Patent Assignment Details
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| Reel/Frame: | 031975/0131 | |
| Pages: | 4 |
| | Recorded: | 01/15/2014 | | |
| Attorney Dkt #: | ATI0054US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/10/2017
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Application #:
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14135754
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Filing Dt:
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12/20/2013
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Publication #:
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Pub Dt:
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06/25/2015
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Title:
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REDUCED TRACE METALS CONTAMINATION ION SOURCE FOR AN ION IMPLANTATION SYSTEM
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Assignee
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| 108 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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Correspondence name and address
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CANTOR COLBURN LLP
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1180 PEACHTREE STREET, N.E.
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SUITE 2050
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ATLANTA, GA 30309
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