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Patent Assignment Details
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Reel/Frame:055596/0105   Pages: 3
Recorded: 03/15/2021
Attorney Dkt #:35470-48557/US
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/27/2023
Application #:
17276391
Filing Dt:
03/15/2021
Publication #:
Pub Dt:
02/10/2022
Title:
VACUUM PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
Assignor
1
Exec Dt:
03/10/2021
Assignee
1
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
DOHYUN AHN
FENWICK & WEST LLP
801 CALIFORNIA STREET
MOUNTAIN VIEW, CA 94041

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