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Reel/Frame:035284/0121   Pages: 2
Recorded: 03/30/2015
Attorney Dkt #:2916.0010C
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
08/15/2017
Application #:
14137225
Filing Dt:
12/20/2013
Publication #:
Pub Dt:
07/10/2014
Title:
METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT FOR EUV-LITHOGRAPHY
Assignors
1
Exec Dt:
04/04/2014
2
Exec Dt:
02/25/2014
3
Exec Dt:
03/20/2014
4
Exec Dt:
02/22/2014
Assignee
1
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondence name and address
GEORGE F. LEHNIGK
9801 WASHINGTONIAN BLVD.
SUITE 750
GAITHERSBURG, MD 20878

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