Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 013699/0001 | |
| Pages: | 20 |
| | Recorded: | 05/30/2003 | | |
| Conveyance: | SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
10
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Patent #:
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Issue Dt:
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09/17/1996
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Application #:
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08486731
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Filing Dt:
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06/07/1995
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Title:
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SCREENING MACHINE
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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08909461
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Filing Dt:
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08/11/1997
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Title:
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MINI-BATCH PROCESS CHAMBER
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Patent #:
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Issue Dt:
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01/02/2001
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Application #:
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09228835
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Filing Dt:
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01/12/1999
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Title:
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APPARATUS AND METHOD FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD) IN A SINGLE WAFER REACTOR
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Patent #:
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Issue Dt:
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11/27/2001
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Application #:
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09228840
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Filing Dt:
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01/12/1999
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Publication #:
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Pub Dt:
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10/18/2001
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Title:
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VERTICAL PLASMA ENHANCED PROCESS APPARATUS & METHOD
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09229975
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Filing Dt:
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01/14/1999
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Publication #:
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Pub Dt:
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12/06/2001
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Title:
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METHOD AND APPARATUS FOR IMPROVED CHEMICAL VAPOR DEPOSITION PROCESSES USING TUNABLE TEMPERATURE CONTROLLED GAS INJECTORS
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Patent #:
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Issue Dt:
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05/22/2001
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Application #:
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09396586
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Filing Dt:
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09/15/1999
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Title:
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HIGH RATE SILICON DIOXIDE DEPOSITION AT LOW PRESSURES
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09396588
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Filing Dt:
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09/15/1999
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Title:
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HIGH RATE SILICON DEPOSITION METHOD AT LOW PRESSURES
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Patent #:
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Issue Dt:
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01/14/2003
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Application #:
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09396590
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Filing Dt:
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09/15/1999
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Publication #:
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Pub Dt:
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11/15/2001
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Title:
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HIGH RATE SILICON NITRIDE DEPOSITION METHOD AT LOW PRESSURES
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10216079
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Filing Dt:
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08/09/2002
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Publication #:
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Pub Dt:
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03/13/2003
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Title:
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High rate deposition at low pressures in a small batch reactor
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Patent #:
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Issue Dt:
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07/01/2008
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Application #:
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10342151
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Filing Dt:
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01/13/2003
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Publication #:
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Pub Dt:
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07/17/2003
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Title:
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METHOD AND APPARATUS FOR LAYER BY LAYER DEPOSITION OF THIN FILMS
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Assignee
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| 9255 TOWNE CENTER DRIVE, SUITE 925 |
| SAN DIEGO, CALIFORNIA 92122 |
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Correspondence name and address
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COOLEY GODWARD LLP
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DIANA SANCHEZ BENTZ
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3000 EL CAMINO REAL
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5 PALO ALTO SQUARE
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PALO ALTO, CA 94306
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