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Total properties:
24
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Patent #:
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|
Issue Dt:
|
06/11/2002
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Application #:
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09653228
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Filing Dt:
|
08/31/2000
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Title:
|
METHODS OF FABRICATING A MEMORY DEVICE
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Patent #:
|
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Issue Dt:
|
07/22/2003
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Application #:
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09998811
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Filing Dt:
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11/30/2001
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Publication #:
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Pub Dt:
|
06/05/2003
| | | | |
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Title:
|
PLASMA COIL
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Patent #:
|
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Issue Dt:
|
09/06/2005
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Application #:
|
10261368
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Filing Dt:
|
09/30/2002
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Publication #:
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Pub Dt:
|
04/01/2004
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Title:
|
SEMICONDUCTOR WORKPIECE APPARATUS
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|
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Patent #:
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Issue Dt:
|
04/26/2005
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Application #:
|
10302794
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Filing Dt:
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11/22/2002
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Publication #:
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Pub Dt:
|
06/03/2004
| | | | |
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Title:
|
HIGH SELECTIVITY SLURRY DELIVERY SYSTEM
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Patent #:
|
NONE
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Issue Dt:
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Application #:
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10693089
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Filing Dt:
|
10/24/2003
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Publication #:
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Pub Dt:
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04/28/2005
| | | | |
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Title:
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Polish pad tool
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Patent #:
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Issue Dt:
|
07/29/2008
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Application #:
|
10873557
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Filing Dt:
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06/22/2004
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Publication #:
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Pub Dt:
|
12/22/2005
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Title:
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APPARATUS AND METHOD FOR BREAKING IN MULTIPLE PAD CONDITIONING DISKS FOR USE IN A CHEMICAL MECHANICAL POLISHING SYSTEM
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Patent #:
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Issue Dt:
|
08/22/2006
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Application #:
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10873558
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Filing Dt:
|
06/22/2004
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Publication #:
|
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Pub Dt:
|
12/22/2005
| | | | |
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Title:
|
OFF-LINE TOOL FOR BREAKING IN MULTIPLE PAD CONDITIONING DISKS USED IN A CHEMICAL MECHANICAL POLISHING SYSTEM
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|
|
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Patent #:
|
NONE
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Issue Dt:
|
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Application #:
|
10993136
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Filing Dt:
|
11/19/2004
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Publication #:
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Pub Dt:
|
05/25/2006
| | | | |
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Title:
|
Plasma reaction chamber and captive silicon electrode plate for processing semiconductor wafers
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|
|
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Patent #:
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Issue Dt:
|
02/10/2015
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Application #:
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11115065
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Filing Dt:
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04/25/2005
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Publication #:
|
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Pub Dt:
|
11/10/2005
| | | | |
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Title:
|
HIGH SELECTIVITY SLURRY DELIVERY SYSTEM
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|
|
|
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Patent #:
|
|
Issue Dt:
|
12/04/2012
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Application #:
|
11145617
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Filing Dt:
|
06/06/2005
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Publication #:
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Pub Dt:
|
10/20/2005
| | | | |
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Title:
|
SEMICONDUCTOR WORKPIECE APPARATUS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
12/22/2009
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Application #:
|
11262028
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Filing Dt:
|
10/28/2005
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|
Publication #:
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Pub Dt:
|
05/03/2007
| | | | |
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Title:
|
FUZZY LOGIC SYSTEM FOR PROCESS CONTROL IN CHEMICAL MECHANICAL POLISHING
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|
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Patent #:
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Issue Dt:
|
07/20/2010
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Application #:
|
11375992
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Filing Dt:
|
03/15/2006
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Publication #:
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Pub Dt:
|
09/20/2007
| | | | |
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Title:
|
RUPTURE RESISTANT PLASMA TUBE
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|
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Patent #:
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Issue Dt:
|
05/13/2008
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Application #:
|
11507360
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Filing Dt:
|
08/21/2006
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Publication #:
|
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Pub Dt:
|
03/22/2007
| | | | |
|
Title:
|
OFF-LINE TOOL FOR BREAKING IN MULTIPLE PAD CONDITIONING DISKS USED IN A CHEMICAL MECHANICAL POLISHING SYSTEM
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|
|
|
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Patent #:
|
|
Issue Dt:
|
02/26/2013
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Application #:
|
11520425
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Filing Dt:
|
09/13/2006
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Publication #:
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Pub Dt:
|
03/27/2008
| | | | |
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Title:
|
SELECTIVE IMAGING THROUGH DUAL PHOTORESIST LAYERS
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Patent #:
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Issue Dt:
|
02/03/2009
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Application #:
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11520538
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Filing Dt:
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09/13/2006
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Publication #:
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Pub Dt:
|
03/13/2008
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR HAZE CONTROL IN SEMICONDUCTOR PROCESSES
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Patent #:
|
NONE
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Issue Dt:
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|
Application #:
|
11805100
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Filing Dt:
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05/22/2007
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Publication #:
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Pub Dt:
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11/27/2008
| | | | |
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Title:
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Hot edge ring apparatus and method for increased etch rate uniformity and reduced polymer buildup
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Patent #:
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Issue Dt:
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11/12/2013
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Application #:
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12806464
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Filing Dt:
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08/13/2010
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Publication #:
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Pub Dt:
|
02/16/2012
| | | | |
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Title:
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Apparatus for agitating and evacuating byproduct dust from a semiconductor processing chamber
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Patent #:
|
NONE
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Issue Dt:
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Application #:
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13011052
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Filing Dt:
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01/21/2011
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Publication #:
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Pub Dt:
|
07/26/2012
| | | | |
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Title:
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PARALLEL MULTI WAFER AXIAL SPIN CLEAN PROCESSING USING SPIN CASSETTE INSIDE MOVABLE PROCESS CHAMBER
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Patent #:
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Issue Dt:
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11/19/2013
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Application #:
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13230572
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Filing Dt:
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09/12/2011
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Publication #:
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Pub Dt:
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03/14/2013
| | | | |
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Title:
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REMOVABLE TRANSPARENT MEMBRANE FOR A PELLICLE
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Patent #:
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Issue Dt:
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11/18/2014
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Application #:
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13246788
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Filing Dt:
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09/27/2011
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Publication #:
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Pub Dt:
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03/28/2013
| | | | |
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Title:
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METHOD AND APPARATUS FOR FABRICATION OF CARBON NANOTUBES USING AN ELECTROSTATICALLY CHARGED SUBSTRATE AND LINER
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Patent #:
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Issue Dt:
|
08/18/2015
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Application #:
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13439087
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Filing Dt:
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04/04/2012
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Publication #:
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Pub Dt:
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10/10/2013
| | | | |
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Title:
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MULTI-LEVEL STACK HAVING MULTI-LEVEL CONTACT AND METHOD
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Patent #:
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Issue Dt:
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07/05/2016
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Application #:
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13735866
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Filing Dt:
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01/07/2013
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Publication #:
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Pub Dt:
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07/10/2014
| | | | |
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Title:
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SEMICONDUCTOR MANUFACTURING EQUIPMENT WITH TRACE ELEMENTS FOR IMPROVED DEFECT TRACING AND METHODS OF MANUFACTURE
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Patent #:
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Issue Dt:
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03/15/2016
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Application #:
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13738629
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Filing Dt:
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01/10/2013
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Publication #:
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Pub Dt:
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07/10/2014
| | | | |
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Title:
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FORMING VIAS AND TRENCHES FOR SELF-ALIGNED CONTACTS IN A SEMICONDUCTOR STRUCTURE
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Patent #:
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Issue Dt:
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02/18/2020
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Application #:
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14828449
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Filing Dt:
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08/17/2015
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Publication #:
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Pub Dt:
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12/10/2015
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Title:
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MULTI-LEVEL STACK HAVING MULTI-LEVEL CONTACT AND METHOD
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