRODES
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04/02/2002
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09594189
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06/14/2000
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Method of improving electromigration in semiconductor device manufacturing processes
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10/09/2001
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09594478
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06/15/2000
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Title:
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Insulated-gate field-effect transistors having different gate capacitances
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05/25/2004
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09597012
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06/20/2000
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Title:
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SEMICONDUCTOR DEVICE FREE OF LLD REGIONS
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Issue Dt:
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04/16/2002
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Application #:
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09603340
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Filing Dt:
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06/26/2000
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Title:
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ADDITIONAL ETCHING TO DECREASE POLISHING TIME FOR SHALLOW-TRENCH ISOLATION IN SEMICONDUCTOR PROCESSING
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Patent #:
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Issue Dt:
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06/18/2002
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Application #:
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09604865
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Filing Dt:
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06/28/2000
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Title:
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LASER FAULT CORRECTION OF SEMICONDUCTOR DEVICES
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Patent #:
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Issue Dt:
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06/11/2002
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Application #:
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09605507
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Filing Dt:
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06/28/2000
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Title:
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Process for fabricating organic semiconductor device involving selective patterning
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09606833
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Filing Dt:
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06/29/2000
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Title:
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Technique for reducing dishing in Cu-based interconnects
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Patent #:
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Issue Dt:
|
10/15/2002
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Application #:
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09607177
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Filing Dt:
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06/29/2000
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Title:
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APPARATUS AND METHOD FOR LINEARLY PLANARIZING A SURFACE OF A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
|
08/20/2002
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Application #:
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09611581
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Filing Dt:
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07/07/2000
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Title:
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TECHNIQUE FOR REDUCING SLIVERS ON OPTICAL COMPONENTS RESULTING FROM FRICTION PROCESSES
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Patent #:
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Issue Dt:
|
01/07/2003
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Application #:
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09611844
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Filing Dt:
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07/07/2000
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Title:
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OXIDE ETCH
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Patent #:
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Issue Dt:
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03/25/2003
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Application #:
|
09611907
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Filing Dt:
|
07/07/2000
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Title:
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SILICON-ON-INSULATOR (SOI) SEMICONDUCTOR STRUCTURE WITH TRENCH INCLUDING A CONDUCTIVE LAYER
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Patent #:
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Issue Dt:
|
05/27/2003
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Application #:
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09617550
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Filing Dt:
|
07/17/2000
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Title:
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LOW VIA RESISTANCE SYSTEM
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Patent #:
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Issue Dt:
|
09/24/2002
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Application #:
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09618211
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Filing Dt:
|
07/10/2000
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Title:
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POLYMERIC DIELECTRIC LAYERS HAVING LOW DIELECTRIC CONSTANTS AND IMPROVED ADHESION TO METAL LINES
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Patent #:
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Issue Dt:
|
01/07/2003
|
Application #:
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09631546
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Filing Dt:
|
08/03/2000
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Title:
|
DEVICE AND METHOD FOR FORMING SEMICONDUCTOR INTERCONNECTIONS IN AN INTEGRATED CIRCUIT SUBSTRATE
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|
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Patent #:
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Issue Dt:
|
02/25/2003
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Application #:
|
09631862
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Filing Dt:
|
08/03/2000
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|
Title:
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SUBSTRATE ISOLATION FOR ANALOG/DIGITAL IC CHIPS
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|
|
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Patent #:
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|
Issue Dt:
|
08/20/2002
|
Application #:
|
09632445
|
Filing Dt:
|
08/04/2000
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|
Title:
|
TWO PHASE CHEMICAL/MECHANICAL POLISHING PROCESS FOR TUNGSTEN LAYERS
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|
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Patent #:
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Issue Dt:
|
08/24/2004
|
Application #:
|
09639440
|
Filing Dt:
|
08/15/2000
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|
Title:
|
STATISTICAL DECISION SYSTEM
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|
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|
Patent #:
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Issue Dt:
|
03/26/2002
|
Application #:
|
09640329
|
Filing Dt:
|
08/16/2000
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|
Title:
|
Hydrogenated silicon carbide as a liner for self-aligning contact vias
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|
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Patent #:
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Issue Dt:
|
01/14/2003
|
Application #:
|
09641086
|
Filing Dt:
|
08/17/2000
|
|
Title:
|
USE OF SELECTIVE OXIDATION TO IMPROVE LDMOS POWER TRANSISTORS
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|
Patent #:
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|
Issue Dt:
|
11/12/2002
|
Application #:
|
09641160
|
Filing Dt:
|
08/17/2000
|
|
Title:
|
PROCESS FOR FABRICATING A SEMICONDUCTOR DEVICE HAVING A METAL OXIDE OR A METAL SILICATE GATE DIELECTRIC LAYER
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|
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|
Patent #:
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|
Issue Dt:
|
05/07/2002
|
Application #:
|
09643784
|
Filing Dt:
|
08/22/2000
|
|
Title:
|
Method of making article comprising vertically nano-interconnected circuit devices and method for making the same
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|
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|
Patent #:
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|
Issue Dt:
|
04/09/2002
|
Application #:
|
09648015
|
Filing Dt:
|
08/25/2000
|
|
Title:
|
Acoustic time of flight and acoustic resonance methods for detecting endpoint in plasma processes
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|
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|
Patent #:
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|
Issue Dt:
|
10/21/2003
|
Application #:
|
09650164
|
Filing Dt:
|
08/29/2000
|
|
Title:
|
RESIDUAL OXYGEN REDUCTION SYSTEM
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|
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|
Patent #:
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|
Issue Dt:
|
10/21/2008
|
Application #:
|
09650604
|
Filing Dt:
|
08/30/2000
|
|
Title:
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FIELD PLATED RESISTOR WITH ENHANCED ROUTING AREA THEREOVER
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|
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|
Patent #:
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|
Issue Dt:
|
12/30/2003
|
Application #:
|
09651447
|
Filing Dt:
|
08/30/2000
|
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Title:
|
METHOD FOR MAKING AN INTEGRATED CIRCUIT DEVICE INCLUDING A GRADED, GROWN, HIGH QUALITY GATE OXIDE LAYER AND A NITRIDE LAYER
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Patent #:
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|
Issue Dt:
|
04/29/2003
|
Application #:
|
09651661
|
Filing Dt:
|
08/29/2000
|
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Title:
|
USE OF SMALL OPENINGS IN LARGE TOPOGRAPHY FEATURES TO IMPROVE DIELECTRIC THICKNESS CONTROL AND A METHOD OF MANUFACTURE THEREOF
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|
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|
Patent #:
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|
Issue Dt:
|
08/21/2007
|
Application #:
|
09651696
|
Filing Dt:
|
08/30/2000
|
|
Title:
|
ON-CHIP VACUUM TUBE DEVICE AND PROCESS FOR MAKING DEVICE
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|
|
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|
Patent #:
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|
Issue Dt:
|
04/16/2002
|
Application #:
|
09652479
|
Filing Dt:
|
08/31/2000
|
|
Title:
|
Methods of fabricating a metal-oxide-metal capacitor and associated apparatuses
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|
|
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|
Patent #:
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|
Issue Dt:
|
04/29/2003
|
Application #:
|
09652571
|
Filing Dt:
|
08/31/2000
|
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Title:
|
INTEGRATED CIRCUIT INCLUDING ESD CIRCUITS FOR A MULTI-CHIP MODULE AND A METHOD THEREFOR
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|
|
Patent #:
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|
Issue Dt:
|
04/15/2003
|
Application #:
|
09653297
|
Filing Dt:
|
08/31/2000
|
|
Title:
|
LOW K DIELECTRIC INSULATOR AND METHOD OF FORMING SEMICONDUCTOR CIRCUIT STRUCTURES
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|
|
|
|
Patent #:
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|
Issue Dt:
|
05/27/2003
|
Application #:
|
09653364
|
Filing Dt:
|
08/31/2000
|
|
Title:
|
MONITORING SYSTEM FOR DETERMINING PROGRESS IN A FABRICATION ACTIVITY
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/07/2003
|
Application #:
|
09653531
|
Filing Dt:
|
08/31/2000
|
|
Title:
|
TRANSISTOR DEVICE HAVING AN ISOLATION STRUCTURE LOCATED UNDER A SOURCE REGION, DRAIN REGION AND CHANNEL REGION AND A METHOD OF MANUFACTURE THEREOF
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|
|
|
|
Patent #:
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|
Issue Dt:
|
02/10/2004
|
Application #:
|
09653616
|
Filing Dt:
|
08/31/2000
|
|
Title:
|
FIELD PLATED SCHOTTKY DIODE
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|
