Patent Assignment Details
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Reel/Frame: | 014634/0146 | |
| Pages: | 2 |
| | Recorded: | 05/17/2004 | | |
Conveyance: | CORRECTED RECORDATION COVER SHEET ORIGINALLY RECORDED ON MARCH 1, 1999 REEL: 014240 FRAME: 0053 |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/27/2001
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Application #:
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09259840
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Filing Dt:
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03/01/1999
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Title:
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METHOD FOR MONITORING POLISHING PAD USED IN CHEMICAL-MECHANICAL PLANARIZATION PROCESS
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Assignee
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NO. 101, SEC. 2, KWANG-FU RD. |
HSINCHU, TAIWAN 300, R.O.C. |
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Correspondence name and address
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MICHAEL BEST & FRIEDRICH, LLP
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PERRY J. HOFFMAN
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401 N. MICHIGAN AVENUE
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SUITE 1900
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CHICAGO, IL 60611-4212
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