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Total properties:
64
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06/17/2003
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09820281
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03/28/2001
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Pub Dt:
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10/03/2002
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Title:
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NOZZLE DESIGN FOR GENERATING FLUID STREAMS USEFUL IN THE MANUFACTURE OF MICROELECTRONIC DEVICES
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04/05/2005
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10243616
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09/13/2002
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Pub Dt:
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03/18/2004
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Title:
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SEMICONDUCTOR WAFER CLEANING SYSTEMS AND METHODS
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04/26/2005
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10633124
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08/01/2003
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03/11/2004
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Title:
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THERMAL PROCESS STATION WITH HEATED LID
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09/09/2008
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10799250
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03/12/2004
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Pub Dt:
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09/15/2005
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Title:
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ROTARY UNIONS, FLUID DELIVERY SYSTEMS, AND RELATED METHODS
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07/07/2009
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10866916
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06/14/2004
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02/22/2007
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Title:
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SYSTEM AND METHOD FOR CARRYING OUT LIQUID AND SUBSEQUENT DRYING TREATMENTS ON ONE OR MORE WAFERS
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12/06/2011
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11096935
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04/01/2005
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Pub Dt:
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10/05/2006
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Title:
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METHODS FOR RINSING MICROELECTRONIC SUBSTRATES UTILIZING COOL RINSE FLUID WITHIN A GAS ENVIROMENT INCLUDING A DRYING ENHANCEMENT SUBSTANCE
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01/13/2009
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11300153
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12/13/2005
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Pub Dt:
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06/15/2006
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Title:
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10/01/2013
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11376996
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03/15/2006
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10/25/2007
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Title:
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BARRIER STRUCTURE AND NOZZLE DEVICE FOR USE IN TOOLS USED TO PROCESS MICROELECTRONIC WORKPIECES WITH ONE OR MORE TREATMENT FLUIDS
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09/22/2009
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11603634
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11/22/2006
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07/12/2007
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Title:
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03/05/2013
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11820709
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06/20/2007
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01/10/2008
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Title:
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10/26/2010
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12152641
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05/15/2008
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11/20/2008
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02/25/2014
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12217883
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07/09/2008
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11/06/2008
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Title:
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03/29/2011
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12220887
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07/29/2008
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02/12/2009
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Title:
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01/31/2012
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11/21/2008
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03/26/2009
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08/07/2012
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12387314
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04/30/2009
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11/12/2009
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08/07/2012
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12387607
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05/05/2009
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11/12/2009
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Title:
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03/27/2012
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05/06/2009
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11/19/2009
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03/12/2013
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09/08/2009
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01/28/2010
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12/30/2014
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09/01/2010
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12/30/2010
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Title:
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NONE
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13083948
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04/11/2011
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10/27/2011
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Title:
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02/16/2016
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13157695
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06/10/2011
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12/15/2011
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12/02/2014
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13219220
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08/26/2011
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12/22/2011
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06/16/2015
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13312148
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12/06/2011
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06/14/2012
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08/09/2016
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13493073
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06/11/2012
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01/03/2013
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04/01/2014
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13548489
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07/13/2012
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11/01/2012
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03/11/2014
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13647910
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10/09/2012
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02/07/2013
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03/17/2015
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10/11/2012
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02/14/2013
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03/03/2015
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13649755
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10/11/2012
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02/07/2013
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10/14/2014
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13711202
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12/11/2012
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05/09/2013
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03/29/2016
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03/15/2013
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08/08/2013
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10/28/2014
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03/15/2013
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07/24/2014
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05/26/2015
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04/01/2013
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08/22/2013
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04/26/2016
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14022979
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09/10/2013
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03/12/2015
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APPARATUS AND METHOD FOR SCANNING AN OBJECT THROUGH A FLUID SPRAY
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04/28/2015
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14159560
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01/21/2014
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07/24/2014
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PROCESS FOR INCREASING THE HYDROPHILICITY OF SILICON SURFACES FOLLOWING HF TREATMENT
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03/06/2018
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14209805
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03/13/2014
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09/18/2014
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11/28/2017
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03/13/2014
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09/18/2014
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NONE
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14255570
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04/17/2014
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11/13/2014
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PROCESS COMPRISING WATER VAPOR FOR HAZE ELIMINATION AND RESIDUE REMOVAL
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08/09/2016
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14562386
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12/05/2014
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06/11/2015
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METHOD OF USING SEPARATE WAFER CONTACTS DURING WAFER PROCESSING
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11/08/2016
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12/10/2014
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06/11/2015
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02/07/2017
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12/10/2014
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06/16/2016
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05/30/2017
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03/02/2015
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06/18/2015
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05/29/2018
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07/31/2015
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02/02/2017
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Systems & Methods for Metering a Dose Volume of Fluid used to Treat Microelectronic Substrates
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06/27/2017
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09/23/2015
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01/14/2016
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06/07/2022
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04/07/2016
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08/28/2018
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04/07/2016
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07/10/2018
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04/07/2016
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04/07/2016
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02/06/2018
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02/15/2016
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06/09/2016
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07/10/2018
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03/23/2016
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09/22/2016
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06/29/2016
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10/20/2016
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11/30/2017
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09/29/2017
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01/25/2018
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Patent #:
|
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Issue Dt:
|
02/02/2021
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Application #:
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15806760
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Filing Dt:
|
11/08/2017
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Publication #:
|
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Pub Dt:
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05/10/2018
| | | | |
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Title:
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MAGNETICALLY LEVITATED AND ROTATED CHUCK FOR PROCESSING MICROELECTRONIC SUBSTRATES IN A PROCESS CHAMBER
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/18/2022
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Application #:
|
15824021
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Filing Dt:
|
11/28/2017
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Publication #:
|
|
Pub Dt:
|
05/31/2018
| | | | |
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Title:
|
TRANSLATING AND ROTATING CHUCK FOR PROCESSING MICROELECTRONIC SUBSTRATES IN A PROCESS CHAMBER
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/17/2019
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Application #:
|
15835184
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Filing Dt:
|
12/07/2017
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Publication #:
|
|
Pub Dt:
|
06/07/2018
| | | | |
|
Title:
|
WAFER EDGE LIFT PIN DESIGN FOR MANUFACTURING A SEMICONDUCTOR DEVICE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
11/24/2020
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Application #:
|
15881447
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Filing Dt:
|
01/26/2018
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Publication #:
|
|
Pub Dt:
|
08/02/2018
| | | | |
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Title:
|
Systems and Methods for Rotating and Translating a Substrate in a Process Chamber
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|
|
|
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Patent #:
|
|
Issue Dt:
|
08/18/2020
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Application #:
|
15922203
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Filing Dt:
|
03/15/2018
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|
Publication #:
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|
Pub Dt:
|
09/20/2018
| | | | |
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Title:
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SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBSTRATES WITH FLUID SPRAYS SUCH AS CRYOGENIC FLUID SPRAYS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
08/18/2020
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Application #:
|
16025566
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Filing Dt:
|
07/02/2018
|
|
Publication #:
|
|
Pub Dt:
|
10/25/2018
| | | | |
|
Title:
|
SYSTEMS AND METHODS FOR TREATING SUBSTRATES WITH CRYOGENIC FLUID MIXTURES
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/01/2021
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Application #:
|
16278398
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Filing Dt:
|
02/18/2019
|
|
Publication #:
|
|
Pub Dt:
|
08/22/2019
| | | | |
|
Title:
|
MICROELECTRONIC TREATMENT SYSTEM HAVING TREATMENT SPRAY WITH CONTROLLABLE BEAM SIZE
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|
|
|
|
Patent #:
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|
Issue Dt:
|
02/08/2022
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Application #:
|
16360624
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Filing Dt:
|
03/21/2019
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|
Publication #:
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|
Pub Dt:
|
09/26/2019
| | | | |
|
Title:
|
Pressure Control Strategies to Provide Uniform Treatment Streams in the Manufacture of Microelectronic Devices
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/28/2021
|
Application #:
|
16396008
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Filing Dt:
|
04/26/2019
|
|
Publication #:
|
|
Pub Dt:
|
11/07/2019
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBSTRATES WITH FLUID SPRAYS SUCH AS CRYOGENIC FLUID SPRAYS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/03/2023
|
Application #:
|
16509010
|
Filing Dt:
|
07/11/2019
|
|
Publication #:
|
|
Pub Dt:
|
01/16/2020
| | | | |
|
Title:
|
Magnetic Integrated Lift Pin System for a Chemical Processing Chamber
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/19/2022
|
Application #:
|
16677016
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Filing Dt:
|
11/07/2019
|
|
Publication #:
|
|
Pub Dt:
|
05/21/2020
| | | | |
|
Title:
|
TREATMENT SYSTEMS WITH REPOSITIONABLE NOZZLE USEFUL IN THE MANUFACTURE OF MICROELECTRONIC DEVICES
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|
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
16678667
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Filing Dt:
|
11/08/2019
|
|
Publication #:
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|
Pub Dt:
|
05/14/2020
| | | | |
|
Title:
|
METHOD FOR ACHIEVING STICTION-FREE HIGH-ASPECT-RATIO MICROSTRUCTURES AFTER WET CHEMICAL PROCESSING
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|
