Patent Assignment Details
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| Reel/Frame: | 012711/0098 | |
| Pages: | 3 |
| | Recorded: | 03/18/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/03/2006
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Application #:
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10101076
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Filing Dt:
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03/18/2002
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Publication #:
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Pub Dt:
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08/07/2003
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Title:
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METHOD FOR WET ETCHING OF HIGH K THIN FILM AT LOW TEMPERATURE
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Assignees
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| NO. 13, TA-TUNG RD. |
| HSINCHU INDUSTRIAL PARK, TAIWAN 300 R |
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| 121 PARK AVE, 3 SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 R |
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Correspondence name and address
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OPPENHEIMER, WOLFF & DONNELLY LLP
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BRIAN COLEMAN
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P.O. BOX 10356
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PALO ALTO, CALIFORNIA 94303
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