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Patent Assignment Details

NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:	005424/0111			Pages:	116
		Recorded:	08/09/1990
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST.

Total properties: 94

Patent #:	3748015	Issue Dt:		Application #:	05154948	Filing Dt:
Title:

Patent #:	3951546	Issue Dt:		Application #:	05509598	Filing Dt:
Title:

Patent #:	4011011	Issue Dt:		Application #:	05534465	Filing Dt:
Title:

Patent #:	4011011	Issue Dt:		Application #:	05534465	Filing Dt:
Title:

Patent #:	RE30315	Issue Dt:	06/24/1980	Application #:	05916278	Filing Dt:	06/16/1978
Title:	PRECISION BASE MERCURY VAPOR LAMP

Patent #:	4202623	Issue Dt:	05/13/1980	Application #:	06001991	Filing Dt:	01/08/1979
Title:	TEMPERATURE COMPENSATED ALIGNMENT SYSTEM

Patent #:	4353087	Issue Dt:	10/05/1982	Application #:	06019964	Filing Dt:	03/12/1979
Title:	AUTOMATIC MASK ALIGNMENT

Patent #:	4353087	Issue Dt:	10/05/1982	Application #:	06019964	Filing Dt:	03/12/1979
Title:	AUTOMATIC MASK ALIGNMENT

Patent #:	4342503	Issue Dt:	08/03/1982	Application #:	06082699	Filing Dt:	10/09/1979
Title:	CATADIOPTRIC TELESCOPES

Patent #:	4331390	Issue Dt:	05/25/1982	Application #:	06082814	Filing Dt:	10/09/1979
Title:	MONOCENTRIC OPTICAL SYSTEMS

Patent #:	4272152	Issue Dt:	06/09/1981	Application #:	06084745	Filing Dt:	10/15/1979
Title:	UNIT MAGNIFICATION RELAY SYSTEMS

Patent #:	4290384	Issue Dt:	09/22/1981	Application #:	06135042	Filing Dt:	03/28/1980
Title:	COATING APPARATUS

Patent #:	4335313	Issue Dt:	06/15/1982	Application #:	06149106	Filing Dt:	05/12/1980
Title:	METHOD AND APPARATUS FOR ALIGNING AN OPAQUE MASK WITH AN INTEGRATED CIRCUIT WAFER

Patent #:	4453106	Issue Dt:	06/05/1984	Application #:	06171681	Filing Dt:	07/24/1980
Title:	COMPRESSION BASE LAMP

Patent #:	4362384	Issue Dt:	12/07/1982	Application #:	06261314	Filing Dt:	05/01/1981
Title:	MEANS FOR PROVIDING UNIFORM ILLUMINATION TO A LIGHT SENSITIVE ELEMENT

Patent #:	4362384	Issue Dt:	12/07/1982	Application #:	06261314	Filing Dt:	05/01/1981
Title:	MEANS FOR PROVIDING UNIFORM ILLUMINATION TO A LIGHT SENSITIVE ELEMENT

Patent #:	4390929	Issue Dt:	06/28/1983	Application #:	06262561	Filing Dt:	05/11/1981
Title:	PRECISE LAMP POSITIONER

Patent #:	4693569	Issue Dt:	09/15/1987	Application #:	06308647	Filing Dt:	10/05/1981
Title:	METHOD AND APPARATUS FOR OPTICAL SYSTEM ADJUSTMENTS

Patent #:	4425038	Issue Dt:	01/10/1984	Application #:	06312488	Filing Dt:	10/19/1981
Title:	TECHNIQUE TO MODIFY WAFER GEOMETRY

Patent #:	4437760	Issue Dt:	03/20/1984	Application #:	06327862	Filing Dt:	12/07/1981
Title:	REUSABLE ELECTRICAL OVERLAY MEASUREMENT CIRCUIT AND PROCESS

Patent #:	4466073	Issue Dt:	08/14/1984	Application #:	06371402	Filing Dt:	04/26/1982
Title:	WAFER PREALIGNER USING PULSED VACUUM SPINNERS

Patent #:	4469414	Issue Dt:	09/04/1984	Application #:	06383683	Filing Dt:	06/01/1982
Title:	RESTRICTIVE OFF-AVIS FIELD OPTICAL SYSTEM

Patent #:	4504144	Issue Dt:	03/12/1985	Application #:	06395414	Filing Dt:	07/06/1982
Title:	SIMPLE ELECTROMECHANICAL TILT AND FOCUS DEVICE

Patent #:	4493097	Issue Dt:	01/08/1985	Application #:	06412461	Filing Dt:	08/30/1982
Title:	ELECTRON GUN ASSEMBLY

Patent #:	4530565	Issue Dt:	07/23/1985	Application #:	06450952	Filing Dt:	12/20/1982
Title:	OPTICAL TRANSFORMER USING CURVED STRIP WAVEGUIDES TO ACHIEVE NEARLY UNCHANGED F/NUMBER

Patent #:	4549084	Issue Dt:	10/22/1985	Application #:	06451900	Filing Dt:	12/21/1982
Title:	ALIGNMENT AND FOCUSING SYSTEM FOR A SCANNING MASK ALIGNER

Patent #:	4465759	Issue Dt:	08/14/1984	Application #:	06466268	Filing Dt:	02/14/1983
Title:	METHOD OF FABRICATING A PELLICLE COVER FOR PROJECTION PRINTING SYSTEM

Patent #:	4545683	Issue Dt:	10/08/1985	Application #:	06470426	Filing Dt:	02/28/1983
Title:	WAFER ALIGNMENT DEVICE

Patent #:	4538105	Issue Dt:	08/27/1985	Application #:	06489641	Filing Dt:	04/28/1983
Title:	OVERLAY TEST WAFER

Patent #:	4475811	Issue Dt:	10/09/1984	Application #:	06489664	Filing Dt:	04/28/1983
Title:	OVERLAY TEST MEASUREMENT SYSTEMS

Patent #:	4578590	Issue Dt:	03/25/1986	Application #:	06490614	Filing Dt:	05/02/1983
Title:	CONTINUOUS ALIGNMENT TARGET PATTERN AND SIGNAL PROCESSING

Patent #:	4506204	Issue Dt:	03/19/1985	Application #:	06502993	Filing Dt:	06/10/1983
Title:	ELECTRO-MAGENTIC APPARATUS

Patent #:	4507597	Issue Dt:	03/26/1985	Application #:	06502995	Filing Dt:	06/10/1983
Title:	ELECTRO-MAGNETIC ALIGNMENT ASSEMBLIES

Patent #:	4485339	Issue Dt:	11/27/1984	Application #:	06502997	Filing Dt:	06/10/1983
Title:	ELECTRO-MAGNETIC ALIGNMENT DEVICE

Patent #:	4506205	Issue Dt:	03/19/1985	Application #:	06502998	Filing Dt:	06/10/1983
Title:	ELECTRO-MAGNETIC ALIGMENT APPARATUS

Patent #:	4530635	Issue Dt:	07/23/1985	Application #:	06504718	Filing Dt:	06/15/1983
Title:	WAFER TRANSFERRING CHUCK ASSEMBLY

Patent #:	4547446	Issue Dt:	10/15/1985	Application #:	06505591	Filing Dt:	06/20/1983
Title:	MOTION MEASUREMENT AND ALIGNMENT METHOD AND APPARATUS

Patent #:	4606643	Issue Dt:	08/19/1986	Application #:	06505592	Filing Dt:	06/20/1983
Title:	FINE ALIGNMENT SYSTEM

Patent #:	4579616	Issue Dt:	04/01/1986	Application #:	06551224	Filing Dt:	11/14/1983
Title:	METHOD OF FABRICATION OF AN OPTICALLY FLAT MEMBRANE

Patent #:	4588293	Issue Dt:	05/13/1986	Application #:	06560679	Filing Dt:	12/12/1983
Title:	METHOD AND APPARATUS FOR INSPECTING PHOTOMASKS TO DETECT DEFECTS

Patent #:	4553311	Issue Dt:	11/19/1985	Application #:	06564266	Filing Dt:	12/22/1983
Title:	CHUCK HANDLING DEVICE

Patent #:	4516852	Issue Dt:	05/14/1985	Application #:	06568764	Filing Dt:	01/06/1984
Title:	METHOD AND APPARATUS FOR MEASURING INTENSITY VARIATION IN A LIGHT SOURCE

Patent #:	4516852	Issue Dt:	05/14/1985	Application #:	06568764	Filing Dt:	01/06/1984
Title:	METHOD AND APPARATUS FOR MEASURING INTENSITY VARIATION IN A LIGHT SOURCE

Patent #:	4539695	Issue Dt:	09/03/1985	Application #:	06568775	Filing Dt:	01/06/1984
Title:	X-RAY LITHOGRAPHY SYSTEM

Patent #:	4534047	Issue Dt:	08/06/1985	Application #:	06568776	Filing Dt:	01/06/1984
Title:	MASK RING ASSEMBLY FOR X-RAY LITHOGRAPHY

Patent #:	4584699	Issue Dt:	04/22/1986	Application #:	06568777	Filing Dt:	01/06/1984
Title:	X-RAY ANODE ASSEMBLY

Patent #:	4610020	Issue Dt:	09/02/1986	Application #:	06568778	Filing Dt:	01/06/1984
Title:	X-RAY MASK RING AND APPARATUS FOR MAKING SAME

Patent #:	4523974	Issue Dt:	06/18/1985	Application #:	06592040	Filing Dt:	03/21/1984
Title:	METHOD OF FABRICATING A PELLICLE COVER FOR PROJECTION PRINTING SYSTEM

Patent #:	4703434	Issue Dt:	10/27/1987	Application #:	06602878	Filing Dt:	04/24/1984
Title:	APPARATUS FOR MEASURING OVERLAY ERROR

Patent #:	4617681	Issue Dt:	10/14/1986	Application #:	06605941	Filing Dt:	05/01/1984
Title:	BISTABLE ALIGNER CARTRIDGE FOOT

Patent #:	4614864	Issue Dt:	09/30/1986	Application #:	06614360	Filing Dt:	05/29/1984
Title:	APPARATUS FOR DETECTING DEFOCUS

Patent #:	4580104	Issue Dt:	04/01/1986	Application #:	06621839	Filing Dt:	06/18/1984
Title:	HIGH VOLTAGE OPERATIONAL AMPLIFIER

Patent #:	4779966	Issue Dt:	10/25/1988	Application #:	06684760	Filing Dt:	12/21/1984
Title:	SINGLE MIRROR PROJECTION OPTICAL SYSTEM

Patent #:	4650315	Issue Dt:	03/17/1987	Application #:	06732593	Filing Dt:	05/10/1985
Title:	OPTICAL LITHOGRAPHIC SYSTEM

Patent #:	4711535	Issue Dt:	12/08/1987	Application #:	06732764	Filing Dt:	05/10/1985
Title:	RING FIELD PROJECTION SYSTEM

Patent #:	4586787	Issue Dt:	05/06/1986	Application #:	06780786	Filing Dt:	09/27/1985
Title:	LENS ASSEMBLY

Patent #:	4668366	Issue Dt:	05/26/1987	Application #:	06790673	Filing Dt:	10/23/1985
Title:	OPTICAL FIGURING BY PLASMA ASSISTED CHEMICAL TRANSPORT AND ETCHING APPARATUS THEREFOR

Patent #:	4734829	Issue Dt:	03/29/1988	Application #:	06796339	Filing Dt:	11/12/1985
Title:	SHORT ARC LAMP IMAGE TRANSFORMER

Patent #:	4733945	Issue Dt:	03/29/1988	Application #:	06818925	Filing Dt:	01/15/1986
Title:	PRECISION LENS MOUNTING

Patent #:	4907035	Issue Dt:	03/06/1990	Application #:	06842145	Filing Dt:	03/21/1986
Title:	UNIVERSAL EDGED-BASED WAFER ALIGNMENT APPARATUS

Patent #:	4681408	Issue Dt:	07/21/1987	Application #:	06856881	Filing Dt:	04/28/1986
Title:	ADJUSTABLE MOUNT FOR LARGE MIRRORS

Patent #:	4750857	Issue Dt:	06/14/1988	Application #:	06859586	Filing Dt:	05/05/1986
Title:	WAFER CASSETTE TRANSFER MECHANISM

Patent #:	4697087	Issue Dt:	09/29/1987	Application #:	06868506	Filing Dt:	07/31/1986
Title:	REVERSE DARK FIELD ALIGNMENT SYSTEM FOR SCANNING LITHOGRAPHIC ALIGNER

Patent #:	4726671	Issue Dt:	02/23/1988	Application #:	06876068	Filing Dt:	06/19/1986
Title:	HIGH RESONANCE ADJUSTABLE MIRROR MOUNT

Patent #:	4719705	Issue Dt:	01/19/1988	Application #:	06877817	Filing Dt:	06/24/1986
Title:	RETICLE TRANSPORTER

Patent #:	4747030	Issue Dt:	05/24/1988	Application #:	06896486	Filing Dt:	08/13/1986
Title:	ILLUMINATION SYSTEM

Patent #:	4740686	Issue Dt:	04/26/1988	Application #:	06905716	Filing Dt:	09/09/1986
Title:	OPTICAL SENSOR CIRCUITRY

Patent #:	4929054	Issue Dt:	05/29/1990	Application #:	06914953	Filing Dt:	10/03/1986
Title:	MOUNTING FOR HIGH RESOLUTION PROJECTION LENSES

Patent #:	4760429	Issue Dt:	07/26/1988	Application #:	06927202	Filing Dt:	11/05/1986
Title:	HIGH SPEED RETICLE CHANGE SYSTEM

Patent #:	4772107	Issue Dt:	09/20/1988	Application #:	06927215	Filing Dt:	11/05/1986
Title:	WIDE ANGLE LENS WITH IMPROVED FLAT FIELD CHARACTERISTICS

Patent #:	4770477	Issue Dt:	09/13/1988	Application #:	06938091	Filing Dt:	12/04/1986
Title:	LENS USABLE IN THE ULTRAVIOLET

Patent #:	4747678	Issue Dt:	05/31/1988	Application #:	06942899	Filing Dt:	12/17/1986
Title:	OPTICAL RELAY SYSTEM WITH MAGNIFICATION

Patent #:	4778332	Issue Dt:	10/18/1988	Application #:	07012537	Filing Dt:	02/09/1987
Title:	WAFER FLIP APPARATUS

Patent #:	4846626	Issue Dt:	07/11/1989	Application #:	07012538	Filing Dt:	02/09/1987
Title:	WAFER HANDLING SYSTEM

Patent #:	4986007	Issue Dt:	01/22/1991	Application #:	07030009	Filing Dt:	03/25/1987
Title:	RETICLE FRAME ASSEMBLY

Patent #:	4831640	Issue Dt:	05/16/1989	Application #:	07065135	Filing Dt:	06/19/1987
Title:	ILLUMINATION SYSTEM FOR X-RAY LITHOGRAPHY

Patent #:	4804978	Issue Dt:	02/14/1989	Application #:	07157755	Filing Dt:	02/19/1988
Title:	EXPOSURE CONTROL SYSTEM FOR FULL FIELD PHOTOLITHOGRAPHY USING PULSED SOURCES

Patent #:	4913524	Issue Dt:	04/03/1990	Application #:	07193015	Filing Dt:	05/12/1988
Title:	SYNTHETIC IMAGING TECHNIQUE

Patent #:	4952858	Issue Dt:	08/28/1990	Application #:	07198545	Filing Dt:	05/18/1988
Title:	MICROLITHOGRAPHIC APPARATUS

Patent #:	4953960	Issue Dt:	09/04/1990	Application #:	07223968	Filing Dt:	07/15/1988
Title:	OPTICAL REDUCTION SYSTEM

Patent #:	4953388	Issue Dt:	09/04/1990	Application #:	07301088	Filing Dt:	01/25/1989
Title:	AIR GAUGE SENSOR

Patent #:	4973217	Issue Dt:	11/27/1990	Application #:	07351741	Filing Dt:	04/17/1989
Title:	WAFER HANDLING SYSTEM

Patent #:	4933714	Issue Dt:	06/12/1990	Application #:	07368978	Filing Dt:	06/20/1989
Title:	APPARATUS AND METHOD FOR REPRODUCING A PATTERN IN AN ANNULAR AREA

Patent #:	5014031	Issue Dt:	05/07/1991	Application #:	07382943	Filing Dt:	07/21/1989
Title:	ULTRA PRECISION PRESSURE REGULATOR

Patent #:	3822927	Issue Dt:		Application #:	UNAVAILABLE	Filing Dt:
Title:

Patent #:	4068947	Issue Dt:		Application #:	UNAVAILABLE	Filing Dt:
Title:

Patent #:	3769516	Issue Dt:		Application #:	UNAVAILABLE	Filing Dt:
Title:

Patent #:	3822927	Issue Dt:		Application #:	UNAVAILABLE	Filing Dt:
Title:

Patent #:	3745483	Issue Dt:		Application #:	UNAVAILABLE	Filing Dt:
Title:

Patent #:	3937556	Issue Dt:		Application #:	UNAVAILABLE	Filing Dt:
Title:

Patent #:	3963353	Issue Dt:		Application #:	UNAVAILABLE	Filing Dt:
Title:

Patent #:	3957364	Issue Dt:		Application #:	UNAVAILABLE	Filing Dt:
Title:

Patent #:	3955440	Issue Dt:		Application #:	UNAVAILABLE	Filing Dt:
Title:

Patent #:	4006645	Issue Dt:		Application #:	UNAVAILABLE	Filing Dt:
Title:

Assignor

PERKIN-ELMER CORPORATION, THE,

Exec Dt:

05/15/1990

Assignee

SVG LITHOGRAPHY, INC., A CORP OF DE

Correspondence name and address
	WILSON, SONSINI, GOODRICH ET AL
	TWO PALO ALTO SQUARE
	PALO ALTO, CA 94306

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