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Total properties:
26
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09798959
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Filing Dt:
|
03/06/2001
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Publication #:
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Pub Dt:
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02/14/2002
| | | | |
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Title:
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Anticorrosive vacuum sensor
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Patent #:
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Issue Dt:
|
09/11/2007
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Application #:
|
09862458
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Filing Dt:
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05/23/2001
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Publication #:
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Pub Dt:
|
10/24/2002
| | | | |
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Title:
|
THIN-FILM DISPOSITION APPARATUS
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|
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Patent #:
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|
Issue Dt:
|
08/05/2008
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Application #:
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10015601
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Filing Dt:
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12/17/2001
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Publication #:
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Pub Dt:
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06/27/2002
| | | | |
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Title:
|
INTERBACK-TYPE SUBSTRATE PROCESSING DEVICE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10211367
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Filing Dt:
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08/05/2002
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Publication #:
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Pub Dt:
|
02/06/2003
| | | | |
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Title:
|
Surface processing apparatus
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10234540
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Filing Dt:
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09/05/2002
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Publication #:
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Pub Dt:
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03/13/2003
| | | | |
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Title:
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Surface processing apparatus
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10293698
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Filing Dt:
|
11/14/2002
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Publication #:
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Pub Dt:
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07/17/2003
| | | | |
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Title:
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Heating element CVD system and heating element CVD method using the same
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|
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Patent #:
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|
Issue Dt:
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04/07/2009
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Application #:
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10375349
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Filing Dt:
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02/28/2003
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Publication #:
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Pub Dt:
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08/28/2003
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS
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|
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Patent #:
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Issue Dt:
|
11/24/2009
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Application #:
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10462765
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Filing Dt:
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06/17/2003
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Publication #:
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Pub Dt:
|
03/04/2004
| | | | |
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Title:
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ELECTROSTATIC CHUCK DEVICE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10505544
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Filing Dt:
|
03/14/2005
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Publication #:
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Pub Dt:
|
11/17/2005
| | | | |
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Title:
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Method of operating substrate processing device
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Patent #:
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NONE
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Issue Dt:
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|
Application #:
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10642619
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Filing Dt:
|
08/19/2003
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Publication #:
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Pub Dt:
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02/26/2004
| | | | |
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Title:
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Apparatus and method for manufacturing halogen gas and halogen gas recovery and circulatory system
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|
|
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Patent #:
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NONE
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Issue Dt:
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|
Application #:
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10645908
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Filing Dt:
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08/22/2003
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Publication #:
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Pub Dt:
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12/07/2006
| | | | |
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Title:
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Method of forming an oxygen- or nitrogen-terminated silicon nanocrystalline structure and an oxygen- or nitrogen-terminated silicon nanocrystalline structure formed by the method
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|
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10662339
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Filing Dt:
|
09/16/2003
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|
Publication #:
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Pub Dt:
|
03/18/2004
| | | | |
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Title:
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Film-forming system and film-forming method
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Patent #:
|
NONE
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Issue Dt:
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Application #:
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10704884
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Filing Dt:
|
11/10/2003
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Publication #:
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Pub Dt:
|
08/05/2004
| | | | |
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Title:
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Plasma processing apparatus
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|
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Patent #:
|
NONE
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Issue Dt:
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|
Application #:
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10709622
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Filing Dt:
|
05/18/2004
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Publication #:
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Pub Dt:
|
10/07/2004
| | | | |
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Title:
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METHOD OF CLEANING A CVD DEVICE
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|
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Patent #:
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NONE
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Issue Dt:
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|
Application #:
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10808348
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Filing Dt:
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03/25/2004
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Publication #:
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Pub Dt:
|
09/30/2004
| | | | |
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Title:
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Film-forming method for forming metal oxide on substrate surface
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|
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Patent #:
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NONE
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Issue Dt:
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|
Application #:
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10852148
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Filing Dt:
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05/25/2004
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Publication #:
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Pub Dt:
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01/20/2005
| | | | |
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Title:
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Sputtering system
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|
|
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Patent #:
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|
Issue Dt:
|
12/01/2009
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Application #:
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10905574
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Filing Dt:
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01/11/2005
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Publication #:
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Pub Dt:
|
07/14/2005
| | | | |
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Title:
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PLASMA-ASSISTED SPUTTER DEPOSITION SYSTEM
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|
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Patent #:
|
NONE
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Issue Dt:
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Application #:
|
10949335
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Filing Dt:
|
09/27/2004
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Publication #:
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Pub Dt:
|
06/02/2005
| | | | |
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Title:
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Multi-cathode ionized physical vapor deposition system
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|
|
|
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Patent #:
|
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Issue Dt:
|
12/01/2009
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Application #:
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10957864
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Filing Dt:
|
10/04/2004
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Publication #:
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Pub Dt:
|
06/02/2005
| | | | |
|
Title:
|
FILM FORMING APPARATUS
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|
|
|
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Patent #:
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|
Issue Dt:
|
12/14/2010
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Application #:
|
11078549
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Filing Dt:
|
03/14/2005
|
|
Publication #:
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Pub Dt:
|
09/15/2005
| | | | |
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Title:
|
DOUBLE-LAYER SHUTTER CONTROL METHOD OF MULTI-SPUTTERING SYSTEM
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|
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Patent #:
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|
Issue Dt:
|
10/19/2010
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Application #:
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11141044
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Filing Dt:
|
06/01/2005
|
|
Publication #:
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Pub Dt:
|
12/08/2005
| | | | |
|
Title:
|
METHOD OF DEPOSITING A HIGHER PERMITTIVITY DIELECTRIC FILM
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|
|
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11161293
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Filing Dt:
|
07/28/2005
|
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Publication #:
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Pub Dt:
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02/09/2006
| | | | |
|
Title:
|
Substrate Processing Apparatus And Substrate Processing Method Using Such Substrate Processing Apparatus
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Patent #:
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|
Issue Dt:
|
01/26/2010
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Application #:
|
11161675
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Filing Dt:
|
08/11/2005
|
|
Publication #:
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Pub Dt:
|
02/23/2006
| | | | |
|
Title:
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A MAGNETORESISTANCE EFFECT DEVICE AND A PREFORM THEREFOR
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Patent #:
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Issue Dt:
|
06/08/2010
|
Application #:
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11161981
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Filing Dt:
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08/24/2005
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Publication #:
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Pub Dt:
|
03/23/2006
| | | | |
|
Title:
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MANUFACTURING APPARATUS OF MAGNETORESISTANCE ELEMENTS
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|
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Patent #:
|
NONE
|
Issue Dt:
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|
Application #:
|
11834717
|
Filing Dt:
|
08/07/2007
|
|
Publication #:
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Pub Dt:
|
01/24/2008
| | | | |
|
Title:
|
THIN-FILM DISPOSITION APPARATUS
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11845135
|
Filing Dt:
|
08/27/2007
|
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Publication #:
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Pub Dt:
|
03/06/2008
| | | | |
|
Title:
|
Surface Processing Apparatus
|
|
