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Reel/Frame:013057/0093   Pages: 3
Recorded: 07/03/2002
Conveyance: CERTIFICATE OF AMENDMENT
Total properties: 1
1
Patent #:
Issue Dt:
10/15/2002
Application #:
09740125
Filing Dt:
12/19/2000
Publication #:
Pub Dt:
06/20/2002
Title:
SYSTEM AND METHOD FOR IMPROVED THROUGHPUT OF SEMICONDUCTOR WAFER PROCESSING
Assignor
1
Exec Dt:
01/01/2001
Assignee
1
6000 TECHNOLOGY BLVD.
SANDSTRON, VIRGINIA 23150
Correspondence name and address
SIEMENS CORPORTION
ELSA KELLER
186 WOOD AVENUE SOUTH
INTELLECTUAL PROPERTY DEPARTMENT
ISELIN, NJ 08830

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