Patent Assignment Details
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| Reel/Frame: | 016064/0056 | |
| Pages: | 3 |
| | Recorded: | 12/07/2004 | | |
| Attorney Dkt #: | v0077.70276us00 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11005972
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Filing Dt:
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12/07/2004
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Publication #:
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Pub Dt:
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06/08/2006
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Title:
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Plasma ion implantation system with axial electrostatic confinement
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Assignee
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01810 |
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Correspondence name and address
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MARK A. SUPERKO, ESQ.
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VARIAN SEMICONDUCTOR EQUIPMENT
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35 DORY ROAD
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GLOUCESTER, MA 01930-2297
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