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Patent Assignment Details
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Reel/Frame:019536/0001   Pages: 6
Recorded: 07/10/2007
Attorney Dkt #:11460- 132 AND 129
Conveyance: MERGER (SEE DOCUMENT FOR DETAILS).
Total properties: 2
1
Patent #:
Issue Dt:
07/08/2008
Application #:
11080800
Filing Dt:
03/11/2005
Publication #:
Pub Dt:
09/15/2005
Title:
FORMATION OF ULTRA-SHALLOW JUNCTIONS BY GAS-CLUSTER ION IRRADIATION
2
Patent #:
Issue Dt:
08/12/2008
Application #:
11150698
Filing Dt:
06/11/2005
Publication #:
Pub Dt:
12/15/2005
Title:
FORMATION OF DOPED REGIONS AND/OR ULTRA-SHALLOW JUNCTIONS IN SEMICONDUCTOR MATERIALS BY GAS-CLUSTER ION IRRADIATION
Assignor
1
Exec Dt:
12/18/2006
Assignee
1
37 MANNING ROAD
BILLERICA, MASSACHUSETTS 01821
Correspondence name and address
DAVID W. GOMES
BURNS & LEVINSON LLP
125 SUMMER STREET
BOSTON, MA 02110

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