Patent Assignment Details
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| Reel/Frame: | 013328/0068 | |
| Pages: | 3 |
| | Recorded: | 09/24/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10253206
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Filing Dt:
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09/24/2002
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Publication #:
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Pub Dt:
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03/25/2004
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Title:
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Apparatus and method for in-situ cleaning of borosilicate (BSG) and borophosphosilicate (BPSG) films from CVD chambers
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Assignee
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| 6000 TECHNOLOGY BOULEVARD |
| SANDSTON, VIRGINIA 23150 |
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Correspondence name and address
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INFINEON TECHNOLOGIES NORTH AMERICA CORP
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SIEMENS CORPORATION, ELSA KELLER
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INTELLECTUAL PROPERTY DEPARTMENT
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186 WOOD AVENUE SOUTH
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ISELIN, NJ 08830
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