Patent Assignment Details
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Reel/Frame: | 056980/0076 | |
| Pages: | 8 |
| | Recorded: | 07/26/2021 | | |
Attorney Dkt #: | 0201-800WIL-18UT |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/07/2021
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Application #:
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16438827
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Filing Dt:
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06/12/2019
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Publication #:
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Pub Dt:
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12/19/2019
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Title:
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Radical Output Monitor for a Remote Plasma Source and Method of Use
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Assignee
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2 TECH DRIVE, SUITE 201 |
ANDOVER, MASSACHUSETTS 01810 |
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Correspondence name and address
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MKS INSTRUMENTS, INC. GEORGIA DRISTILARI
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2 TECH DRIVE
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SUITE 201
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ANDOVER, MA 01810
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05/31/2024 06:48 AM
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