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Patent #:
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Issue Dt:
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07/11/1995
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Application #:
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07855767
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Filing Dt:
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03/18/1992
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Title:
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SEMICONDUCTOR PROCESSOR WAFER HOLDER
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Patent #:
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Issue Dt:
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07/06/1993
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Application #:
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07874333
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Filing Dt:
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04/24/1992
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Title:
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PNEUMATIC BELLOWS PUMP WITH SUPPORTED BELLOWS TUBE
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Patent #:
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Issue Dt:
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04/12/1994
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Application #:
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07901613
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Filing Dt:
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06/15/1992
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Title:
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DOOR ASSEMBLY FOR SEMICONDUCTOR PROCESSOR
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Patent #:
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Issue Dt:
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07/06/1993
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Application #:
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07901614
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Filing Dt:
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06/15/1992
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Title:
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CENTRIFUGAL WAFER CARRIER CLEANING APPARATUS
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Patent #:
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Issue Dt:
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09/12/1995
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Application #:
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08086771
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Filing Dt:
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06/30/1993
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Title:
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SEMICONDUCTOR PROCESSOR OPENING AND CLOSURE CONSTRUCTION
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Patent #:
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Issue Dt:
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02/06/1996
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Application #:
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08111131
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Filing Dt:
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08/23/1993
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Title:
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SEMICONDUCTOR PROCESSING WITH NON-JETTING FLUID STREAM DISCHARGE ARRAY
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Patent #:
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Issue Dt:
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04/25/1995
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Application #:
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08129700
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Filing Dt:
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09/30/1993
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Title:
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SEMICONDUCTOR PROCESSOR LIQUID SPRAY SYSTEM WITH ADDITIVE BLENDING
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Patent #:
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Issue Dt:
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12/05/1995
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Application #:
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08178580
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Filing Dt:
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01/07/1994
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Title:
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ACOUSTIC LIQUID LEVEL MEASURING APPARATUS
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Patent #:
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Issue Dt:
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01/10/1995
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Application #:
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08193785
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Filing Dt:
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02/07/1994
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Title:
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POINT OPTICAL BEAM ELECTRONIC ROTOMETER
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Patent #:
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Issue Dt:
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08/13/1996
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Application #:
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08236424
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Filing Dt:
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04/28/1994
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Title:
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SEMICONDUCTOR WAFER PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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01/07/1997
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Application #:
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08322754
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Filing Dt:
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10/13/1994
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Title:
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WAFER TRANSFER APPARATUS
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Patent #:
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Issue Dt:
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08/26/1997
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Application #:
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08415927
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Filing Dt:
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03/31/1995
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Title:
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SEMICONDUCTOR PROCESSING SYSTEM WITH WAFER CONTAINER DOCKING AND LOADING STATION
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Patent #:
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Issue Dt:
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06/09/1998
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Application #:
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08516175
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Filing Dt:
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08/17/1995
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Title:
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SEMICONDUCTOR PROCESSOR WITH WAFER FACE PROTECTION
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Patent #:
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Issue Dt:
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09/21/1999
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Application #:
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08607627
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Filing Dt:
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02/26/1996
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Title:
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SEMICONDUCTOR PROCESSING USING VAPOR MIXTURES
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Patent #:
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Issue Dt:
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11/19/1996
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Application #:
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08614826
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Filing Dt:
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03/07/1996
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Title:
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WAFER TRANSFER APPARATUS
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Patent #:
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Issue Dt:
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07/28/1998
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Application #:
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08622349
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Filing Dt:
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03/26/1996
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Title:
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CARRIERLESS CENTRIFUGAL SEMICONDUCTOR PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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11/09/1999
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Application #:
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08680057
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Filing Dt:
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07/15/1996
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Title:
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ELECTRODE SEMICONDUCTOR WORKPIECE HOLDER
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Patent #:
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Issue Dt:
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08/08/2006
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Application #:
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08680067
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Filing Dt:
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07/15/1996
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Title:
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PLATING SYSTEM FOR SEMICONDUCTOR MATERIALS
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Patent #:
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Issue Dt:
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03/20/2001
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Application #:
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08680068
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Filing Dt:
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07/15/1996
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Title:
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MODULAR SEMICONDUCTOR WORKPIECE PROCESSING TOOL
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Patent #:
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Issue Dt:
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03/24/1998
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Application #:
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08680462
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Filing Dt:
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07/15/1996
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Title:
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PROCESSING HEAD FOR SEMICONDUCTOR PROCESSING MACHINES
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Patent #:
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Issue Dt:
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09/09/1997
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Application #:
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08680463
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Filing Dt:
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07/15/1996
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Title:
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AUTOMATED SEMICONDUCTOR PROCESSING SYSTEMS
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Patent #:
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Issue Dt:
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03/16/1999
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Application #:
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08788043
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Filing Dt:
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01/23/1997
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Title:
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COMPOSITION AND METHOD FOR PASSIVATION OF A METALLIZATION LAYER OF A SEMICONDUCTOR CIRCUIT AFTER METALLIZATION ETCHING
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Patent #:
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Issue Dt:
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12/08/1998
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Application #:
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08814718
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Filing Dt:
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03/07/1997
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Title:
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SEMICONDUCTOR FURNACE PROCESSING VESSEL BASE
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Patent #:
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Issue Dt:
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09/07/1999
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Application #:
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08814720
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Filing Dt:
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03/07/1997
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Title:
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SEMICONDUCTOR PROCESSING FURNACE
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Patent #:
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Issue Dt:
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11/30/1999
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Application #:
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08814721
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Filing Dt:
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03/07/1997
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Title:
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SEMICONDUCTOR PROCESSING FURNACE HEATING CONTROL SYSTEM
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Patent #:
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Issue Dt:
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06/01/1999
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Application #:
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08814722
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Filing Dt:
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03/07/1997
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Title:
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SEMICONDUCTOR PROCESSING FURNACE OUTFLOW COOLING SYSTEM
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Patent #:
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Issue Dt:
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05/18/1999
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Application #:
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08814723
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Filing Dt:
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03/07/1997
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Title:
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SEMICONDUCTOR PROCESSING FURNACE HEATING SUBASSEMBLY
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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08853649
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Filing Dt:
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05/09/1997
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Title:
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METHODS FOR CLEANING SEMICONDUCTOR SURFACES
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Patent #:
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Issue Dt:
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08/22/2000
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Application #:
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08897913
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Filing Dt:
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07/21/1997
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Title:
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GAS INTAKE ASSEMBLY FOR A WAFER PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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08/08/2000
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Application #:
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08897914
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Filing Dt:
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07/21/1997
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Title:
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MOTOR DRIVE ASSEMBLY FOR A SEMICONDUCTOR WAFER PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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12/21/1999
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Application #:
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08933450
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Filing Dt:
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09/18/1997
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Title:
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CATHODE CURRENT CONTROL SYSTEM FOR A WAFER ELECTROPLATING APPARATUS
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Patent #:
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Issue Dt:
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07/18/2000
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Application #:
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08940517
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Filing Dt:
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09/30/1997
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Title:
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METHODS FOR CONTROLLING SEMICONDUCTOR WORKPIECE SURFACE EXPOSURE TO PROCESSING LIQUIDS
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Patent #:
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Issue Dt:
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01/18/2000
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Application #:
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08940523
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Filing Dt:
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09/30/1997
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Title:
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SEMICONDUCTOR PROCESSING WORKPIECE POSITION SENSING
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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08940669
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Filing Dt:
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09/30/1997
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Title:
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SEMICONDUCTOR PLATING SYSTEM WORKPIECE SUPPORT HAVING WORKPIECE-ENGAGING ELECTRODE WITH SUBMERGED CONDUCTIVE CURRENT TRANSFER AREAS
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Patent #:
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Issue Dt:
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07/29/2003
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Application #:
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08940670
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Filing Dt:
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09/30/1997
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Title:
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IN-SITU CLEANING PROCESSES FOR SEMICONDUCTOR ELECTROPLATING ELECTRODES
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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08940685
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Filing Dt:
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09/30/1997
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Title:
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METHODS FOR PLATING SEMICONDUCTOR WORKPIECES USING A WORKPIECE-ENGAGING ELECTRODE ASSEMBLY WITH SEALING BOOT
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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08940686
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Filing Dt:
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09/30/1997
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Title:
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SEMICONDUCTOR PLATING SYSTEM WORKPIECE SUPPORT HAVING WORKPIECE-ENGAGING ELECTRODE WITH PRE-CONDITIONED CONTACT FACE
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Patent #:
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Issue Dt:
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08/08/2000
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Application #:
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08940930
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Filing Dt:
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09/30/1997
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Title:
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SEMICONDUCTOR PLATING BOWL AND METHOD USING ANODE SHIELD
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Patent #:
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Issue Dt:
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12/21/1999
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Application #:
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08941896
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Filing Dt:
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09/30/1997
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Title:
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SEMICONDUCTOR PROCESSING WORKPIECE SUPPORT WITH SENSORY SUBSYSTEM FOR DETECTION OF WAFERS OR OTHER SEMICONDUCTOR WORKPIECES
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Patent #:
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Issue Dt:
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10/26/1999
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Application #:
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08978855
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Filing Dt:
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11/26/1997
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Title:
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METHODS FOR CENTRIFUGALLY CLEANING WAFER CARRIERS
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Patent #:
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Issue Dt:
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11/16/1999
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Application #:
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08988333
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Filing Dt:
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09/30/1997
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Title:
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SEMICONDUCTOR PLATING SYSTEM WORKPIECE SUPPORT HAVING- ENGAGING ELECTRODES WITH DISTAL CONTACT PART AND DIELECTRIC COVERNG
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Patent #:
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Issue Dt:
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01/06/2004
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Application #:
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08990107
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Filing Dt:
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12/15/1997
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Title:
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SEMICONDUCTOR PROCESSING APPARATUS HAVING LINEAR CONVEYER SYSTEM
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Patent #:
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Issue Dt:
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07/18/2000
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Application #:
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08991062
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Filing Dt:
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12/15/1997
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Title:
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SEMICONDUCTOR PROCESSING APPARATUS HAVING LIFT AND TILT MECHANISM
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Patent #:
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Issue Dt:
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09/10/2002
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Application #:
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08994737
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Filing Dt:
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12/19/1997
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Title:
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SEMICONDUCTOR WAFER PROCESSING APPARATUS HAVING IMPROVED WAFER INPUT/ OUTPUT HANDLING SYSTEM
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Patent #:
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Issue Dt:
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07/17/2007
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Application #:
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09018783
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Filing Dt:
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02/04/1998
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Publication #:
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Pub Dt:
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02/21/2002
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Title:
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METHOD FOR FILLING RECESSED MICRO-STRUCTURES WITH METALLIZATION IN THE PRODUCTION OF A MICROELECTRONIC DEVICE
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09041649
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Filing Dt:
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03/13/1998
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Title:
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MICRO-ENVIRONMENT CHAMBER AND SYSTEM FOR RINSING AND DRYING A SEMICONDUCTOR WORKPIECE
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Patent #:
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Issue Dt:
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02/26/2002
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Application #:
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09041901
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Filing Dt:
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03/13/1998
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Title:
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MICRO-ENVIRONMENT REACTOR FOR PROCESSING A WORKPIECE
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Patent #:
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Issue Dt:
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03/06/2001
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Application #:
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09045245
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Filing Dt:
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03/20/1998
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Title:
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APPARATUS AND METHOD FOR ELECTROLYTICALLY DEPOSITING AMETAL ON A MICROELECTRONIC WORKPIECE
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Patent #:
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Issue Dt:
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11/16/1999
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Application #:
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09056287
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Filing Dt:
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04/07/1998
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Title:
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METHOD FOR DEVELOPING AN ENHANCED OXIDE COATING ON A COMPONENT FORMED FROM STAINLESS STEEL OR NICKEL ALLOY STEEL
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09076565
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Filing Dt:
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05/12/1998
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Title:
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PROCESS AND MANUFACTURING TOOL ARCHITECTURE FOR USE IN THE MANUFACTURING OF ONE OR MORE PROTECTED METALLIZATION STRUCTURES ON A WORKPIECE
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Patent #:
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Issue Dt:
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11/07/2000
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Application #:
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09076695
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Filing Dt:
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05/12/1998
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Title:
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PROCESS AND MANUFACTURING TOOL ARCHITECTURE FOR USE IN THE MANUFACTURE OF ONE OR MORE METALLIZATION LEVELS ON AN INTEGRATED CIRCUIT
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Patent #:
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Issue Dt:
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02/29/2000
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Application #:
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09094354
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Filing Dt:
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06/09/1998
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Title:
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THERMAL PROCESSOR
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Patent #:
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Issue Dt:
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11/09/1999
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Application #:
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09099309
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Filing Dt:
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06/18/1998
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Title:
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ALKALINE WATER-BASED SOLUTION FOR CLEANING METALLIZED MICROELECTRONIC
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Patent #:
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Issue Dt:
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10/03/2000
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Application #:
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09107878
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Filing Dt:
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06/30/1998
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Title:
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OFFSET ROTOR FLAT MEDIA PROCESSOR
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Issue Dt:
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05/16/2000
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Application #:
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09108162
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Filing Dt:
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06/30/1998
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Title:
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CROSS FLOW CENTRIFUGAL PROCESSOR
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Issue Dt:
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05/08/2001
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Application #:
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09112300
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Filing Dt:
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07/09/1998
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Title:
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REACTOR VESSEL HAVING IMPROVED CUP ANODE AND CONDUCTOR ASSEMBLY
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Patent #:
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Issue Dt:
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12/24/2002
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Application #:
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09113418
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Filing Dt:
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07/10/1998
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Title:
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ELECTROPLATING APPARATUS WITH SEGMENTED ANODE ARRAY
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Patent #:
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Issue Dt:
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07/24/2001
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Application #:
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09113435
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Filing Dt:
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07/10/1998
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Title:
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REACTOR FOR PROCESSING A MICROELECTRONIC WORKPIECE
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Patent #:
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08/13/2002
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Application #:
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09113440
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Filing Dt:
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07/10/1998
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Publication #:
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Pub Dt:
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12/06/2001
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Title:
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CLEANING APPARATUS
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Patent #:
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06/27/2000
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Application #:
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09113723
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Filing Dt:
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07/10/1998
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Title:
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APPARATUS FOR ELECTROCHEMICALLY PROCESSING A WORKPICECE INCLUDING AN ELECTRICAL CONTACT ASSEMBLY HAVING A SEAL MEMBER
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Issue Dt:
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12/18/2001
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Application #:
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09160522
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Filing Dt:
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09/24/1998
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Title:
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PROCESS FOR ETCHING THIN-FILM LAYERS OF A WORKPIECE USED TO FORM MICROELECTRIC CIRCUITS OR COMPONENTS
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Patent #:
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Issue Dt:
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02/20/2001
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09195327
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Filing Dt:
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11/18/1998
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Title:
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THERMAL PROCESSOR AND COMPONENTS THEREOF
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Patent #:
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12/17/2002
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Application #:
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09231194
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Filing Dt:
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01/14/1999
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Publication #:
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Pub Dt:
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12/13/2001
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Title:
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FLAT MEDIA PROCESSING MACHINE
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Patent #:
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Issue Dt:
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08/28/2001
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Application #:
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09274511
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Filing Dt:
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03/23/1999
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Title:
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AUTOMATED SEMICONDUCTOR PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09351864
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Filing Dt:
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07/12/1999
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Title:
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DIFFUSER WITH SPIRAL OPENING PATTERN FOR AN ELECTROPLATING REACTOR VESSEL
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Patent #:
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Issue Dt:
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01/02/2001
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Application #:
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09351980
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Filing Dt:
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07/12/1999
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Title:
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LIFT AND ROTATE ASSEMBLY FOR USE IN A WORKPIECE PROCESSING STATION AND A METHOD OF ATTACHING THE SAME
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Patent #:
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Issue Dt:
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11/27/2001
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Application #:
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09362157
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Filing Dt:
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07/28/1999
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Title:
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WAFER CONTAINER CLEANING SYSTEM
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09372366
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Filing Dt:
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08/11/1999
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Publication #:
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Pub Dt:
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12/06/2001
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Title:
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MICROELECTRONIC WORKPIECE SUPPORT AND APPARATUS USING THE SUPPORT
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Patent #:
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Issue Dt:
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03/25/2003
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Application #:
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09372849
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Filing Dt:
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08/12/1999
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Title:
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FLUID HEATING SYSTEM FOR PROCESSING SEMICONDUCTOR MATERIALS
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Patent #:
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Issue Dt:
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06/25/2002
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Application #:
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09384077
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Filing Dt:
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08/26/1999
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Title:
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OZONE CONVERSION IN SEMICONDUCTOR MANUFACTURING
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Patent #:
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Issue Dt:
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04/09/2002
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Application #:
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09386188
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Filing Dt:
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08/31/1999
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Title:
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METALLIZATION STRUCTURES FOR MICROELECTRONIC APPLICATIONS AND PROCESS FOR FORMING THE STRUCTURES
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Patent #:
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Issue Dt:
|
10/16/2001
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Application #:
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09386197
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Filing Dt:
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08/31/1999
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Title:
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METHOD AND APPARATUS FOR PROCESSING THE SURFACE OF A MICROELECTRONIC WORKPIECE
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Patent #:
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Issue Dt:
|
08/05/2003
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Application #:
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09386200
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Filing Dt:
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08/31/1999
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Title:
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APPARATUS AND METHODS FOR CONTROLLING WORKPIECE SURFACE EXPOSURE TO PROCESSING LIQUIDS DURING THE FABRICATION OF MICROELECTRONIC COMPONENTS
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Patent #:
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Issue Dt:
|
01/01/2002
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Application #:
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09386213
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Filing Dt:
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08/31/1999
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Title:
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APPARATUS FOR HIGH DEPOSITION RATE SOLDER ELECTROPLATING ON A MICROELECTRONIC WORKPIECE
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Patent #:
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Issue Dt:
|
11/11/2003
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Application #:
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09386558
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Filing Dt:
|
08/31/1999
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Title:
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METHODS AND APPARATUS FOR PROCESSING THE SURFACE OF A MICROELECTRONIC WORKPIECE
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Patent #:
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|
Issue Dt:
|
11/20/2001
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Application #:
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09386566
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Filing Dt:
|
08/31/1999
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Title:
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ROBOTS FOR MICROELECTRONIC WORKPIECE HANDLING
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Patent #:
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Issue Dt:
|
11/27/2001
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Application #:
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09386590
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Filing Dt:
|
08/31/1999
|
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Title:
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ROBOTS FOR MICROELECTRONIC WORKPIECE HANDLING
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Patent #:
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|
Issue Dt:
|
10/30/2001
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Application #:
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09386610
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Filing Dt:
|
08/31/1999
|
|
Title:
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METHODS AND APPARATUS FOR PROCESSING THE SURFACE OF A MICROELECTRONIC WORKPIECE
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Patent #:
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|
Issue Dt:
|
02/21/2006
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Application #:
|
09386734
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Filing Dt:
|
08/31/1999
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|
Publication #:
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Pub Dt:
|
01/03/2002
| | | | |
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Title:
|
METHOD AND APPARATUS FOR LOW-TEMPERATURE ANNEALING OF METALLIZATION MICROSTRUCTURES IN THE PRODUCTION OF A MICROELECTRONIC DEVICE
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|
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Patent #:
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Issue Dt:
|
11/20/2001
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Application #:
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09386772
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Filing Dt:
|
08/31/1999
|
|
Title:
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COPPER ALLOY ELECTROPLATING BATH FOR MICROELECTRONIC APPLICATIONS
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Patent #:
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Issue Dt:
|
09/18/2001
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Application #:
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09387033
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Filing Dt:
|
08/31/1999
|
|
Title:
|
METHOD FOR ELECTROLYTICALLY DEPOSITING COPPER ON A SEMICONDUCTOR WORKPIECE
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|
|
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Patent #:
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|
Issue Dt:
|
04/02/2002
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Application #:
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09387084
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Filing Dt:
|
08/31/1999
|
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Title:
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METHODS FOR CONTROLLING AND/OR MEASURING ADDITIVE CONCENTRATION IN AN ELECTROPLATING BATH
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|
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Patent #:
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Issue Dt:
|
08/21/2001
|
Application #:
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09387099
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Filing Dt:
|
08/31/1999
|
|
Title:
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APPARATUS AND METHOD FOR ELECTROLYTICALLY DEPOSITING COPPER ON A SEMICONDUCTOR WORKPIECE
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|
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Patent #:
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Issue Dt:
|
01/21/2003
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Application #:
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09387577
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Filing Dt:
|
08/31/1999
|
|
Title:
|
APPARATUS FOR LOW-TEMPERATURE ANNEALING OF METALLIZATION MICROSTRUCTURES IN THE PRODUCTION OF A MICROELECTRONIC DEVICE
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Patent #:
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Issue Dt:
|
01/23/2001
|
Application #:
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09397220
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Filing Dt:
|
09/16/1999
|
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Title:
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INFLATABLE DOOR SEAL
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Patent #:
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Issue Dt:
|
04/17/2001
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Application #:
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09406908
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Filing Dt:
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09/24/1999
|
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Title:
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METHOD FOR CLEANING COPPER SURFACES
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Patent #:
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Issue Dt:
|
03/13/2001
|
Application #:
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09413622
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Filing Dt:
|
10/06/1999
|
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Title:
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VAPOR ASSISTED ROTARY DRYING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
|
05/28/2002
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Application #:
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09416225
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Filing Dt:
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10/08/1999
|
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Title:
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SINGLE SEMICONDUCTOR WAFER PROCESSOR
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Patent #:
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Issue Dt:
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11/06/2001
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Application #:
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09436613
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Filing Dt:
|
11/09/1999
|
|
Title:
|
A NON- CORROSIVE CLEANING METHOD FOR USE IN THE MANUFACTURE OF MICROELECTRONIC DEVICES
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Patent #:
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Issue Dt:
|
07/23/2002
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Application #:
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09437711
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Filing Dt:
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11/10/1999
|
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Title:
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REACTOR FOR PROCESSING A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
|
07/02/2002
|
Application #:
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09437926
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Filing Dt:
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11/10/1999
|
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Title:
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SELECTIVE TREATMENT OF THE SURFACE OF A MICROELECTRONIC WORKPIECE
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Patent #:
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Issue Dt:
|
11/27/2001
|
Application #:
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09440761
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Filing Dt:
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11/16/1999
|
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Title:
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CATHODE CURRENT CONTROL SYSTEM FOR A WAFER ELECTROPLATING APPARATUS
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Patent #:
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Issue Dt:
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03/19/2002
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Application #:
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09441712
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Filing Dt:
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11/16/1999
|
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Title:
|
PLATING SYSTEM WORKPIECE SUPPORT HAVING WORKPIECE-ENGAGING ELECTRODES WITH DISTAL CONTACT-PART AND DIELECTRIC COVER
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Patent #:
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Issue Dt:
|
04/15/2003
|
Application #:
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09476526
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Filing Dt:
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01/03/2000
|
|
Title:
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MICROELECTRONIC WORKPIECE PROCESSING TOOL INCLUDING A PROCESSING REACTOR HAVING A PADDLE ASSEMBLY FOR AGITATION OF A PROCESSING FLUID PROXIMATE TO THE WORKPIECE
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Patent #:
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Issue Dt:
|
06/08/2004
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Application #:
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09478870
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Filing Dt:
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01/07/2000
|
|
Title:
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SEMICONDUCTOR PROCESSOR WITH WAFER FACE PROTECTION
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Patent #:
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Issue Dt:
|
09/11/2001
|
Application #:
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09481651
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Filing Dt:
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01/12/2000
|
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Title:
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Method and Apparatus for High-Pressure Wafer Processing and Driving
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Patent #:
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Issue Dt:
|
10/29/2002
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Application #:
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09501002
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Filing Dt:
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02/09/2000
|
|
Title:
|
METHOD AND APPARATUS FOR PROCESSING A MICROELECTRONIC WORKPIECE INCLUDING AN APPARATUS AND METHOD FOR EXECUTING A PROCESSING STEP AT AN ELEVATED TEMPERATURE
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Patent #:
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Issue Dt:
|
01/01/2002
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Application #:
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09503784
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Filing Dt:
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02/14/2000
|
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Title:
|
Seal configuration for use with a motor drive assembly in a microelectronic workpiece processing system
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Patent #:
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Issue Dt:
|
04/16/2002
|
Application #:
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09522797
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Filing Dt:
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03/10/2000
|
|
Title:
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PROCESSING MACHINE WITH LOCKDOWN ROTOR
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Patent #:
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Issue Dt:
|
08/17/2004
|
Application #:
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09525930
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Filing Dt:
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03/14/2000
|
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Title:
|
SEMICONDUCTOR PLATING SYSTEM WORKPIECE SUPPORT HAVING WORKPIECE ENGAGING ELECTRODE WITH PRE-CONDITIONED CONTACT FACE
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|
