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Reel/Frame:048280/0022   Pages: 5
Recorded: 02/08/2019
Attorney Dkt #:184013
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
11/24/2020
Application #:
16300291
Filing Dt:
02/08/2019
Publication #:
Pub Dt:
06/06/2019
Title:
MARK DETECTION APPARATUS, MARK DETECTION METHOD, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD
Assignors
1
Exec Dt:
12/21/2018
2
Exec Dt:
12/21/2018
Assignee
1
15-3, KONAN 2-CHOME
MINATO-KU
TOKYO, JAPAN 108-6290
Correspondence name and address
MARIO A. COSTANTINO
OLIFF PLC
P.O. BOX 320850
ALEXANDRIA, VA 22320-4850

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