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Reel/Frame:038684/0124   Pages: 2
Recorded: 05/23/2016
Attorney Dkt #:24609-0051002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
10/30/2018
Application #:
15054238
Filing Dt:
02/26/2016
Publication #:
Pub Dt:
07/07/2016
Title:
Method For Determining The Registration Of A Structure On A Photomask And Apparatus To Perform The Method
Assignor
1
Exec Dt:
01/19/2012
Assignee
1
CARL-ZEISS-PROMENADE 10
JENA, GERMANY 07745
Correspondence name and address
REX I. HUANG
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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