Patent Assignment Details
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| Reel/Frame: | 026073/0104 | |
| Pages: | 4 |
| | Recorded: | 04/04/2011 | | |
| Attorney Dkt #: | P0571 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/07/2014
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Application #:
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13079143
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Filing Dt:
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04/04/2011
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Publication #:
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Pub Dt:
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05/17/2012
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Title:
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METHOD AND APPAATUS FOR IMPROVING THE TEMPERATURE STABILITY AND MINIMIZING THE NOISE OF THE ENVIRONMENT THAT ENCLOSES AN INTERFEROMETRIC MEASURING SYSTEM
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Assignee
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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DEBORAH WENOCUR/KLA TENCOR
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4057 AMARANTA AVENUE
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PALO ALTO, CA 94306
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