Patent Assignment Details
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| Reel/Frame: | 011578/0041 | |
| Pages: | 3 |
| | Recorded: | 02/26/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/11/2002
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Application #:
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09793314
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Filing Dt:
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02/26/2001
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Publication #:
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Pub Dt:
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12/13/2001
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Title:
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PROCESS TUBE HAVING SLIT TYPE PROCESS GAS INJECTION PORTION AND HOLE TYPE WASTE GAS EXHAUST PORTION, AND APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE
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Assignee
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| 416, MAETAN-DONG, PALDAL-GU |
| SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF |
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Correspondence name and address
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SAMUELS, GAUTHIER & STEVENS LLP
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ANTHONY P. ONELLO, JR.
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225 FRANKLIN STREET, SUITE 3300
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BOSTON, MA 02110
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