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Total properties:
16
|
|
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|
Patent #:
|
|
Issue Dt:
|
05/01/2007
|
Application #:
|
10985727
|
Filing Dt:
|
11/10/2004
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|
Publication #:
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Pub Dt:
|
06/09/2005
| | | | |
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Title:
|
METHODS AND SYSTEMS FOR HANDLING A WORKPIECE IN VACUUM-BASED MATERIAL HANDLING SYSTEM
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|
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|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10985730
|
Filing Dt:
|
11/10/2004
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|
Publication #:
|
|
Pub Dt:
|
10/13/2005
| | | | |
|
Title:
|
Methods and systems for driving robotic components of a semiconductor handling system
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/02/2008
|
Application #:
|
10985834
|
Filing Dt:
|
11/10/2004
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|
Publication #:
|
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Pub Dt:
|
05/26/2005
| | | | |
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Title:
|
MID-ENTRY LOAD LOCK FOR SEMICONDUCTOR HANDLING SYSTEM
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|
|
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Patent #:
|
|
Issue Dt:
|
09/09/2008
|
Application #:
|
10985839
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Filing Dt:
|
11/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
06/02/2005
| | | | |
|
Title:
|
STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10985844
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Filing Dt:
|
11/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
05/26/2005
| | | | |
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Title:
|
Sensor methods and systems for semiconductor handling
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10985846
|
Filing Dt:
|
11/10/2004
|
|
Publication #:
|
|
Pub Dt:
|
05/26/2005
| | | | |
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Title:
|
Software controller for handling system
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/20/2009
|
Application #:
|
11302653
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Filing Dt:
|
12/13/2005
|
|
Publication #:
|
|
Pub Dt:
|
06/29/2006
| | | | |
|
Title:
|
INTERLABIAL PAD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/14/2013
|
Application #:
|
11382491
|
Filing Dt:
|
05/10/2006
|
|
Publication #:
|
|
Pub Dt:
|
11/23/2006
| | | | |
|
Title:
|
LINEAR SEMICONDUCTOR PROCESSING FACILITIES
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11386446
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Filing Dt:
|
03/21/2006
|
|
Publication #:
|
|
Pub Dt:
|
06/14/2007
| | | | |
|
Title:
|
Web-based robotics simulation
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11681809
|
Filing Dt:
|
03/05/2007
|
|
Publication #:
|
|
Pub Dt:
|
11/15/2007
| | | | |
|
Title:
|
ROBOTIC COMPONENTS FOR SEMICONDUCTOR MANUFACTURING
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/26/2013
|
Application #:
|
11681822
|
Filing Dt:
|
03/05/2007
|
|
Publication #:
|
|
Pub Dt:
|
01/17/2008
| | | | |
|
Title:
|
BYPASS THERMAL ADJUSTER FOR VACUUM SEMICONDUCTOR PROCESSING
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11681978
|
Filing Dt:
|
03/05/2007
|
|
Publication #:
|
|
Pub Dt:
|
12/13/2007
| | | | |
|
Title:
|
SEMICONDUCTOR MANUFACTURING PROCESS MODULES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/07/2010
|
Application #:
|
11682306
|
Filing Dt:
|
03/05/2007
|
|
Publication #:
|
|
Pub Dt:
|
12/13/2007
| | | | |
|
Title:
|
WAFER CENTER FINDING
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11743105
|
Filing Dt:
|
05/01/2007
|
|
Publication #:
|
|
Pub Dt:
|
12/06/2007
| | | | |
|
Title:
|
METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/15/2012
|
Application #:
|
12195095
|
Filing Dt:
|
08/20/2008
|
|
Publication #:
|
|
Pub Dt:
|
04/16/2009
| | | | |
|
Title:
|
WAFER PRESENCE DETECTOR WITH END EFFECTORS HAVING OPTICAL COUPLERS AND FIBERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/04/2011
|
Application #:
|
12239717
|
Filing Dt:
|
09/26/2008
|
|
Publication #:
|
|
Pub Dt:
|
04/02/2009
| | | | |
|
Title:
|
SEMICONDUCTOR MANUFACTURING SYSTEMS
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|
