Patent Assignment Details
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| Reel/Frame: | 030047/0137 | |
| Pages: | 3 |
| | Recorded: | 03/20/2013 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
3
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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09001635
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Filing Dt:
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12/31/1997
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Title:
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PLASMA DISCHARGE DEVICE AND METHOD WITH DYNAMIC TUNING
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Patent #:
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Issue Dt:
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08/29/2000
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Application #:
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09213925
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Filing Dt:
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12/17/1998
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Title:
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TEMPERATURE PROBE AND MEASUREMENT METHOD FOR LOW PRESSURE PROCESS
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Patent #:
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Issue Dt:
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03/21/2000
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Application #:
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09218912
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Filing Dt:
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12/22/1998
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Title:
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WAFER TEMPERATURE MONITORING DEVICE UTILIZING FLEXIBLE THERMOCOUPLE
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Assignee
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| 108 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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Correspondence name and address
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HARNESS, DICKEY & PIERCE, P.L.C.
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P.O. BOX 828
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BLOOMFIELD HILLS, MI 48303
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