Patent Assignment Details
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| Reel/Frame: | 006708/0142 | |
| Pages: | 3 |
| | Recorded: | 09/08/1993 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/08/1995
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Application #:
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08117870
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Filing Dt:
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09/08/1993
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Title:
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METHOD AND APPARATUS FOR FORMING A LAYER OF UNIFORM THICKNESS ON A SEMICONDUCTOR WAFER DURING RAPID THERMAL PROCESSING
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Assignee
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| 1 HOLLADAY |
| RALEIGH, NORTH CAROLINA 27695-7003 |
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Correspondence name and address
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MITCHELL S. BIGEL
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BELL, SELTZER, PARK & GIBSON, P.A.
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P.O. DRAWER 34009
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1211 EAST MOREHEAD STREET
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CHARLOTTE, NC 28234
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