Patent Assignment Details
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| Reel/Frame: | 014587/0094 | |
| Pages: | 2 |
| | Recorded: | 05/10/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/26/2005
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Application #:
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10419101
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Filing Dt:
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04/21/2003
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Publication #:
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Pub Dt:
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04/08/2004
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Title:
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DUV SCANNER LINEWIDTH CONTROL BY MASK ERROR FACTOR COMPENSATION
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Assignees
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| 77 DANBURY ROAD |
| WILTON, CONNECTICUT 06897 |
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| 77 DANBURY ROAD |
| WILTON, CONNECTICUT 06897 |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN & FOX PLLC
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1100 NEW YORK AVENUE, N.W.
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WASHINGTON, DC 20005
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