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Reel/Frame:041759/0007   Pages: 9
Recorded: 03/28/2017
Attorney Dkt #:30623-0064001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/31/2020
Application #:
15410904
Filing Dt:
01/20/2017
Publication #:
Pub Dt:
05/11/2017
Title:
IMAGING OPTICAL UNIT FOR A METROLOGY SYSTEM FOR EXAMINING A LITHOGRAPHY MASK
Assignors
1
Exec Dt:
02/23/2017
2
Exec Dt:
03/23/2017
3
Exec Dt:
02/14/2017
4
Exec Dt:
02/13/2017
5
Exec Dt:
03/23/2017
6
Exec Dt:
02/16/2017
Assignee
1
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondence name and address
REX I. HUANG
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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