Patent Assignment Details
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Reel/Frame: | 032317/0143 | |
| Pages: | 3 |
| | Recorded: | 02/27/2014 | | |
Attorney Dkt #: | M419.12-0085 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/03/2015
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Application #:
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14168692
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Filing Dt:
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01/30/2014
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Title:
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METHOD AND APPARATUS FOR VAPOR GENERATION AND WAFER CLEANING
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Assignee
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5910 RICE CREEK PARKWAY |
SHOREVIEW, MINNESOTA 55126 |
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Correspondence name and address
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Z. PETER SAWICKI
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900 SECOND AVENUE SOUTH, SUITE 1400
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MINNEAPOLIS, MN 55402
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