Patent Assignment Details
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| Reel/Frame: | 008976/0015 | |
| Pages: | 3 |
| | Recorded: | 02/13/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/30/2000
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Application #:
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09023290
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Filing Dt:
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02/13/1998
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Title:
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SUPERCRITICAL PHASE WAFER DRYING/CLEANING SYSTEM
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Assignee
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| 472 AMHERST STREET |
| NASHUA, NEW HAMPSHIRE 03063 |
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Correspondence name and address
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MAINE & ASMUS
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VERNON C. MAINE
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8 VALENCIA DRIVE
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NASHUA, NH 03062-1406
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