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Total properties:
20
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Patent #:
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Issue Dt:
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09/07/2010
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Application #:
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11377555
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Filing Dt:
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03/17/2006
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Publication #:
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Pub Dt:
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12/28/2006
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Title:
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METHOD AND DEVICE FOR MONITORING THE CONTAMINATION OF SUBSTRATE WAFERS
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Patent #:
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Issue Dt:
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02/26/2013
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Application #:
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12347378
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Filing Dt:
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12/31/2008
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Publication #:
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Pub Dt:
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07/09/2009
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Title:
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METHOD FOR MANUFACTURING PHOTOMASKS AND DEVICE FOR ITS IMPLEMENTATION
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Patent #:
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Issue Dt:
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06/18/2013
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Application #:
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12452978
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Filing Dt:
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03/15/2010
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Publication #:
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Pub Dt:
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07/29/2010
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Title:
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DRY VACUUM PUMP INCLUDING A LUBRICATING FLUID SEALING DEVICE AND A CENTRIFUGE ELEMENT EQUIPPING SUCH A DEVICE
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Patent #:
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Issue Dt:
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07/09/2013
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Application #:
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12459716
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Filing Dt:
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07/07/2009
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Publication #:
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Pub Dt:
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01/14/2010
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Title:
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APPARATUS FOR LOADING AND UNLOADING SEMICONDUCTOR SUBSTRATE PLATELETS
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Patent #:
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Issue Dt:
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06/11/2013
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Application #:
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12733371
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Filing Dt:
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05/10/2010
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Publication #:
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Pub Dt:
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11/04/2010
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Title:
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SYSTEM FOR ANALYZING A LOW-PRESSURE GAS BY OPTICAL EMISSION SPECTROSCOPY
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Patent #:
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Issue Dt:
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01/22/2013
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Application #:
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12736532
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Filing Dt:
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11/08/2010
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Publication #:
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Pub Dt:
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03/03/2011
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Title:
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CONTAMINATION MEASUREMENT STATION AND METHOD FOR A SEMICONDUCTOR SUBSTRATES TRANSPORT POD
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Patent #:
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Issue Dt:
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04/15/2014
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Application #:
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13144082
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Filing Dt:
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08/18/2011
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Publication #:
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Pub Dt:
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12/01/2011
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Title:
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DEVICE FOR MEASURING AND PROCESSING A HIGH DYNAMIC INPUT SIGNAL, AND CORRESPONDING LEAK DETECTOR AND MEASURING AND PROCESSING METHOD
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Patent #:
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Issue Dt:
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10/14/2014
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Application #:
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13170174
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Filing Dt:
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06/27/2011
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Publication #:
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Pub Dt:
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01/05/2012
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Title:
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DRY VACUUM PUMP HAVING MULTIPLE LUBRICANT RESERVOIRS
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Patent #:
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Issue Dt:
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08/12/2014
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Application #:
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13255383
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Filing Dt:
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09/08/2011
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Publication #:
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Pub Dt:
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12/29/2011
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Title:
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IONIZATION CELL FOR A MASS SPECTROMETER, AND CORRESPONDING LEAK DETECTOR
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Patent #:
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Issue Dt:
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11/03/2015
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Application #:
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13328377
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Filing Dt:
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12/16/2011
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Publication #:
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Pub Dt:
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12/20/2012
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Title:
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LEAK DETECTION DEVICE USING HYDROGEN AS TRACER GAS
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Patent #:
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Issue Dt:
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01/03/2017
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Application #:
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13380761
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Filing Dt:
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12/23/2011
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Publication #:
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Pub Dt:
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08/16/2012
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Title:
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METHOD FOR PREDICTING A ROTATION FAULT IN THE ROTOR OF A VACUUM PUMP, AND ASSOCIATED PUMPING DEVICE
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Patent #:
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Issue Dt:
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09/02/2014
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Application #:
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13448887
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Filing Dt:
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04/17/2012
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Publication #:
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Pub Dt:
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10/25/2012
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Title:
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Leak Detector and Process Control Therefor
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Patent #:
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Issue Dt:
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11/03/2015
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Application #:
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13505337
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Filing Dt:
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05/01/2012
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Publication #:
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Pub Dt:
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08/30/2012
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Title:
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VACUUM PUMPING SYSTEM HAVING AN EJECTOR AND CHECK VALVE
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Patent #:
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Issue Dt:
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10/03/2017
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Application #:
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13516376
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Filing Dt:
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06/15/2012
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Publication #:
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Pub Dt:
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10/11/2012
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Title:
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Method and Device for Controlling the Manufacture of Semiconductor by Measuring Contamination
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Patent #:
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Issue Dt:
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05/13/2014
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Application #:
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13805155
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Filing Dt:
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12/18/2012
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Publication #:
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Pub Dt:
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04/18/2013
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Title:
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DEVICE AND METHOD FOR DRYING A PHOTOMASK
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Patent #:
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Issue Dt:
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03/21/2017
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Application #:
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14350835
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Filing Dt:
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04/10/2014
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Publication #:
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Pub Dt:
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10/02/2014
| | | | |
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Title:
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GAS PUMPING AND TREATMENT DEVICE
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Patent #:
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Issue Dt:
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01/31/2017
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Application #:
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14415025
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Filing Dt:
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01/15/2015
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Publication #:
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Pub Dt:
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06/18/2015
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Title:
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METHOD AND DEVICE FOR PUMPING OF A PROCESS CHAMBER
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Patent #:
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Issue Dt:
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12/12/2017
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Application #:
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14416432
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Filing Dt:
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01/22/2015
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Publication #:
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Pub Dt:
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07/30/2015
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Title:
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DETECTION METHOD AND FACILITY FOR CHECKING SEALED PRODUCTS FOR LEAKS
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|
|
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Patent #:
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Issue Dt:
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11/07/2017
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Application #:
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14441669
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Filing Dt:
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05/08/2015
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Publication #:
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Pub Dt:
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10/01/2015
| | | | |
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Title:
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STATION AND METHOD FOR MEASURING PARTICLE CONTAMINATION OF A TRANSPORT CARRIER FOR CONVEYING AND STORING SEMICONDUCTOR SUBSTRATES AT ATMOSPHERIC PRESSURE
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|
|
|
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Patent #:
|
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Issue Dt:
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11/14/2017
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Application #:
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14443745
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Filing Dt:
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05/19/2015
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Publication #:
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Pub Dt:
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10/22/2015
| | | | |
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Title:
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STATION AND METHOD FOR MEASURING PARTICLE CONTAMINATION OF A TRANSPORT CARRIER FOR CONVEYING AND STORING SEMICONDUCTOR SUBSTRATES AT ATMOSPHERIC PRESSURE
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