|
Total properties:
19
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/12/2002
|
Application #:
|
09538529
|
Filing Dt:
|
03/30/2000
|
|
Title:
|
ULTRAVIOLET POLARIZATION BEAM SPLITTER FOR MICROLITHOGRAPHY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/14/2003
|
Application #:
|
09638902
|
Filing Dt:
|
08/15/2000
|
|
Title:
|
VIRTUAL GAUGING SYSTEM FOR USE IN LITHOGRAPHIC PROCESSING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/20/2004
|
Application #:
|
09757622
|
Filing Dt:
|
01/11/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/20/2003
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR EFFICIENT AND ACCURATE FILTERING AND INTERPOLATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/26/2003
|
Application #:
|
10083667
|
Filing Dt:
|
02/27/2002
|
|
Publication #:
|
|
Pub Dt:
|
09/05/2002
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR DUAL RETICLE IMAGE EXPOSURE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/03/2005
|
Application #:
|
10127505
|
Filing Dt:
|
04/23/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/23/2003
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR IMPROVING LINEWIDTH CONTROL IN A LITHOGRAPHY DEVICE BY VARYING THE ANGULAR DISTRIBUTION OF LIGHT IN AN ILLUMINATOR AS A FUNCTION OF FIELD POSITION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/31/2004
|
Application #:
|
10127506
|
Filing Dt:
|
04/23/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/23/2003
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR IMPROVING LINE WIDTH CONTROL IN A LITHOGRAPHY DEVICE USING AN ILLUMINATION SYSTEM HAVING PRE-NUMERICAL APERTURE CONTROL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/03/2007
|
Application #:
|
10131185
|
Filing Dt:
|
04/25/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/31/2002
| | | | |
|
Title:
|
METHODS FOR OPTICAL BEAM SHAPING AND DIFFUSING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/25/2004
|
Application #:
|
10138714
|
Filing Dt:
|
05/06/2002
|
|
Publication #:
|
|
Pub Dt:
|
12/19/2002
| | | | |
|
Title:
|
METHOD FOR DETERMINING REFRACTIVE INDEX DISTRIBUTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/29/2004
|
Application #:
|
10156005
|
Filing Dt:
|
05/29/2002
|
|
Publication #:
|
|
Pub Dt:
|
12/04/2003
| | | | |
|
Title:
|
CATADIOPTRIC LITHOGRAPHY SYSTEM AND METHOD WITH RETICLE STAGE ORTHOGONAL TO WAFER STAGE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/07/2006
|
Application #:
|
10170546
|
Filing Dt:
|
06/14/2002
|
|
Publication #:
|
|
Pub Dt:
|
12/18/2003
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR MANAGING ACTINIC INTENSITY TRANSIENTS IN A LITHOGRAPHY MIRROR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/05/2004
|
Application #:
|
10208046
|
Filing Dt:
|
07/31/2002
|
|
Publication #:
|
|
Pub Dt:
|
02/05/2004
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR LASER BEAM EXPANSION WITHOUT EXPANDING SPATIAL COHERENCE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/2006
|
Application #:
|
10216660
|
Filing Dt:
|
08/12/2002
|
|
Publication #:
|
|
Pub Dt:
|
05/01/2003
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR RETICLE PROTECTION AND TRANSPORT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/08/2008
|
Application #:
|
10224485
|
Filing Dt:
|
08/21/2002
|
|
Publication #:
|
|
Pub Dt:
|
02/27/2003
| | | | |
|
Title:
|
HIGH NUMERICAL APERTURE PROJECTION SYSTEM AND METHOD FOR MICROLITHOGRAPHY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/23/2005
|
Application #:
|
10235499
|
Filing Dt:
|
09/06/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/11/2004
| | | | |
|
Title:
|
RETICLE FOCUS MEASUREMENT METHOD USING MULTIPLE INTERFEROMETRIC BEAMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/25/2006
|
Application #:
|
10253655
|
Filing Dt:
|
09/25/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/25/2004
| | | | |
|
Title:
|
METHOD FOR PROTECTION OF ADHESIVES USED TO SECURE OPTICS FROM ULTRA-VIOLET LIGHT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/30/2004
|
Application #:
|
10260308
|
Filing Dt:
|
10/01/2002
|
|
Publication #:
|
|
Pub Dt:
|
04/01/2004
| | | | |
|
Title:
|
METHOD OF MAKING A CUBE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/20/2004
|
Application #:
|
10264318
|
Filing Dt:
|
10/04/2002
|
|
Publication #:
|
|
Pub Dt:
|
05/08/2003
| | | | |
|
Title:
|
POLARIZATION BEAM SPLITTER FOR PHOTOLITHOGRAPHY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/10/2004
|
Application #:
|
10270556
|
Filing Dt:
|
10/16/2002
|
|
Publication #:
|
|
Pub Dt:
|
04/24/2003
| | | | |
|
Title:
|
ADVANCED ILLUMINATION SYSTEM FOR USE IN MICROLITHOGRAPHY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/10/2006
|
Application #:
|
10435562
|
Filing Dt:
|
05/12/2003
|
|
Publication #:
|
|
Pub Dt:
|
10/30/2003
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR MONITORING THE TOPOGRAPHY OF A WAFER SURFACE DURING LITHOGRAPHIC PROCESSING
|
|
