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Total properties:
93
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|
Patent #:
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|
Issue Dt:
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03/12/1991
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Application #:
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07272501
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Filing Dt:
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11/16/1988
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Title:
|
MEGASONIC CLEANING APPARATUS
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Patent #:
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Issue Dt:
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10/03/2000
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Application #:
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09040176
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Filing Dt:
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03/17/1998
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Title:
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GAS SEAL AND SUPPORT FOR ROTATING SEMICONDUCTOR PROCESSOR
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Patent #:
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Issue Dt:
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09/26/2000
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Application #:
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09103930
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Filing Dt:
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06/24/1998
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Title:
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CENTRIFUGAL WAFER PROCESSOR AND METHOD
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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09227637
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Filing Dt:
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01/08/1999
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Title:
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VAPOR DRYING SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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11/21/2000
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Application #:
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09360567
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Filing Dt:
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07/26/1999
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Title:
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AWNING SLEEVE SHIRE
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Patent #:
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Issue Dt:
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02/03/2004
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Application #:
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09906384
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Filing Dt:
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07/16/2001
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Publication #:
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Pub Dt:
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01/23/2003
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|
Title:
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MEGASONIC CLEANER PROBE SYSTEM WITH GASIFIED FLUID
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Patent #:
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Issue Dt:
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01/20/2004
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Application #:
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09922509
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Filing Dt:
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08/03/2001
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Publication #:
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Pub Dt:
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02/06/2003
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Title:
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MEGASONIC PROBE ENERGY ATTENUATOR
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Patent #:
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Issue Dt:
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05/11/2004
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Application #:
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10014121
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Filing Dt:
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12/11/2001
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Publication #:
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Pub Dt:
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06/27/2002
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Title:
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PARTICLE BARRIER DRAIN
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Patent #:
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Issue Dt:
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10/05/2004
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Application #:
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10031923
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Filing Dt:
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04/17/2002
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Title:
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APPARATUS FOR TREATING SUBSTRATES
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Patent #:
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Issue Dt:
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11/18/2003
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Application #:
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10052823
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Filing Dt:
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01/17/2002
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Publication #:
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Pub Dt:
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07/17/2003
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Title:
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SYSTEM FOR REMOVAL OF PHOTORESIST USING SPARGER
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Patent #:
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Issue Dt:
|
07/27/2004
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Application #:
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10053364
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Filing Dt:
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01/18/2002
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Publication #:
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Pub Dt:
|
10/10/2002
| | | | |
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Title:
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METHOD AND SYSTEM FOR CHEMICAL INJECTION IN SILICON WAFER PROCESSING
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Patent #:
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Issue Dt:
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03/29/2005
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Application #:
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10053449
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Filing Dt:
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01/17/2002
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Publication #:
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Pub Dt:
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07/03/2003
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Title:
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LOW PROFILE WAFER CARRIER
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Patent #:
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Issue Dt:
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10/30/2007
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10059682
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Filing Dt:
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01/29/2002
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Publication #:
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Pub Dt:
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07/31/2003
| | | | |
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Title:
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MEGASONIC PROBE ENERGY DIRECTOR
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Patent #:
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Issue Dt:
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01/04/2005
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Application #:
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10091011
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Filing Dt:
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03/04/2002
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Publication #:
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Pub Dt:
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01/30/2003
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Title:
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CLEANING AND DRYING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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10098847
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Filing Dt:
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03/15/2002
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Publication #:
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Pub Dt:
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09/19/2002
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Title:
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DRYING VAPOR GENERATION
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Patent #:
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Issue Dt:
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07/27/2004
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Application #:
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10117725
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Filing Dt:
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04/05/2002
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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CHEMICAL CONCENTRATION CONTROL DEVICE
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Patent #:
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01/18/2005
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10117739
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Filing Dt:
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04/05/2002
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Publication #:
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Pub Dt:
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10/02/2003
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Title:
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MEMBRANE DRYER
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Patent #:
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Issue Dt:
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03/18/2003
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Application #:
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10117768
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Filing Dt:
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04/05/2002
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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Patent #:
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01/11/2005
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Application #:
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10117778
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Filing Dt:
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04/05/2002
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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Patent #:
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Issue Dt:
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03/06/2007
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Application #:
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10140029
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Filing Dt:
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05/06/2002
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Publication #:
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Pub Dt:
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11/06/2003
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Title:
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Patent #:
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Issue Dt:
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06/29/2004
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Application #:
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10171426
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Filing Dt:
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06/12/2002
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Publication #:
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Pub Dt:
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12/12/2002
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Title:
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MEGASONIC CLEANER AND DRYER
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Patent #:
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Issue Dt:
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08/02/2005
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Application #:
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10171429
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Filing Dt:
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06/12/2002
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Publication #:
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Pub Dt:
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12/12/2002
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Title:
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STACKABLE PROCESS CHAMBERS
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Patent #:
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Issue Dt:
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08/16/2005
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10171430
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Filing Dt:
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06/12/2002
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Publication #:
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Pub Dt:
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12/12/2002
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|
Title:
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MEGASONIC CLEANER AND DRYER SYSTEM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10171431
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Filing Dt:
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06/12/2002
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Publication #:
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Pub Dt:
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12/12/2002
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Title:
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Method of applying liquid to a megasonic apparatus for improved cleaning control
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Patent #:
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NONE
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Issue Dt:
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10171494
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Filing Dt:
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06/12/2002
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Publication #:
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02/05/2004
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Title:
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Megasonic cleaner and dryer system
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Patent #:
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09/30/2003
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10304583
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11/25/2002
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Publication #:
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Pub Dt:
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06/19/2003
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Title:
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Patent #:
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09/12/2006
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10341425
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01/10/2003
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Publication #:
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Pub Dt:
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07/15/2004
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Title:
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MEGASONIC CLEANING SYSTEM WITH BUFFERED CAVITATION METHOD
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06/21/2005
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10358636
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02/05/2003
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08/07/2003
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Title:
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CAPILLARY DRYING OF SUBSTRATES
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Patent #:
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11/16/2004
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10366054
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02/13/2003
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07/24/2003
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Title:
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PROCESS AND APPARATUS FOR REMOVAL OF PHOTORESIST FROM SEMICONDUCTOR WAFERS USING SPRAY NOZZLES
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07/12/2011
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10585229
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04/20/2007
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02/14/2008
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Title:
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SYSTEM AND METHOD FOR SELECTIVE ETCHING OF SILICON NITRIDE DURING SUBSTRATE PROCESSING
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03/08/2005
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10634440
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08/05/2003
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Publication #:
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02/26/2004
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Title:
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METHOD FOR REMOVAL OF PHOTORESIST USING SPARGER
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10/18/2005
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10699042
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10/31/2003
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08/05/2004
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Title:
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05/23/2006
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10742214
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12/19/2003
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07/22/2004
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Title:
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SONIC-ENERGY CLEANER SYSTEM WITH GASIFIED FLUID
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05/17/2005
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10760596
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01/20/2004
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09/02/2004
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Title:
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09/05/2006
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10864927
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06/10/2004
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11/11/2004
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MEGASONIC CLEANER AND DRYER
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01/02/2007
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06/10/2004
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07/28/2005
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Title:
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MEGASONIC CLEANING USING SUPERSATURATED CLEANING SOLUTION
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NONE
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10865440
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06/10/2004
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11/25/2004
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Title:
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Megasonic cleaner and dryer
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12/25/2007
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07/20/2004
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01/27/2005
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01/30/2007
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08/02/2004
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02/03/2005
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09/01/2004
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03/10/2005
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08/16/2005
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09/27/2004
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04/28/2005
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Title:
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MEMBRANE DRYER
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NONE
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11176406
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07/07/2005
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01/19/2006
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System and method for pre-gate cleaning of substrates
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NONE
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11177147
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07/08/2005
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02/02/2006
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Method and apparatus for creating ozonated process solutions having high ozone concentration
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NONE
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11178923
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07/11/2005
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01/26/2006
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Reduced pressure irradiation processing method and apparatus
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NONE
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11227705
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09/15/2005
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03/16/2006
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System and method of powering a sonic energy source and use of the same to process substrates
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NONE
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11266402
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11/03/2005
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05/03/2007
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APPARATUS AND METHOD FOR REMOVING TRACE AMOUNTS OF LIQUID FROM SUBSTRATES DURING SINGLE-SUBSTRATE PROCESSING
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NONE
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11370361
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03/08/2006
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11/23/2006
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Method and system for processing substrates with sonic energy that reduces or eliminates damage to semiconductor devices
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NONE
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11370707
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03/08/2006
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11/23/2006
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Method and system for processing substrates with sonic energy that reduces or eliminates damage to semiconductor devices
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09/11/2007
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03/15/2006
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08/17/2006
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Title:
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TRANSDUCER ASSEMBLY FOR MAGASONIC PROCESSING OF AN ARTICLE AND APPARATUS UTILIZING THE SAME
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NONE
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11454447
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06/15/2006
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12/21/2006
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System and method of processing substrates using sonic energy having cavitation control
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NONE
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11489059
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07/18/2006
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11/23/2006
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Megasonic cleaning system with buffered cavitation method
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NONE
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11544802
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10/06/2006
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04/19/2007
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08/25/2009
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11/09/2006
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03/15/2007
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MEGASONIC CLEANING USING SUPERSATURATED SOLUTION
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01/12/2010
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11624445
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01/18/2007
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SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE
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08/31/2010
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11625556
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01/22/2007
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07/26/2007
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ACOUSTIC ENERGY SYSTEM, METHOD AND APPARATUS FOR PROCESSING FLAT ARTICLES
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NONE
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11625651
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01/22/2007
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07/26/2007
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SYSTEM APPARATUS AND METHODS FOR PROCESSING SUBSTRATES USING ACOUSTIC ENERGY
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NONE
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11640718
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12/18/2006
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06/28/2007
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NONE
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11649535
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01/04/2007
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05/31/2007
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Title:
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Process sequence for photoresist stripping and cleaning of photomasks for integrated circuit manufacturing
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05/24/2011
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11745866
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05/08/2007
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11/15/2007
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SPRAY JET CLEANING APPARATUS AND METHOD
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NONE
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11755619
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05/30/2007
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07/17/2008
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Title:
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APPARATUS AND METHOD FOR PROCESSING A HYDROPHOBIC SURFACE OF A SUBSTRATE
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NONE
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11777252
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07/12/2007
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01/24/2008
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Title:
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TRANSDUCER ASSEMBLY INCORPORATING A TRANSMITTER HAVING THROUGH HOLES, AND METHOD AND SYSTEM FOR CLEANING A SUBSTRATE UTILIZING THE SAME
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NONE
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11777258
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07/12/2007
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01/24/2008
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Title:
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APPARATUS, SYSTEM AND METHOD FOR PROCESSING A SUBSTRATE THAT PROHIBITS AIR FLOW CONTAINING CONTAMINANTS AND/OR RESIDUES FROM DEPOSITING ON THE SUBSTRATE
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05/10/2011
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11781835
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07/23/2007
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07/31/2008
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Title:
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APPARATUS FOR EJECTING FLUID ONTO A SUBSTRATE AND SYSTEM AND METHOD INCORPORATING THE SAME
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11/23/2010
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11837292
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08/10/2007
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02/14/2008
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Title:
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APPARATUS AND METHOD OF MEASURING ACOUSTICAL ENERGY APPLIED TO A SUBSTRATE
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04/14/2009
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11839885
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08/16/2007
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01/10/2008
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Title:
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SYSTEM FOR MEGASONIC PROCESSING OF AN ARTICLE
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NONE
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11841427
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08/20/2007
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04/17/2008
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Title:
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SYSTEM AND METHOD FOR PROCESSING A SUBSTRATE UTILIZING A GAS STREAM FOR PARTICLE REMOVAL
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11/10/2009
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11873750
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10/17/2007
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10/30/2008
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Title:
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METHOD OF CLEANING SUBSTRATES UTILIZING MEGASONIC ENERGY
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06/03/2014
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12070620
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02/19/2008
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12/15/2011
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Title:
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Method for cleaning substrates utilizing surface passivation and/or oxide layer growth to protect from pitting
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10/02/2012
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12266543
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11/06/2008
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09/17/2009
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Title:
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COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRATE AND METHOD OF CONSTRUCTING THE SAME
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06/30/2015
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12445783
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10/05/2010
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02/24/2011
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11/15/2011
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12685935
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01/12/2010
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11/25/2010
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Title:
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SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE
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03/24/2015
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12716785
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03/03/2010
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09/09/2010
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METHOD FOR SELECTIVE UNDER-ETCHING OF POROUS SILICON
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11/27/2012
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12871286
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08/30/2010
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12/30/2010
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ACOUSTIC ENERGY SYSTEM, METHOD AND APPARATUS FOR PROCESSING FLAT ARTICLES
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12/27/2011
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12898374
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10/05/2010
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05/12/2011
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Title:
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METHOD OF MANUFACTURING A SOLAR CELL USING A PRE-CLEANING STEP THAT CONTRIBUTES TO HOMOGENEOUS TEXTURE MORPHOLOGY
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NONE
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13092661
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04/22/2011
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05/03/2012
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METHOD OF PRIMING AND DRYING SUBSTRATES
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01/01/2013
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13104580
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05/10/2011
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09/08/2011
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APPARATUS FOR EJECTING FLUID ONTO A SUBSTRATE AND SYSTEM AND METHOD OF INCORPORATING THE SAME
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09/04/2012
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13270849
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10/11/2011
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02/02/2012
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METHOD FOR MEGASONIC PROCESSING OF AN ARTICLE
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10/02/2012
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13296760
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11/15/2011
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03/15/2012
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SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE
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NONE
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13633662
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10/02/2012
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07/04/2013
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COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRATE AND METHOD OF CONSTRUCTING THE SAME
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06/03/2014
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13633843
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10/02/2012
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07/04/2013
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SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE
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04/05/2016
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13686697
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11/27/2012
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12/19/2013
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METHOD FOR PROCESSING FLAT ARTICLES
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NONE
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14171190
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02/03/2014
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08/07/2014
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SYSTEM, APPARATUS AND METHOD FOR PROCESSING SUBSTRATES USING ACOUSTIC ENERGY
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NONE
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14239709
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06/02/2014
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10/16/2014
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REDUCED CONSUMPTIONS STAND ALONE RINSE TOOL HAVING SELF-CONTAINED CLOSED-LOOP FLUID CIRCUIT, AND METHOD OF RINSING SUBSTRATES USING THE SAME
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06/02/2015
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14281829
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05/19/2014
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09/11/2014
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05/10/2016
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14294742
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06/03/2014
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09/25/2014
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SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE
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14398934
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11/04/2014
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04/30/2015
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09/18/2018
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14490080
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09/18/2014
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03/19/2015
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14667157
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03/24/2015
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07/09/2015
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01/01/2019
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05/04/2015
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11/05/2015
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06/05/2018
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14727116
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06/01/2015
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09/17/2015
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COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRATE AND METHOD OF CONSTRUCTING THE SAME
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NONE
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14753837
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06/29/2015
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12/17/2015
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SYSTEM AND METHOD FOR THE SONIC-ASSISTED CLEANING OF SUBSTRATES UTILIZING A SONIC-TREATED LIQUID
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NONE
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15177643
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06/09/2016
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05/11/2017
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METHOD OF PRIMING AND DRYING SUBSTRATES
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01/15/2019
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15240451
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08/18/2016
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12/08/2016
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Title:
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METHOD FOR SELECTIVE UNDER-ETCHING OF POROUS SILICON
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