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Patent Assignment Details

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Reel/Frame:	019910/0076			Pages:	4
		Recorded:	10/02/2007
Attorney Dkt #:	067538 ATI
Conveyance:	MERGER (SEE DOCUMENT FOR DETAILS).

Total properties: 35

Patent #:	4711989	Issue Dt:	12/08/1987	Application #:	06864676	Filing Dt:	05/19/1986
Title:	DIFFUSION FURNACE MULTIZONE TEMPERATURE CONTROL

Patent #:	4721424	Issue Dt:	01/26/1988	Application #:	06880460	Filing Dt:	06/30/1986
Title:	SEMICONDUCTOR WAFER BOAT LOADER RELEASABLE MOUNTING

Patent #:	4720395	Issue Dt:	01/19/1988	Application #:	06899923	Filing Dt:	08/25/1986
Title:	LOW TEMPERATURE SILICON NITRIDE CVD PROCESS

Patent #:	4721427	Issue Dt:	01/26/1988	Application #:	07048868	Filing Dt:	05/12/1987
Title:	WAFER TRANSFER STAND

Patent #:	4886954	Issue Dt:	12/12/1989	Application #:	07181787	Filing Dt:	04/15/1988
Title:	HOT WALL DIFFUSION FURNACE AND METHOD FOR OPERATING THE FURNACE

Patent #:	4993358	Issue Dt:	02/19/1991	Application #:	07386903	Filing Dt:	07/28/1989
Title:	CHEMICAL VAPOR DEPOSITION REACTOR AND METHOD OF OPERATION

Patent #:	5059770	Issue Dt:	10/22/1991	Application #:	07409125	Filing Dt:	09/19/1989
Title:	MULTI-ZONE PLANAR HEATER ASSEMBLY AND METHOD OF OPERATION

Patent #:	5088773	Issue Dt:	02/18/1992	Application #:	07570122	Filing Dt:	08/17/1990
Title:	ELECTRICALLY INSULATING PIPE COUPLING APPARATUS

Patent #:	5078922	Issue Dt:	01/07/1992	Application #:	07601270	Filing Dt:	10/22/1990
Title:	LIQUID SOURCE BUBBLER

Patent #:	5122391	Issue Dt:	06/16/1992	Application #:	07668858	Filing Dt:	03/13/1991
Title:	METHOD FOR PRODUCING HIGHLY CONDUCTIVE AND TRANSPARENT FILMS OF TIN AND FLUORINE DOPED INDIUM OXIDE BY APCVD

Patent #:	5377300	Issue Dt:	12/27/1994	Application #:	07971490	Filing Dt:	11/04/1992
Title:	GAS HEATER FOR PROCESSING GASES

Patent #:	5626680	Issue Dt:	05/06/1997	Application #:	08399108	Filing Dt:	03/03/1995
Title:	THERMAL PROCESSING APPARATUS AND PROCESS

Patent #:	5786278	Issue Dt:	07/28/1998	Application #:	08704227	Filing Dt:	08/27/1996
Title:	METHOD OF STRESS-RELIEVING SILICON OXIDE FILMS

Patent #:	5855957	Issue Dt:	01/05/1999	Application #:	08801997	Filing Dt:	02/18/1997
Title:	OPTIMIZATION OF SIO2 FILM CONFORMALITY IN ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION

Patent #:	6005225	Issue Dt:	12/21/1999	Application #:	08827542	Filing Dt:	03/28/1997
Title:	THERMAL PROCESSING APPARATUS

Patent #:	5938851	Issue Dt:	08/17/1999	Application #:	08838882	Filing Dt:	04/14/1997
Title:	EXHAUST VENT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION SYSTEMS

Patent #:	5944900	Issue Dt:	08/31/1999	Application #:	08976928	Filing Dt:	11/24/1997
Title:	PROTECTIVE GAS SHIELD FOR CHEMICAL VAPOR DEPOSITION APPARATUS

Patent #:	5849088	Issue Dt:	12/15/1998	Application #:	09008024	Filing Dt:	01/16/1998
Title:	FREE FLOATING SHIELD

Patent #:	6026589	Issue Dt:	02/22/2000	Application #:	09018021	Filing Dt:	02/02/1998
Title:	WAFER CARRIER AND SEMICONDUCTOR APPARATUS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE

Patent #:	5976258	Issue Dt:	11/02/1999	Application #:	09019349	Filing Dt:	02/05/1998
Title:	HIGH TEMPERATURE SUBSTRATE TRANSFER MODULE

Patent #:	6660391	Issue Dt:	12/09/2003	Application #:	09361667	Filing Dt:	07/27/1999
Title:	LOW K DIELECTRIC INORGANIC/ORGANIC HYBRID FILMS AND METHOD OF MAKING

Patent #:	6300600	Issue Dt:	10/09/2001	Application #:	09373894	Filing Dt:	08/12/1999
Title:	HOT WALL RAPID THERMAL PROCESSOR

Patent #:	6206973	Issue Dt:	03/27/2001	Application #:	09480730	Filing Dt:	01/06/2000
Title:	CHEMICAL VAPOR DEPOSITION SYSTEM AND METHOD

Patent #:	6352592	Issue Dt:	03/05/2002	Application #:	09492420	Filing Dt:	01/27/2000
Title:	Free floating shield and semiconductor processing system

Patent #:	6387764	Issue Dt:	05/14/2002	Application #:	09541395	Filing Dt:	03/31/2000
Title:	Trench isolation process to deposit a trench fill oxide prior to sidewall liner oxidation growth

Patent #:	6465044	Issue Dt:	10/15/2002	Application #:	09542612	Filing Dt:	04/04/2000
Title:	Chemical vapor deposition of silicon oxide films using alkylsiloxane oligomers with ozone

Patent #:	6576060	Issue Dt:	06/10/2003	Application #:	09574826	Filing Dt:	05/19/2000
Title:	PROTECTIVE GAS SHIELD APPARATUS

Patent #:	6458013	Issue Dt:	10/01/2002	Application #:	09628962	Filing Dt:	07/31/2000
Title:	METHOD OF CHEMICAL MECHANICAL POLISHING

Patent #:	6462310	Issue Dt:	10/08/2002	Application #:	09638113	Filing Dt:	08/11/2000
Title:	HOT WALL RAPID THERMAL PROCESSOR

Patent #:	6492621	Issue Dt:	12/10/2002	Application #:	09934952	Filing Dt:	08/21/2001
Publication #:	US20020011478	Pub Dt:	01/31/2002
Title:	HOT WALL RAPID THERMAL PROCESSOR

Patent #:	7029381	Issue Dt:	04/18/2006	Application #:	10029158	Filing Dt:	12/21/2001
Publication #:	US20020137448	Pub Dt:	09/26/2002
Title:	APPARATUS AND METHOD FOR CHEMICAL MECHANICAL POLISHING OF SUBSTRATES

Patent #:	6874770	Issue Dt:	04/05/2005	Application #:	10306205	Filing Dt:	11/27/2002
Publication #:	US20030116019	Pub Dt:	06/26/2003
Title:	HIGH FLOW RATE BUBBLER SYSTEM AND METHOD

Patent #:	7109131	Issue Dt:	09/19/2006	Application #:	10456850	Filing Dt:	06/06/2003
Publication #:	US20040137755	Pub Dt:	07/15/2004
Title:	SYSTEM AND METHOD FOR HYDROGEN-RICH SELECTIVE OXIDATION

Patent #:	NONE	Issue Dt:		Application #:	10521283	Filing Dt:	02/28/2005
Publication #:	US20060083495	Pub Dt:	04/20/2006
Title:	VARIABLE HEATER ELEMENT FOR LOW TO HIGH TEMPERATURE RANGES

Patent #:	7205247	Issue Dt:	04/17/2007	Application #:	10954819	Filing Dt:	09/29/2004
Publication #:	US20050235905	Pub Dt:	10/27/2005
Title:	ATOMIC LAYER DEPOSITION OF HAFNIUM-BASED HIGH-K DIELECTRIC

Assignor

THERMAL ACQUISITION CORP.

Exec Dt:

10/15/2003

Assignee

AVIZA TECHNOLOGY, INC.

440 KINGS VILLAGE ROAD

SCOTTS VALLEY, CALIFORNIA 95066-4081

Correspondence name and address
	MORGAN, LEWIS & BOCKIUS LLP
	2 PALO ALTO SQUARE
	3000 EL CAMINO REAL, SUITE 700
	PALO ALTO, CA 94306

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