Total properties:
23
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Patent #:
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Issue Dt:
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06/15/2004
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Application #:
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10173190
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Filing Dt:
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06/14/2002
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Publication #:
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Pub Dt:
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01/23/2003
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Title:
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GAS DISCHARGE ULTRAVIOLET WAVEMETER WITH ENHANCED ILLUMINATION
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10187336
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Filing Dt:
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06/28/2002
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Publication #:
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Pub Dt:
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01/16/2003
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Title:
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SIX TO TEN KHZ, OR GREATER GAS DISCHARGE LASER SYSTEM
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Patent #:
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Issue Dt:
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03/09/2004
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Application #:
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10233253
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Filing Dt:
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08/30/2002
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Publication #:
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Pub Dt:
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03/06/2003
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Title:
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LITHOGRAPHY LASER WITH BEAM DELIVERY AND BEAM POINTING CONTROL
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Patent #:
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Issue Dt:
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03/09/2004
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Application #:
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10255806
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Filing Dt:
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09/25/2002
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Publication #:
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Pub Dt:
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05/15/2003
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Title:
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LITHOGRAPHY LASER SYSTEM WITH IN-PLACE ALIGNMENT TOOL
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Patent #:
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Issue Dt:
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11/08/2005
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Application #:
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10356168
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Filing Dt:
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01/31/2003
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Publication #:
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Pub Dt:
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02/05/2004
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Title:
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AUTOMATIC GAS CONTROL SYSTEM FOR A GAS DISCHARGE LASER
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Patent #:
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Issue Dt:
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06/07/2005
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Application #:
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10384967
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Filing Dt:
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03/08/2003
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Publication #:
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Pub Dt:
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11/27/2003
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Title:
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HIGH POWER DEEP ULTRAVIOLET LASER WITH LONG LIFE OPTICS
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Patent #:
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Issue Dt:
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02/21/2006
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Application #:
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10607407
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Filing Dt:
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06/25/2003
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Publication #:
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Pub Dt:
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12/30/2004
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Title:
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METHOD AND APPARATUS FOR COOLING MAGNETIC CIRCUIT ELEMENTS
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Patent #:
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Issue Dt:
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08/14/2007
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Application #:
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10609223
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Filing Dt:
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06/26/2003
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Publication #:
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Pub Dt:
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12/30/2004
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Title:
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METHOD AND APPARATUS FOR MEASURING BANDWIDTH OF AN OPTICAL SPECTRUM OUTPUT OF A VERY SMALL WAVELENGTH VERY NARROW BANDWIDTH HIGH POWER LASER
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Patent #:
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Issue Dt:
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10/04/2005
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Application #:
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10615321
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Filing Dt:
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07/07/2003
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Publication #:
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Pub Dt:
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01/13/2005
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Title:
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METHOD AND APPARATUS FOR MEASURING BANDWIDTH OF A LASER OUTPUT
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Patent #:
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Issue Dt:
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05/02/2006
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Application #:
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10631349
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Filing Dt:
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07/30/2003
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Publication #:
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Pub Dt:
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03/25/2004
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Title:
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CONTROL SYSTEM FOR A TWO CHAMBER GAS DISCHARGE LASER
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Patent #:
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Issue Dt:
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08/22/2006
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Application #:
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10672181
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Filing Dt:
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09/26/2003
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Publication #:
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Pub Dt:
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04/08/2004
| | | | |
Title:
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CATHODES FOR FLUORINE GAS DISCHARGE LASERS
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Patent #:
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Issue Dt:
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03/04/2008
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Application #:
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10672182
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Filing Dt:
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09/26/2003
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Publication #:
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Pub Dt:
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08/26/2004
| | | | |
Title:
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ELECTRODES FOR FLUORINE GAS DISCHARGE LASERS
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Patent #:
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Issue Dt:
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06/12/2007
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Application #:
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10672722
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Filing Dt:
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09/26/2003
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Publication #:
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Pub Dt:
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04/15/2004
| | | | |
Title:
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ANODES FOR FLUORINE GAS DISCHARGE LASERS
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Patent #:
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Issue Dt:
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06/28/2005
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Application #:
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10676175
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Filing Dt:
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09/30/2003
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Publication #:
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Pub Dt:
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03/03/2005
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Title:
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GAS DISCHARGE MOPA LASER SPECTRAL ANALYSIS MODULE
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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10676907
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Filing Dt:
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09/30/2003
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Publication #:
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Pub Dt:
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03/31/2005
| | | | |
Title:
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GAS DISCHARGE MOPA LASER SPECTRAL ANALYSIS MODULE
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Patent #:
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|
Issue Dt:
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11/14/2006
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Application #:
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10699228
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Filing Dt:
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10/30/2003
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Publication #:
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Pub Dt:
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06/10/2004
| | | | |
Title:
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ETALON TESTING SYSTEM AND PROCESS
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Patent #:
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Issue Dt:
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03/13/2007
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Application #:
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10739961
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Filing Dt:
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12/17/2003
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Publication #:
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Pub Dt:
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09/16/2004
| | | | |
Title:
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GAS DISCHARGE LASER LIGHT SOURCE BEAM DELIVERY UNIT
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Patent #:
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|
Issue Dt:
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04/24/2007
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Application #:
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10740659
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Filing Dt:
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12/18/2003
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Publication #:
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Pub Dt:
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10/27/2005
| | | | |
Title:
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METHOD AND APPARATUS FOR CONTROLLING THE OUTPUT OF A GAS DISCHARGE MOPA LASER SYSTEM
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Patent #:
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|
Issue Dt:
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05/15/2007
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Application #:
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10798740
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Filing Dt:
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03/10/2004
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Publication #:
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Pub Dt:
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06/22/2006
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Title:
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COLLECTOR FOR EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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03/18/2008
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Application #:
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10808157
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Filing Dt:
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03/23/2004
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Publication #:
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Pub Dt:
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12/02/2004
| | | | |
Title:
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DUV LIGHT SOURCE OPTICAL ELEMENT IMPROVEMENTS
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Patent #:
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Issue Dt:
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10/02/2007
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Application #:
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11035938
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Filing Dt:
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01/13/2005
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Publication #:
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Pub Dt:
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08/25/2005
| | | | |
Title:
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METHOD AND APPARATUS FOR CONTROLLING THE OUTPUT OF A GAS DISCHARGE LASER SYSTEM
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|
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Patent #:
|
|
Issue Dt:
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08/02/2011
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Application #:
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11352522
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Filing Dt:
|
02/10/2006
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Title:
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CONTROL SYSTEM FOR A TWO CHAMBER GAS DISCHARGE LASER SYSTEM
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|
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Patent #:
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|
Issue Dt:
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05/19/2009
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Application #:
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11488205
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Filing Dt:
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07/18/2006
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Publication #:
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Pub Dt:
|
12/07/2006
| | | | |
Title:
|
CATHODES FOR FLUORINE GAS DISCHARGE LASERS
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