Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 022431/0028 | |
| Pages: | 10 |
| | Recorded: | 03/20/2009 | | |
| Attorney Dkt #: | 081468-0375680 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12289621
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Filing Dt:
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10/30/2008
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Publication #:
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Pub Dt:
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07/09/2009
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Title:
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CLEANING APPARATUS AND IMMERSION LITHOGRAPHIC APPARATUS WITH A PLASMA RADICAL SOURCE TO CLEAN A SUBSTRATE OR A COMPONENT OF THE IMMERSION LITHOGRAPHIC APPARATUS
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Assignee
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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Correspondence name and address
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PILLSBURY WINTHROP SHAW PITTMAN LLP
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1650 TYSONS BOULEVARD
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P.O. BOX 10500
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MCLEAN, VA 22102
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