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Reel/Frame:	024898/0109			Pages:	9
		Recorded:	08/27/2010
Attorney Dkt #:	658302800000
Conveyance:	CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).

Total properties: 64

Patent #:	5761236	Issue Dt:	06/02/1998	Application #:	08687793	Filing Dt:	07/18/1996
Title:	LASER FOR GENERATING NARROW-BAND RADIATION

Patent #:	6005880	Issue Dt:	12/21/1999	Application #:	08822451	Filing Dt:	03/21/1997
Title:	PRECISION VARIABLE DELAY USING SATURABLE INDUCTORS

Patent #:	6061382	Issue Dt:	05/09/2000	Application #:	09073070	Filing Dt:	05/04/1998
Title:	LASER SYSTEM AND METHOD FOR NARROW SPECTRAL LINEWIDTH THROUGH WAVEFRONT CURVATURE COMPENSATION

Patent #:	6002697	Issue Dt:	12/14/1999	Application #:	09139214	Filing Dt:	08/24/1998
Title:	DIODE PUMPED LASER WITH FREQUENCY CONVERSION INTO UV AND DUV RANGE

Patent #:	6014206	Issue Dt:	01/11/2000	Application #:	09162424	Filing Dt:	09/28/1998
Title:	STABILIZATION OF ANGULAR AND LATERAL LASER BEAM POSITION

Patent #:	6393037	Issue Dt:	05/21/2002	Application #:	09244554	Filing Dt:	02/03/1999
Title:	WAVELENGTH SELECTOR FOR LASER WITH ADJUSTABLE ANGULAR DISPERSION

Patent #:	6157662	Issue Dt:	12/05/2000	Application #:	09317526	Filing Dt:	05/24/1999
Title:	FZ (157NM) LASER EMPLOYING NEON AS THE BUFFER GAS

Patent #:	6154470	Issue Dt:	11/28/2000	Application #:	09317527	Filing Dt:	05/24/1999
Title:	MOLECULAR FLUORINE (F2) LASER WITH NARROW SPECTRAL LINEWIDTH

Patent #:	6345065	Issue Dt:	02/05/2002	Application #:	09317695	Filing Dt:	05/24/1999
Title:	F2-LASER WITH LINE SELECTION

Patent #:	6212214	Issue Dt:	04/03/2001	Application #:	09379034	Filing Dt:	08/23/1999
Title:	PERFORMANCE CONTROL SYSTEM AND METHOD FOR GAS DISCHARGE LASERS

Patent #:	6490307	Issue Dt:	12/03/2002	Application #:	09447882	Filing Dt:	11/23/1999
Title:	METHOD AND PROCEDURE TO AUTOMATICALLY STABILIZE EXCIMER LASER OUTPUT PARAMETERS

Patent #:	6298080	Issue Dt:	10/02/2001	Application #:	09452353	Filing Dt:	12/01/1999
Title:	NARROW BAND EXCIMER OR MOLECULAR FLUORINE LASER WITH ADJUSTABLE BANDWIDTH

Patent #:	6466599	Issue Dt:	10/15/2002	Application #:	09453670	Filing Dt:	12/03/1999
Title:	DISCHARGE UNIT FOR A HIGH REPETITION RATE EXCIMER OR MOLECULAR FLUORINE LASER

Patent #:	6243405	Issue Dt:	06/05/2001	Application #:	09484818	Filing Dt:	01/18/2000
Title:	Very Stable Excimer Or Molecular Fluorine Laser

Patent #:	6819698	Issue Dt:	11/16/2004	Application #:	09512417	Filing Dt:	02/24/2000
Title:	ENERGY MONITOR FOR F2 MOLECULAR FLUORINE LASER AND METHOD OF ENERGY STABILIZATION

Patent #:	6714577	Issue Dt:	03/30/2004	Application #:	09513025	Filing Dt:	02/25/2000
Title:	ENERGY STABILIZED GAS DISCHARGE LASER

Patent #:	6456643	Issue Dt:	09/24/2002	Application #:	09532276	Filing Dt:	03/21/2000
Title:	SURFACE PREIONIZATION FOR GAS LASERS

Patent #:	6389045	Issue Dt:	05/14/2002	Application #:	09550558	Filing Dt:	04/17/2000
Title:	OPTICAL PULSE STRETCHING AND SMOOTHING FOR ARF AND F2 LITHOGRAPHY EXCIMER LASERS

Patent #:	6898216	Issue Dt:	05/24/2005	Application #:	09574921	Filing Dt:	05/19/2000
Title:	REDUCTION OF LASER SPECKLE IN PHOTOLITHOGRAPHY BY CONTROLLED DISRUPTION OF SPATIAL COHERENCE OF LASER BEAM

Patent #:	6546036	Issue Dt:	04/08/2003	Application #:	09587996	Filing Dt:	06/06/2000
Title:	ROOF CONFIGURATION FOR LASER DISCHARGE ELECTRODES

Patent #:	6795473	Issue Dt:	09/21/2004	Application #:	09602184	Filing Dt:	06/22/2000
Title:	NARROW BAND EXCIMER LASER WITH A PRISM-GRATING AS LINE-NARROWING OPTICAL ELEMENT

Patent #:	6476987	Issue Dt:	11/05/2002	Application #:	09629256	Filing Dt:	07/31/2000
Title:	Excimer laser with line narrowing

Patent #:	6785316	Issue Dt:	08/31/2004	Application #:	09640595	Filing Dt:	08/17/2000
Title:	EXCIMER OR MOLECULAR LASER WITH OPTIMIZED SPECTRAL PURITY

Patent #:	6667804	Issue Dt:	12/23/2003	Application #:	09686483	Filing Dt:	10/10/2000
Title:	TEMPERATURE COMPENSATION METHOD FOR WAVEMETERS

Patent #:	6330267	Issue Dt:	12/11/2001	Application #:	09718805	Filing Dt:	11/22/2000
Title:	Performance control system and method for gas discharge lasers

Patent #:	6795456	Issue Dt:	09/21/2004	Application #:	09733874	Filing Dt:	12/08/2000
Publication #:	US20010030981	Pub Dt:	10/18/2001
Title:	157 NM LASER SYSTEM AND METHOD FOR MULTI-LAYER SEMICONDUCTOR FAILURE ANALYSIS

Patent #:	6389052	Issue Dt:	05/14/2002	Application #:	09734459	Filing Dt:	12/11/2000
Publication #:	US20010012309	Pub Dt:	08/09/2001
Title:	LASER GAS REPLENISHMENT METHOD

Patent #:	7075963	Issue Dt:	07/11/2006	Application #:	09771366	Filing Dt:	01/25/2001
Publication #:	US20020012374	Pub Dt:	01/31/2002
Title:	TUNABLE LASER WITH STABILIZED GRATING

Patent #:	6498803	Issue Dt:	12/24/2002	Application #:	09775778	Filing Dt:	02/01/2001
Publication #:	US20010028669	Pub Dt:	10/11/2001
Title:	NARROW BAND EXCIMER OR MOLECULAR FLUORINE LASER WITH ADJUSTABLE BANDWIDTH

Patent #:	6487228	Issue Dt:	11/26/2002	Application #:	09776589	Filing Dt:	02/01/2001
Publication #:	US20010009560	Pub Dt:	07/26/2001
Title:	NARROW BAND EXCIMER OR MOLECULAR FLUORINE LASER WITH ADJUSTABLE BANDWIDTH

Patent #:	6570901	Issue Dt:	05/27/2003	Application #:	09791430	Filing Dt:	02/22/2001
Publication #:	US20020001330	Pub Dt:	01/03/2002
Title:	EXCIMER OR MOLECULAR FLUORINE LASER HAVING LENGTHENED ELECTRODES

Patent #:	6847671	Issue Dt:	01/25/2005	Application #:	09823298	Filing Dt:	03/29/2001
Title:	BLOWER FOR GAS LASER

Patent #:	6414978	Issue Dt:	07/02/2002	Application #:	09826296	Filing Dt:	04/03/2001
Publication #:	US20010030986	Pub Dt:	10/18/2001
Title:	DISCHARGE UNIT FOR A HIGH REPETITION RATE EXCIMER OR MOLECULAR FLUORINE LASER

Patent #:	6430205	Issue Dt:	08/06/2002	Application #:	09826372	Filing Dt:	04/03/2001
Publication #:	US20010033594	Pub Dt:	10/25/2001
Title:	DISCHARGE UNIT FOR A HIGH REPETITION RATE EXCIMER OR MOLECULAR FLUORINE LASER

Patent #:	6834066	Issue Dt:	12/21/2004	Application #:	09838715	Filing Dt:	04/18/2001
Publication #:	US20020012371	Pub Dt:	01/31/2002
Title:	STABILIZATION TECHNIQUE FOR HIGH REPETITION RATE GAS DISCHARGE LASERS

Patent #:	6862307	Issue Dt:	03/01/2005	Application #:	09858147	Filing Dt:	05/14/2001
Publication #:	US20020015430	Pub Dt:	02/07/2002
Title:	ELECTRICAL EXCITATION CIRCUIT FOR A PULSED GAS LASER

Patent #:	6807205	Issue Dt:	10/19/2004	Application #:	09903425	Filing Dt:	07/10/2001
Title:	PRECISE MONITOR ETALON CALIBRATION TECHNIQUE

Patent #:	6614828	Issue Dt:	09/02/2003	Application #:	09920008	Filing Dt:	07/31/2001
Title:	WAVELENGTH SELECTOR FOR LASER WITH ADJUSTABLE ANGULAR DISPERSION

Patent #:	6608852	Issue Dt:	08/19/2003	Application #:	09938329	Filing Dt:	08/21/2001
Publication #:	US20020027937	Pub Dt:	03/07/2002
Title:	GAIN MODULE FOR DIODE-PUMPED SOLID STATE LASER AND AMPLIFIER

Patent #:	6801561	Issue Dt:	10/05/2004	Application #:	09960875	Filing Dt:	09/21/2001
Publication #:	US20020057723	Pub Dt:	05/16/2002
Title:	LASER SYSTEM AND METHOD FOR SPECTRAL NARROWING THROUGH WAVEFRONT CORRECTION

Patent #:	6868106	Issue Dt:	03/15/2005	Application #:	10001954	Filing Dt:	10/31/2001
Title:	RESONATOR OPTICS FOR HIGH POWER UV LASERS

Patent #:	6856638	Issue Dt:	02/15/2005	Application #:	10035351	Filing Dt:	10/19/2001
Publication #:	US20020141471	Pub Dt:	10/03/2002
Title:	RESONATOR ARRANGEMENT FOR BANDWIDTH CONTROL

Patent #:	6792023	Issue Dt:	09/14/2004	Application #:	10112660	Filing Dt:	03/28/2002
Title:	METHOD AND APPARATUS FOR REDUCTION OF SPECTRAL FLUCTUATIONS

Patent #:	6504861	Issue Dt:	01/07/2003	Application #:	10114184	Filing Dt:	04/01/2002
Publication #:	US20020101901	Pub Dt:	08/01/2002
Title:	LASER GAS REPLENISHMENT METHOD

Patent #:	6490308	Issue Dt:	12/03/2002	Application #:	10114620	Filing Dt:	04/01/2002
Publication #:	US20020101902	Pub Dt:	08/01/2002
Title:	LASER GAS REPLENISHMENT METHOD

Patent #:	6493370	Issue Dt:	12/10/2002	Application #:	10121292	Filing Dt:	04/12/2002
Publication #:	US20020110174	Pub Dt:	08/15/2002
Title:	LASER GAS REPLENISHMENT METHOD

Patent #:	6834069	Issue Dt:	12/21/2004	Application #:	10162115	Filing Dt:	06/03/2002
Title:	MOLECULAR FLUORINE LASER WITH INTRACAVITY POLARIZATION ENHANCER

Patent #:	6768765	Issue Dt:	07/27/2004	Application #:	10163098	Filing Dt:	06/04/2002
Title:	HIGH POWER EXCIMER OR MOLECULAR FLUORINE LASER SYSTEM

Patent #:	6822977	Issue Dt:	11/23/2004	Application #:	10165767	Filing Dt:	06/06/2002
Title:	METHOD AND APPARATUS FOR COMPENSATION OF BEAM PROPERTY DRIFTS DETECTED BY MEASUREMENT SYSTEMS OUTSIDE OF AN EXCIMER LASER

Patent #:	6839375	Issue Dt:	01/04/2005	Application #:	10236036	Filing Dt:	09/04/2002
Title:	ON-LINE QUALITY CONTROL OF THE KEY OPTICAL COMPONENTS IN LITHOGRAPHY LASERS USING LASER INDUCED FLUORESCENCE

Patent #:	6965624	Issue Dt:	11/15/2005	Application #:	10338779	Filing Dt:	01/06/2003
Publication #:	US20040252740	Pub Dt:	12/16/2004
Title:	LASER GAS REPLENISHMENT METHOD

Patent #:	7006541	Issue Dt:	02/28/2006	Application #:	10354945	Filing Dt:	01/29/2003
Publication #:	US20030210715	Pub Dt:	11/13/2003
Title:	ABSOLUTE WAVELENGTH CALIBRATION OF LITHOGRAPHY LASER USING MULTIPLE ELEMENT OR TANDEM SEE THROUGH HOLLOW CATHODE LAMP

Patent #:	6970492	Issue Dt:	11/29/2005	Application #:	10438240	Filing Dt:	05/14/2003
Publication #:	US20030219057	Pub Dt:	11/27/2003
Title:	DUV AND VUV LASER WITH ON-LINE PULSE ENERGY MONITOR

Patent #:	6993052	Issue Dt:	01/31/2006	Application #:	10441768	Filing Dt:	05/20/2003
Publication #:	US20040004987	Pub Dt:	01/08/2004
Title:	SYSTEM AND METHOD FOR DELAY COMPENSATION FOR A PULSED LASER

Patent #:	7308013	Issue Dt:	12/11/2007	Application #:	10699763	Filing Dt:	11/03/2003
Publication #:	US20050031004	Pub Dt:	02/10/2005
Title:	EXCIMER OR MOLECULAR FLUORINE LASER SYSTEM WITH PRECISION TIMING

Patent #:	6999492	Issue Dt:	02/14/2006	Application #:	10713583	Filing Dt:	11/14/2003
Publication #:	US20050169341	Pub Dt:	08/04/2005
Title:	REDUCED-MAINTENANCE EXCIMER LASER WITH OIL-FREE SOLID STATE PULSER

Patent #:	7079565	Issue Dt:	07/18/2006	Application #:	10727718	Filing Dt:	12/04/2003
Publication #:	US20040131100	Pub Dt:	07/08/2004
Title:	SYSTEMS AND METHODS UTILIZING LASER DISCHARGE ELECTRODES WITH CERAMIC SPOILERS

Patent #:	6987790	Issue Dt:	01/17/2006	Application #:	10776137	Filing Dt:	02/11/2004
Publication #:	US20040202219	Pub Dt:	10/14/2004
Title:	EXCIMER OR MOLECULAR FLUORINE LASER WITH SEVERAL DISCHARGE CHAMBERS

Patent #:	7158553	Issue Dt:	01/02/2007	Application #:	10776404	Filing Dt:	02/11/2004
Publication #:	US20040179571	Pub Dt:	09/16/2004
Title:	MASTER OSCILLATOR/POWER AMPLIFIER EXCIMER LASER SYSTEM WITH PULSE ENERGY AND POINTING CONTROL

Patent #:	7164703	Issue Dt:	01/16/2007	Application #:	10777434	Filing Dt:	02/12/2004
Publication #:	US20040202211	Pub Dt:	10/14/2004
Title:	TEMPERATURE CONTROL SYSTEMS FOR EXCIMER LASERS

Patent #:	7366213	Issue Dt:	04/29/2008	Application #:	10847071	Filing Dt:	05/17/2004
Publication #:	US20040240507	Pub Dt:	12/02/2004
Title:	MOPA EXCIMER OR MOLECULAR FLUORINE LASER SYSTEM WITH IMPROVED SYNCHRONIZATION

Patent #:	7184204	Issue Dt:	02/27/2007	Application #:	10881103	Filing Dt:	06/30/2004
Publication #:	US20050002425	Pub Dt:	01/06/2005
Title:	MASTER-OSCILLATOR POWER-AMPLIFIER (MOPA) EXCIMER OR MOLECULAR FLUORINE LASER SYSTEM WITH LONG OPTICS LIFETIME

Patent #:	7266137	Issue Dt:	09/04/2007	Application #:	11263626	Filing Dt:	10/31/2005
Publication #:	US20060056478	Pub Dt:	03/16/2006
Title:	LASER GAS REPLENISHMENT METHOD

Patent #:	7245420	Issue Dt:	07/17/2007	Application #:	11654780	Filing Dt:	01/18/2007
Publication #:	US20070115535	Pub Dt:	05/24/2007
Title:	MASTER-OSCILLATOR POWER-AMPLIFIER (MOPA) EXCIMER OR MOLECULAR FLUORINE LASER SYSTEM WITH LONG OPTICS LIFETIME

Assignor

LAMBDA PHYSIK AG

Exec Dt:

06/09/2000

Assignee

COHERENT LAMBDA PHYSIK GMBH

HANS-BOECKLER-STRASSE 12

GOETTINGEN, GERMANY D-37079

Correspondence name and address
	MICHAEL A. STALLMAN
	MORRISON & FOERSTER LLP
	425 MARKET STREET
	SAN FRANCISCO, CA 94105

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