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NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:	062253/0077			Pages:	5
		Recorded:	12/30/2022
Attorney Dkt #:	01424-0999
Conveyance:	CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).

Total properties: 45

Patent #:	6812061	Issue Dt:	11/02/2004	Application #:	09764913	Filing Dt:	01/17/2001
Title:	METHOD AND APPARATUS FOR ASSEMBLING AN ARRAY OF MICRO-DEVICES

Patent #:	6838056	Issue Dt:	01/04/2005	Application #:	10189607	Filing Dt:	07/08/2002
Publication #:	US20040005628	Pub Dt:	01/08/2004
Title:	METHOD AND APPARATUS FOR SORTING BIOLOGICAL CELLS WITH A MEMS DEVICE

Patent #:	7057245	Issue Dt:	06/06/2006	Application #:	10866123	Filing Dt:	06/12/2004
Publication #:	US20050003631	Pub Dt:	01/06/2005
Title:	METHOD AND APPARATUS FOR ASSEMBLING AN ARRAY OF MICRO-DEVICES

Patent #:	7264972	Issue Dt:	09/04/2007	Application #:	10978947	Filing Dt:	11/01/2004
Publication #:	US20050063872	Pub Dt:	03/24/2005
Title:	METHOD AND APPARATUS FOR SORTING BIOLOGICAL CELLS WITH A MEMS DEVICE

Patent #:	7220594	Issue Dt:	05/22/2007	Application #:	11196291	Filing Dt:	08/04/2005
Publication #:	US20050282151	Pub Dt:	12/22/2005
Title:	METHOD AND APPARATUS FOR SORTING PARTICLES WITH A MEMS DEVICE

Patent #:	7528691	Issue Dt:	05/05/2009	Application #:	11211623	Filing Dt:	08/26/2005
Publication #:	US20070236313	Pub Dt:	10/11/2007
Title:	DUAL SUBSTRATE ELECTROSTATIC MEMS SWITCH WITH HERMETIC SEAL AND METHOD OF MANUFACTURE

Patent #:	7233048	Issue Dt:	06/19/2007	Application #:	11211624	Filing Dt:	08/26/2005
Publication #:	US20070045820	Pub Dt:	03/01/2007
Title:	TRENCH PLATING PROCESS AND APPARATUS FOR THROUGH HOLE VIAS

Patent #:	7582969	Issue Dt:	09/01/2009	Application #:	11211625	Filing Dt:	08/26/2005
Publication #:	US20070045781	Pub Dt:	03/01/2007
Title:	HERMETIC INTERCONNECT STRUCTURE AND METHOD OF MANUFACTURE

Patent #:	7276991	Issue Dt:	10/02/2007	Application #:	11221745	Filing Dt:	09/09/2005
Publication #:	US20070057746	Pub Dt:	03/15/2007
Title:	MULTIPLE SWITCH MEMS STRUCTURE AND METHOD OF MANUFACTURE

Patent #:	7229838	Issue Dt:	06/12/2007	Application #:	11260367	Filing Dt:	10/28/2005
Publication #:	US20060062698	Pub Dt:	03/23/2006
Title:	MEMS ACTUATOR AND METHOD OF MANUFACTURE FOR MEMS PARTICLE SORTING DEVICE

Patent #:	7141080	Issue Dt:	11/28/2006	Application #:	11272689	Filing Dt:	11/15/2005
Publication #:	US20060063307	Pub Dt:	03/23/2006
Title:	METHOD AND APPARATUS FOR ASSEMBLING AN ARRAY OF MICRO-DEVICES

Patent #:	7569926	Issue Dt:	08/04/2009	Application #:	11304601	Filing Dt:	12/16/2005
Publication #:	US20070048898	Pub Dt:	03/01/2007
Title:	WAFER LEVEL HERMETIC BOND USING METAL ALLOY WITH RAISED FEATURE

Patent #:	7548145	Issue Dt:	06/16/2009	Application #:	11334438	Filing Dt:	01/19/2006
Publication #:	US20070170811	Pub Dt:	07/26/2007
Title:	HYSTERETIC MEMS THERMAL DEVICE AND METHOD OF MANUFACTURE

Patent #:	7533792	Issue Dt:	05/19/2009	Application #:	11347219	Filing Dt:	02/06/2006
Publication #:	US20070181633	Pub Dt:	08/09/2007
Title:	ELASTIC INTERFACE FOR WAFER BONDING APPARATUS

Patent #:	7785913	Issue Dt:	08/31/2010	Application #:	11359558	Filing Dt:	02/23/2006
Publication #:	US20070196998	Pub Dt:	08/23/2007
Title:	SYSTEM AND METHOD FOR FORMING MOVEABLE FEATURES ON A COMPOSITE SUBSTRATE

Patent #:	7872432	Issue Dt:	01/18/2011	Application #:	11378340	Filing Dt:	03/20/2006
Publication #:	US20070215448	Pub Dt:	09/20/2007
Title:	MEMS THERMAL DEVICE WITH SLIDEABLY ENGAGED TETHER AND METHOD OF MANUFACTURE

Patent #:	7812703	Issue Dt:	10/12/2010	Application #:	11386733	Filing Dt:	03/23/2006
Publication #:	US20070222004	Pub Dt:	09/27/2007
Title:	MEMS DEVICE USING NIMN ALLOY AND METHOD OF MANUFACTURE

Patent #:	7807547	Issue Dt:	10/05/2010	Application #:	11390085	Filing Dt:	03/28/2006
Publication #:	US20070238262	Pub Dt:	10/11/2007
Title:	WAFER BONDING MATERIAL WITH EMBEDDED RIGID PARTICLES

Patent #:	7462931	Issue Dt:	12/09/2008	Application #:	11433435	Filing Dt:	05/15/2006
Publication #:	US20070262428	Pub Dt:	11/15/2007
Title:	INDENTED STRUCTURE FOR ENCAPSULATED DEVICES AND METHOD OF MANUFACTURE

Patent #:	7550778	Issue Dt:	06/23/2009	Application #:	11434768	Filing Dt:	05/17/2006
Publication #:	US20070269934	Pub Dt:	11/22/2007
Title:	SYSTEM AND METHOD FOR PROVIDING ACCESS TO AN ENCAPSULATED DEVICE

Patent #:	7675162	Issue Dt:	03/09/2010	Application #:	11541774	Filing Dt:	10/03/2006
Publication #:	US20080079120	Pub Dt:	04/03/2008
Title:	INTERCONNECT STRUCTURE USING THROUGH WAFER VIAS AND METHOD OF FABRICATION

Patent #:	7688167	Issue Dt:	03/30/2010	Application #:	11546288	Filing Dt:	10/12/2006
Publication #:	US20080087530	Pub Dt:	04/17/2008
Title:	CONTACT ELECTRODE FOR MICRODEVICES AND ETCH METHOD OF MANUFACTURE

Patent #:	7968986	Issue Dt:	06/28/2011	Application #:	11797659	Filing Dt:	05/07/2007
Publication #:	US20080277672	Pub Dt:	11/13/2008
Title:	LID STRUCTURE FOR MICRODEVICE AND METHOD OF MANUFACTURE

Patent #:	7893798	Issue Dt:	02/22/2011	Application #:	11797924	Filing Dt:	05/09/2007
Publication #:	US20080278268	Pub Dt:	11/13/2008
Title:	DUAL SUBSTRATE MEMS PLATE SWITCH AND METHOD OF MANUFACTURE

Patent #:	7972683	Issue Dt:	07/05/2011	Application #:	11896648	Filing Dt:	09/05/2007
Publication #:	US20070295456	Pub Dt:	12/27/2007
Title:	WAFER BONDING MATERIAL WITH EMBEDDED CONDUCTIVE PARTICLES

Patent #:	7864006	Issue Dt:	01/04/2011	Application #:	12068586	Filing Dt:	02/08/2008
Publication #:	US20080277258	Pub Dt:	11/13/2008
Title:	MEMS PLATE SWITCH AND METHOD OF MANUFACTURE

Patent #:	8088651	Issue Dt:	01/03/2012	Application #:	12232298	Filing Dt:	09/15/2008
Publication #:	US20120015456	Pub Dt:	01/19/2012
Title:	SYSTEM AND METHOD FOR PROVIDING ACCESS TO AN ENCAPSULATED DEVICE

Patent #:	7759218	Issue Dt:	07/20/2010	Application #:	12285817	Filing Dt:	10/15/2008
Publication #:	US20090053855	Pub Dt:	02/26/2009
Title:	INDENTED LID FOR ENCAPSULATED DEVICES AND METHOD OF MANUFACTURE

Patent #:	7944113	Issue Dt:	05/17/2011	Application #:	12318634	Filing Dt:	01/05/2009
Publication #:	US20090201119	Pub Dt:	08/13/2009
Title:	HYSTERETIC MEMS THERMAL DEVICE AND METHOD OF MANUFACTURE

Patent #:	7960208	Issue Dt:	06/14/2011	Application #:	12459956	Filing Dt:	07/11/2009
Publication #:	US20100003772	Pub Dt:	01/07/2010
Title:	WAFER LEVEL HERMETIC BOND USING METAL ALLOY WITH RAISED FEATURE

Patent #:	8245391	Issue Dt:	08/21/2012	Application #:	12588060	Filing Dt:	10/02/2009
Publication #:	US20100018021	Pub Dt:	01/28/2010
Title:	METHOD OF MANUFACTURING A HYSTERETIC MEMS TWO-DIMENSIONAL THERMAL DEVICE

Patent #:	8541735	Issue Dt:	09/24/2013	Application #:	12662237	Filing Dt:	04/07/2010
Publication #:	US20110250092	Pub Dt:	10/13/2011
Title:	Inlaid optical material and method of manufacture

Patent #:	8690830	Issue Dt:	04/08/2014	Application #:	12801162	Filing Dt:	05/26/2010
Publication #:	US20110295229	Pub Dt:	12/01/2011
Title:	IN-PLANE ELECTROMAGNETIC MEMS PUMP

Patent #:	8343791	Issue Dt:	01/01/2013	Application #:	12923693	Filing Dt:	10/05/2010
Publication #:	US20120080762	Pub Dt:	04/05/2012
Title:	PLATING PROCESS AND APPARATUS FOR THROUGH WAFER FEATURES

Patent #:	8466760	Issue Dt:	06/18/2013	Application #:	12929257	Filing Dt:	01/11/2011
Publication #:	US20110130721	Pub Dt:	06/02/2011
Title:	CONFIGURABLE POWER SUPPLY USING MEMS SWITCH

Patent #:	8264307	Issue Dt:	09/11/2012	Application #:	12929259	Filing Dt:	01/11/2011
Publication #:	US20110155548	Pub Dt:	06/30/2011
Title:	DUAL SUBSTRATE MEMS PLATE SWITCH AND METHOD OF MANUFACTURE

Patent #:	8338283	Issue Dt:	12/25/2012	Application #:	13373969	Filing Dt:	12/07/2011
Title:	METHOD AND APPARATUS FOR APPLYING THIN LIQUID COATINGS

Patent #:	8822207	Issue Dt:	09/02/2014	Application #:	13374899	Filing Dt:	01/23/2012
Publication #:	US20120190105	Pub Dt:	07/26/2012
Title:	Cartridge for MEMS particle sorting system

Patent #:	8736081	Issue Dt:	05/27/2014	Application #:	13573201	Filing Dt:	08/30/2012
Publication #:	US20120319303	Pub Dt:	12/20/2012
Title:	WAFER LEVEL HERMETIC BOND USING METAL ALLOY WITH KEEPER LAYER

Patent #:	8847373	Issue Dt:	09/30/2014	Application #:	13986467	Filing Dt:	05/07/2013
Title:	EXOTHERMIC ACTIVATION FOR HIGH VACUUM PACKAGING

Patent #:	9274180	Issue Dt:	03/01/2016	Application #:	13987463	Filing Dt:	07/29/2013
Publication #:	US20150028863	Pub Dt:	01/29/2015
Title:	Microfabricated magnetic field transducer with flux guide

Patent #:	9372185	Issue Dt:	06/21/2016	Application #:	13987464	Filing Dt:	07/29/2013
Publication #:	US20150031120	Pub Dt:	01/29/2015
Title:	MEMS PARTICLE SORTING ACTUATOR AND METHOD OF MANUFACTURE

Patent #:	9315375	Issue Dt:	04/19/2016	Application #:	14142712	Filing Dt:	12/27/2013
Publication #:	US20150183200	Pub Dt:	07/02/2015
Title:	METHOD USING GLASS SUBSTRATE ANODIC BONDING

Patent #:	9388037	Issue Dt:	07/12/2016	Application #:	14158829	Filing Dt:	01/19/2014
Publication #:	US20150183630	Pub Dt:	07/02/2015
Title:	DEVICE USING GLASS SUBSTRATE ANODIC BONDING

Patent #:	9156679	Issue Dt:	10/13/2015	Application #:	14326406	Filing Dt:	07/08/2014
Title:	METHOD AND DEVICE USING SILICON SUBSTRATE TO GLASS SUBSTRATE ANODIC BONDING

Assignor

INNOVATIVE MICRO TECHNOLOGY, INC.

Exec Dt:

03/31/2021

Assignee

ATOMICA CORP.

75 ROBIN HILL ROAD

SANTA BARBARA, CALIFORNIA 93117

Correspondence name and address
	BEJIN BIENEMAN PLC
	2000 TOWN CENTER, SUITE 800
	SOUTHFIELD, MI 48075

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