Patent Assignment Details
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Reel/Frame: | 048280/0022 | |
| Pages: | 5 |
| | Recorded: | 02/08/2019 | | |
Attorney Dkt #: | 184013 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/24/2020
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Application #:
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16300291
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Filing Dt:
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02/08/2019
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Publication #:
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Pub Dt:
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06/06/2019
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Title:
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MARK DETECTION APPARATUS, MARK DETECTION METHOD, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD
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Assignee
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15-3, KONAN 2-CHOME |
MINATO-KU |
TOKYO, JAPAN 108-6290 |
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Correspondence name and address
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MARIO A. COSTANTINO
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OLIFF PLC
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P.O. BOX 320850
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ALEXANDRIA, VA 22320-4850
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