Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 043634/0126 | |
| Pages: | 9 |
| | Recorded: | 09/20/2017 | | |
| Attorney Dkt #: | 2857.5370002 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/29/2018
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Application #:
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15311548
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Filing Dt:
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11/16/2016
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Publication #:
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Pub Dt:
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04/27/2017
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Title:
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Method For Compensating for an Exposure Error, a Device Manufacturing Method, a Substrate Table, a Lithographic Apparatus, a Control System, a Method for Measuring Reflectivity and a Method for Measuring a Dose of EUV Radiation
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Assignee
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
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1100 NEW YORK AVENUE, N.W.
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WASHINGTON, DC 20005
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