Total properties:
25
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Patent #:
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Issue Dt:
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05/08/2012
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Application #:
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12638092
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Filing Dt:
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12/15/2009
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Publication #:
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Pub Dt:
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06/16/2011
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Title:
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BEAM TRANSPORT SYSTEM FOR EXTREME ULTRAVIOLET LIGHT SOURCE
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Patent #:
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Issue Dt:
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02/05/2013
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Application #:
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12753938
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Filing Dt:
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04/05/2010
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Publication #:
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Pub Dt:
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10/06/2011
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Title:
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EUV LIGHT SOURCE GLINT REDUCTION SYSTEM
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Patent #:
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Issue Dt:
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09/16/2014
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Application #:
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12755772
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Filing Dt:
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04/07/2010
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Publication #:
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Pub Dt:
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10/13/2011
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Title:
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METHOD AND APPARATUS FOR CONTROLLING LIGHT BANDWIDTH
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Patent #:
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Issue Dt:
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02/11/2014
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Application #:
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12841728
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Filing Dt:
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07/22/2010
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Publication #:
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Pub Dt:
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01/26/2012
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Title:
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ALIGNMENT OF LIGHT SOURCE FOCUS
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Patent #:
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Issue Dt:
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08/27/2013
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Application #:
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12860288
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Filing Dt:
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08/20/2010
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Publication #:
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Pub Dt:
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08/25/2011
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Title:
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ACTIVE SPECTRAL CONTROL OF OPTICAL SOURCE
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Patent #:
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Issue Dt:
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06/23/2015
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Application #:
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12900762
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Filing Dt:
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10/08/2010
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Publication #:
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Pub Dt:
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10/20/2011
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Title:
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SYSTEMS AND METHODS FOR COOLING AN OPTIC
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Patent #:
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Issue Dt:
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08/19/2014
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Application #:
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12980939
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Filing Dt:
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12/29/2010
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Publication #:
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Pub Dt:
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07/05/2012
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Title:
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MULTI-PASS OPTICAL APPARATUS
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Patent #:
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Issue Dt:
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12/10/2013
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Application #:
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13050198
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Filing Dt:
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03/17/2011
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Publication #:
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Pub Dt:
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09/20/2012
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Title:
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DRIVE LASER DELIVERY SYSTEMS FOR EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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09/11/2012
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Application #:
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13075500
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Filing Dt:
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03/30/2011
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Publication #:
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Pub Dt:
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10/13/2011
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Title:
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SYSTEMS AND METHODS FOR TARGET MATERIAL DELIVERY PROTECTION IN A LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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02/18/2014
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Application #:
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13077236
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Filing Dt:
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03/31/2011
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Publication #:
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Pub Dt:
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12/29/2011
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Title:
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MASTER OSCILLATOR-POWER AMPLIFIER DRIVE LASER WITH PRE-PULSE FOR EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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06/11/2013
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Application #:
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13077757
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Filing Dt:
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03/31/2011
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Publication #:
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Pub Dt:
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04/19/2012
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Title:
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OSCILLATOR-AMPLIFIER DRIVE LASER WITH SEED PROTECTION FOR AN EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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02/05/2013
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Application #:
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13077958
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Filing Dt:
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03/31/2011
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Publication #:
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Pub Dt:
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10/04/2012
| | | | |
Title:
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SYSTEM AND METHOD FOR COMPENSATING FOR THERMAL EFFECTS IN AN EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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01/21/2014
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Application #:
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13088166
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Filing Dt:
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04/15/2011
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Publication #:
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Pub Dt:
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09/06/2012
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Title:
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SYSTEMS AND METHODS FOR OPTICS CLEANING IN AN EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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07/01/2014
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Application #:
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13098259
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Filing Dt:
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04/29/2011
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Publication #:
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Pub Dt:
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11/01/2012
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Title:
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SYSTEM AND METHOD FOR CONTROLLING GAS CONCENTRATION IN A TWO-CHAMBER GAS DISCHARGE LASER SYSTEM
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Patent #:
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Issue Dt:
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08/20/2013
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Application #:
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13107804
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Filing Dt:
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05/13/2011
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Publication #:
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Pub Dt:
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11/15/2012
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Title:
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DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING
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Patent #:
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Issue Dt:
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05/12/2015
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Application #:
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13112784
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Filing Dt:
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05/20/2011
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Publication #:
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Pub Dt:
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11/22/2012
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Title:
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FILTER FOR MATERIAL SUPPLY APPARATUS OF AN EXTREME ULTRAVIOLET LIGHT SOURCE
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Patent #:
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Issue Dt:
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12/06/2016
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Application #:
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13156188
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Filing Dt:
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06/08/2011
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Publication #:
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Pub Dt:
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12/13/2012
| | | | |
Title:
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SYSTEMS AND METHODS FOR BUFFER GAS FLOW STABILIZATION IN A LASER PRODUCED PLASMA LIGHT SOURCE
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Patent #:
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Issue Dt:
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02/18/2014
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Application #:
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13157233
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Filing Dt:
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06/09/2011
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Publication #:
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Pub Dt:
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04/05/2012
| | | | |
Title:
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EUV LIGHT SOURCE WITH SUBSYSTEM(S) FOR MAINTAINING LPP DRIVE LASER OUTPUT DURING EUV NON-OUTPUT PERIODS
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Patent #:
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Issue Dt:
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10/28/2014
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Application #:
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13174484
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Filing Dt:
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06/30/2011
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Publication #:
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Pub Dt:
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01/03/2013
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Title:
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System and Method for High Accuracy Gas Refill in a Two Chamber Gas Discharge Laser System
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Patent #:
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Issue Dt:
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04/02/2013
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Application #:
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13174640
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Filing Dt:
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06/30/2011
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Publication #:
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Pub Dt:
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01/03/2013
| | | | |
Title:
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SYSTEM AND METHOD FOR AUTOMATIC GAS OPTIMIZATION IN A TWO-CHAMBER GAS DISCHARGE LASER SYSTEM
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Patent #:
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Issue Dt:
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03/31/2015
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Application #:
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13249504
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Filing Dt:
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09/30/2011
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Publication #:
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Pub Dt:
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02/21/2013
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Title:
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Energy Sensors for Light Beam Alignment
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Patent #:
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Issue Dt:
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03/25/2014
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Application #:
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13251181
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Filing Dt:
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09/30/2011
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Publication #:
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Pub Dt:
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04/04/2013
| | | | |
Title:
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System and Method for High Accuracy Gas Inject in a Two Chamber Gas Discharge Laser System
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Patent #:
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Issue Dt:
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03/08/2016
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Application #:
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13328628
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Filing Dt:
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12/16/2011
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Publication #:
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Pub Dt:
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06/20/2013
| | | | |
Title:
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DROPLET GENERATOR STEERING SYSTEM
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|
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Patent #:
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|
Issue Dt:
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08/26/2014
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Application #:
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13330884
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Filing Dt:
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12/20/2011
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Publication #:
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Pub Dt:
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06/20/2013
| | | | |
Title:
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FILTER FOR MATERIAL SUPPLY APPARATUS
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Patent #:
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|
Issue Dt:
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10/07/2014
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Application #:
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13561012
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Filing Dt:
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07/28/2012
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Publication #:
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Pub Dt:
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01/30/2014
| | | | |
Title:
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Intracavity Loss Element for Power Amplifier
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