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Total properties:
81
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Patent #:
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Issue Dt:
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02/06/1996
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Application #:
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08391724
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Filing Dt:
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02/21/1995
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Title:
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Patent #:
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Issue Dt:
|
09/30/1997
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Application #:
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08438261
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Filing Dt:
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05/10/1995
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Title:
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INTEGRATED SEMICONDUCTOR WAFER PROCESSING SYSTEM
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Patent #:
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Issue Dt:
|
11/16/1999
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Application #:
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08450369
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Filing Dt:
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05/25/1995
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Title:
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PLASMA ETCH SYSTEM
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Patent #:
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Issue Dt:
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08/12/2003
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Application #:
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08564659
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Filing Dt:
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11/29/1995
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Title:
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Patent #:
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Issue Dt:
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06/22/1999
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Application #:
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08651377
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Filing Dt:
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05/22/1996
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Title:
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APPARATUS FOR, AND METHOD OF, REMOVING HYDROCARBONS FROM THE SURFACE OF A SUBSTRATE
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Patent #:
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Issue Dt:
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04/11/2000
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Application #:
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08675093
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Filing Dt:
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07/03/1996
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Title:
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PLASMA ETCH REACTOR AND METHOD FOR EMERGING FILMS
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Patent #:
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Issue Dt:
|
12/31/2002
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Application #:
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08675559
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Filing Dt:
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07/03/1996
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Title:
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PLASMA ETCH REACTOR AND METHOD
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Patent #:
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Issue Dt:
|
10/03/2000
|
Application #:
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08742861
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Filing Dt:
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11/01/1996
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Title:
|
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Patent #:
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Issue Dt:
|
09/28/1999
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Application #:
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08850224
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Filing Dt:
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05/02/1997
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Title:
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PLASMA ETCH SYSTEM
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Patent #:
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Issue Dt:
|
06/05/2001
|
Application #:
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08853649
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Filing Dt:
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05/09/1997
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Title:
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METHODS FOR CLEANING SEMICONDUCTOR SURFACES
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Patent #:
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Issue Dt:
|
08/22/2000
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Application #:
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08897913
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Filing Dt:
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07/21/1997
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Title:
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GAS INTAKE ASSEMBLY FOR A WAFER PROCESSING SYSTEM
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Patent #:
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Issue Dt:
|
08/08/2000
|
Application #:
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08897914
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Filing Dt:
|
07/21/1997
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Title:
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MOTOR DRIVE ASSEMBLY FOR A SEMICONDUCTOR WAFER PROCESSING SYSTEM
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Patent #:
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Issue Dt:
|
04/04/2000
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Application #:
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08974089
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Filing Dt:
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11/19/1997
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Title:
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Patent #:
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Issue Dt:
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11/16/1999
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Application #:
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09056287
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Filing Dt:
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04/07/1998
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Title:
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Patent #:
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Issue Dt:
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11/09/1999
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Application #:
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09099309
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Filing Dt:
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06/18/1998
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Title:
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ALKALINE WATER-BASED SOLUTION FOR CLEANING METALLIZED MICROELECTRONIC
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Patent #:
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Issue Dt:
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05/16/2000
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Application #:
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09108162
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Filing Dt:
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06/30/1998
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Title:
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CROSS FLOW CENTRIFUGAL PROCESSOR
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09113440
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Filing Dt:
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07/10/1998
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Publication #:
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Pub Dt:
|
12/06/2001
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Title:
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CLEANING APPARATUS
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Patent #:
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Issue Dt:
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02/12/2002
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Application #:
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09135210
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Filing Dt:
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08/17/1998
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Title:
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Patent #:
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Issue Dt:
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03/12/2002
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Application #:
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09152238
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Filing Dt:
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09/11/1998
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Title:
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Patent #:
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11/27/2001
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09362157
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07/28/1999
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Title:
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WAFER CONTAINER CLEANING SYSTEM
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Patent #:
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Issue Dt:
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03/25/2003
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Application #:
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09372849
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Filing Dt:
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08/12/1999
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Title:
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FLUID HEATING SYSTEM FOR PROCESSING SEMICONDUCTOR MATERIALS
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Patent #:
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Issue Dt:
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06/25/2002
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Application #:
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09384077
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Filing Dt:
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08/26/1999
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Title:
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09384614
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Filing Dt:
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08/27/1999
|
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Title:
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PLASMA ETCH REACTOR AND METHOD FOR EMERGING FILMS
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Patent #:
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Issue Dt:
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09/19/2000
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Application #:
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09412873
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Filing Dt:
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10/05/1999
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Title:
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PLASMA ETCH SYSTEM
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Patent #:
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Issue Dt:
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03/13/2001
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Application #:
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09413622
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Filing Dt:
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10/06/1999
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Title:
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VAPOR ASSISTED ROTARY DRYING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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11/06/2001
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Application #:
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09436613
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Filing Dt:
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11/09/1999
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Title:
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A NON- CORROSIVE CLEANING METHOD FOR USE IN THE MANUFACTURE OF MICROELECTRONIC DEVICES
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Patent #:
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Issue Dt:
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11/26/2002
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Application #:
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09454814
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Filing Dt:
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12/03/1999
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Title:
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Patent #:
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Issue Dt:
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09/16/2003
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Application #:
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09455641
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Filing Dt:
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12/07/1999
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Title:
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PLASMA ETCH REACTOR AND METHOD
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Patent #:
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Issue Dt:
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01/01/2002
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Application #:
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09503784
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02/14/2000
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Title:
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Seal configuration for use with a motor drive assembly in a microelectronic workpiece processing system
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Patent #:
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12/10/2002
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09517387
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03/02/2000
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Title:
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METHOD AND APPARATUS FOR ETCHING A SEMICONDUCTOR WAFER WITH FEATURES HAVING VERTICAL SIDEWALLS
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Patent #:
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03/09/2004
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09536251
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03/27/2000
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Title:
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METHOD FOR TREATING THE SURFACE OF A WORKPIECE
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Patent #:
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09/10/2002
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09609879
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07/05/2000
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Title:
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Patent #:
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06/25/2002
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Application #:
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09610175
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Filing Dt:
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07/05/2000
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Title:
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Patent #:
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07/16/2002
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09611537
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07/07/2000
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DUAL CASSETTE CENTRIFUGAL PROCESSOR
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07/02/2002
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09611642
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07/07/2000
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Title:
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Patent #:
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03/22/2005
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09621028
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07/21/2000
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PROCESS AND APPARATUS FOR TREATING A WORKPIECE SUCH AS A SEMICONDUCTOR WAFER
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Patent #:
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09/28/2004
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09658395
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09/08/2000
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Title:
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07/15/2003
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09677925
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10/03/2000
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Patent #:
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08/14/2001
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09677929
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10/03/2000
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Title:
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07/31/2001
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09677934
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10/03/2000
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Title:
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Apparatus and method for processing the surface of a workpiece with ozone
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03/26/2002
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02/07/2001
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07/19/2001
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Title:
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Solution for cleaning metallized microelectronic workpieces and methods of using same
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05/13/2003
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03/05/2001
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01/03/2002
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DUAL DEGAS/COOL LOADLOCK CLUSTER TOOL
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12/14/2004
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03/19/2001
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10/18/2001
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12/23/2008
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04/09/2001
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01/23/2003
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08/05/2003
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04/18/2001
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11/22/2001
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08/10/2004
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06/13/2001
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10/18/2001
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10/21/2008
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06/22/2001
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03/28/2002
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12/24/2002
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08/14/2001
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05/02/2002
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06/24/2003
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08/14/2001
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02/21/2002
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06/14/2005
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01/09/2002
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08/01/2002
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01/16/2002
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06/06/2002
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04/24/2007
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07/17/2003
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02/17/2004
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06/14/2005
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10/03/2002
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12/09/2003
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12/11/2007
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12/14/2004
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11/30/2004
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01/04/2005
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11/06/2003
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11/16/2004
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04/21/2003
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11/06/2003
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02/20/2007
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05/23/2003
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11/25/2004
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07/29/2008
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09/18/2007
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10633839
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08/04/2003
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02/26/2004
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Title:
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SYSTEM FOR, AND METHOD OF, ETCHING A SURFACE ON A WAFER
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01/18/2005
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10681553
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10/07/2003
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04/15/2004
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Title:
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METHODS FOR CLEANING SEMICONDUCTOR SURFACES
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03/22/2005
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10692829
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10/23/2003
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04/29/2004
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METHODS FOR REMOVING METALLIC CONTAMINATION FROM WAFER CONTAINERS
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09/04/2007
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10859668
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06/03/2004
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11/04/2004
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PROCESS AND APPARATUS FOR TREATING A WORKPIECE USING OZONE
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08/26/2008
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10870173
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06/18/2004
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11/11/2004
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PROCESS AND APPARATUS FOR TREATING A WORKPIECE WITH GASES
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06/13/2006
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10917750
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08/12/2004
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01/20/2005
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METHODS FOR CLEANING WAFER CONTAINERS
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01/30/2007
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10937660
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09/09/2004
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03/09/2006
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SYSTEM AND METHOD FOR PROCESSING A WAFER INCLUDING STOP-ON-ALUMINA PROCESSING
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01/16/2007
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11005495
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12/06/2004
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06/23/2005
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PROCESSING A WORKPIECE USING WATER, A BASE, AND OZONE
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05/29/2007
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11087540
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03/23/2005
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07/28/2005
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PLASMA ETCH REACTOR AND METHOD
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05/27/2008
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11127052
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05/11/2005
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10/27/2005
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SYSTEM AND METHODS FOR POLISHING A WAFER
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04/21/2009
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12/05/2005
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06/07/2007
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APPARATUS AND METHOD FOR CLEANING AND DRYING A CONTAINER FOR SEMICONDUCTOR WORKPIECES
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01/12/2010
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03/14/2007
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07/05/2007
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DRY ETCH STOP PROCESS FOR ELIMINATING ELECTRICAL SHORTING IN MRAM DEVICE STRUCTURES
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11863046
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09/27/2007
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04/10/2008
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High-adhesive backside metallization
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08/19/2014
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03/25/2009
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10/01/2009
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04/08/2014
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03/25/2009
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10/01/2009
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06/07/2011
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09/02/2009
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01/28/2010
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07/09/2013
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12786238
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05/24/2010
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12/02/2010
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SPUTTER DEPOSITION OF CERMET RESISTOR FILMS WITH LOW TEMPERATURE COEFFICIENT OF RESISTANCE
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