|
Total properties:
94
|
|
|
|
Patent #:
|
|
Issue Dt:
|
|
Application #:
|
05520608
|
Filing Dt:
|
|
|
Title:
|
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/27/1979
|
Application #:
|
05835295
|
Filing Dt:
|
09/21/1977
|
|
Title:
|
POLISHING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/18/1980
|
Application #:
|
05938036
|
Filing Dt:
|
08/30/1978
|
|
Title:
|
POLISHING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/23/1980
|
Application #:
|
05939361
|
Filing Dt:
|
09/05/1978
|
|
Title:
|
RECTILINEAR WORK FINISHING APPARATUS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
06/02/1981
|
Application #:
|
06076306
|
Filing Dt:
|
09/17/1979
|
|
Title:
|
BEARING MOUNT FOR LAPPING MACHINE PRESSURE PLATE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/16/1982
|
Application #:
|
06149347
|
Filing Dt:
|
05/13/1980
|
|
Title:
|
INNER GEAR DRIVE FOR ABRADING MACHINES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/16/1982
|
Application #:
|
06149348
|
Filing Dt:
|
05/13/1980
|
|
Title:
|
POLISHING FIXTURE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/10/1986
|
Application #:
|
06182125
|
Filing Dt:
|
08/28/1980
|
|
Title:
|
CONTROL VALVE ASSEMBLY FOR ABRASIVE SLURRY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/09/1985
|
Application #:
|
06527255
|
Filing Dt:
|
08/29/1983
|
|
Title:
|
REMOVABLE POLISHING PAD ASSEMBLY
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|
|
|
|
Patent #:
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|
Issue Dt:
|
05/28/1985
|
Application #:
|
06557904
|
Filing Dt:
|
12/05/1983
|
|
Title:
|
LIQUID WAXLESS FIXTURING OF MICROSIZE WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/15/1987
|
Application #:
|
06755685
|
Filing Dt:
|
07/16/1985
|
|
Title:
|
MEASURING BAR FOR FREE ABRASIVE MACHINES
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/21/1989
|
Application #:
|
06891241
|
Filing Dt:
|
07/29/1986
|
|
Title:
|
FLAT LAPPING MACHINE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/26/1988
|
Application #:
|
06891376
|
Filing Dt:
|
07/31/1986
|
|
Title:
|
DRESSING FIXTURE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/01/1988
|
Application #:
|
06899151
|
Filing Dt:
|
08/22/1986
|
|
Title:
|
MASK AND PRESSURE BLOCK FOR ULTRA THIN WORK PIECES
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|
|
|
|
Patent #:
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|
Issue Dt:
|
08/04/1992
|
Application #:
|
06923669
|
Filing Dt:
|
10/27/1986
|
|
Title:
|
MULTILEVEL GRINDING APPARATUS
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
04/18/1989
|
Application #:
|
07167295
|
Filing Dt:
|
03/11/1988
|
|
Title:
|
MULTILEVEL GRINDING APPARATUS AND METHOD
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|
|
|
|
Patent #:
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|
Issue Dt:
|
08/29/1989
|
Application #:
|
07231969
|
Filing Dt:
|
08/15/1988
|
|
Title:
|
AUTOMATIC WORKPIECE THICKNESS CONTROL FOR DUAL LAPPING MACHINES
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|
|
|
|
Patent #:
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|
Issue Dt:
|
12/04/1990
|
Application #:
|
07280932
|
Filing Dt:
|
12/07/1988
|
|
Title:
|
LAPPING AND POLISHING MACHINE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/23/1993
|
Application #:
|
07473894
|
Filing Dt:
|
02/02/1990
|
|
Title:
|
CIRCUMFERENTIAL PATTERN FINISHING MACHINE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/04/1994
|
Application #:
|
07601384
|
Filing Dt:
|
10/23/1990
|
|
Title:
|
UNIFORM VELOCITY DOUBLE SIDED FINISHING MACHINE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/06/1991
|
Application #:
|
07606807
|
Filing Dt:
|
10/09/1990
|
|
Title:
|
LAPPING PLATE FOR A LAPPING AND POLISHING MACHINE
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
06/23/1992
|
Application #:
|
07734511
|
Filing Dt:
|
07/23/1991
|
|
Title:
|
CIRCUMFERENTIAL PATTERN FINISHING METHOD
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
07/06/1993
|
Application #:
|
07788862
|
Filing Dt:
|
11/07/1991
|
|
Title:
|
AUTOMATED FREE ABRASIVE MACHINE FOR ONE SIDE PIECE PART MACHINING
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|
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|
Patent #:
|
|
Issue Dt:
|
07/19/1994
|
Application #:
|
07898876
|
Filing Dt:
|
06/15/1992
|
|
Title:
|
WAFER POLISHING METHOD AND APPARATUS
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
07/25/1995
|
Application #:
|
08147909
|
Filing Dt:
|
11/04/1993
|
|
Title:
|
LOW ABRASION FRICTION MATERIAL COMPRISING A FIBROUS MATRIX IMPREGNATED WITH A POLYURETHANE RESIN WHEREIN FIBER ENDS ARE EXPOSED ON AT LEAST ONE SURFACE OF THE MATERIAL
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/23/1996
|
Application #:
|
08177156
|
Filing Dt:
|
01/04/1994
|
|
Title:
|
DEVICE FOR CONDITIONING POLISHING PADS
|
|
|
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|
Patent #:
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|
Issue Dt:
|
01/21/1997
|
Application #:
|
08218611
|
Filing Dt:
|
03/28/1994
|
|
Title:
|
DUAL COLUMN ABRADING MACHINE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/12/1996
|
Application #:
|
08245458
|
Filing Dt:
|
05/18/1994
|
|
Title:
|
WAFER POLISHING METHOD AND APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/12/1996
|
Application #:
|
08276158
|
Filing Dt:
|
07/15/1994
|
|
Title:
|
WAFER POLISHING METHOD AND APPARATUS
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
02/09/1999
|
Application #:
|
08460501
|
Filing Dt:
|
06/02/1995
|
|
Title:
|
IN-SITU POLISHING PAD FLATNESS CONTROL
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/29/1996
|
Application #:
|
08497530
|
Filing Dt:
|
07/03/1995
|
|
Title:
|
POLISHING PAD CONDITIONING
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|
|
|
|
Patent #:
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|
Issue Dt:
|
08/11/1998
|
Application #:
|
08513080
|
Filing Dt:
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08/09/1995
|
|
Title:
|
BACKING PAD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/11/1997
|
Application #:
|
08564967
|
Filing Dt:
|
11/30/1995
|
|
Title:
|
POLISHING CONTROL METHOD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/09/1998
|
Application #:
|
08564968
|
Filing Dt:
|
11/30/1995
|
|
Title:
|
POLISHING APPARATUS WITH IMPROVED PRODUCT UNLOADING
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|
|
|
|
Patent #:
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|
Issue Dt:
|
12/09/1997
|
Application #:
|
08635020
|
Filing Dt:
|
04/19/1996
|
|
Title:
|
POLISHING DEVICE WITH IMPROVED HANDLING OF FLUID POLISHING MEDIA
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|
|
Patent #:
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|
Issue Dt:
|
07/21/1998
|
Application #:
|
08638678
|
Filing Dt:
|
04/29/1996
|
|
Title:
|
DUAL COLUMN ABRADING MACHINE
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|
Patent #:
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|
Issue Dt:
|
02/03/1998
|
Application #:
|
08655297
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Filing Dt:
|
05/16/1996
|
|
Title:
|
ABRASIVE FOAM GRINDING COMPOSITION
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|
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|
Patent #:
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|
Issue Dt:
|
06/23/1998
|
Application #:
|
08662678
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Filing Dt:
|
06/14/1996
|
|
Title:
|
METHODS AND APPARATUS FOR THE CHEMICAL MECHANICAL PLANARIZATION OF ELECTRONIC DEVICES
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Patent #:
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|
Issue Dt:
|
07/14/1998
|
Application #:
|
08671155
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Filing Dt:
|
06/28/1996
|
|
Title:
|
ADJUSTABLE WAFER CASSETTE STAND
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|
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|
Patent #:
|
|
Issue Dt:
|
09/14/1999
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Application #:
|
08676546
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Filing Dt:
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07/08/1996
|
|
Title:
|
METHOD AND APPARATUS FOR CLEANING AND DRYING WAFERS
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Patent #:
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|
Issue Dt:
|
03/31/1998
|
Application #:
|
08683150
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Filing Dt:
|
07/18/1996
|
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Title:
|
APPARATUS FOR THE IN-PROCESS DETECTION OF WORKPIECES IN A CMP ENVIRONMENT
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Patent #:
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Issue Dt:
|
12/01/1998
|
Application #:
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08683571
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Filing Dt:
|
07/15/1996
|
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Title:
|
APPARATUS FOR CONDITIONING POLISHING PADS UTILIZING BRAZED DIAMOND TECHNOLOGY
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Patent #:
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|
Issue Dt:
|
01/12/1999
|
Application #:
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08720744
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Filing Dt:
|
10/02/1996
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Title:
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METHODS AND APPARATUS FOR MEASURING AND DISPENSING PROCESSING SOLUTIONS TO A CMP MACHINE
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Patent #:
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Issue Dt:
|
08/11/1998
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Application #:
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08751014
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Filing Dt:
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11/14/1996
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Title:
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BEARING ASSEMBLY FOR WAFER PLANARIZATION CARRIER
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Patent #:
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Issue Dt:
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10/20/1998
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Application #:
|
08781132
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Filing Dt:
|
01/09/1997
|
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Title:
|
APPARATUS FOR THE IN-PROCESS DETECTION OF WORKPIECES WITH A MONOCHROMATIC LIGHT SOURCE
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Patent #:
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Issue Dt:
|
04/02/2002
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Application #:
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08792936
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Filing Dt:
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01/24/1997
|
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Title:
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WAFER POLISHING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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02/16/1999
|
Application #:
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08798803
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Filing Dt:
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02/12/1997
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Title:
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METHODS AND APPARATUS FOR DETECTING REMOVAL OF THIN FILM LAYERS DURING PLANARIZATION
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Patent #:
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Issue Dt:
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02/16/1999
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Application #:
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08829056
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Filing Dt:
|
03/31/1997
|
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Title:
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APPARATUS FOR CLEANING WAFERS AND DISCS
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Patent #:
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Issue Dt:
|
05/04/1999
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Application #:
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08855208
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Filing Dt:
|
05/13/1997
|
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Title:
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APPARATUS FOR RINSING WAFERS IN THE CONTEXT OF A COMBINED RINSING, AND DRYING SYSTEM
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Patent #:
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Issue Dt:
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10/19/1999
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Application #:
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08865606
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Filing Dt:
|
05/29/1997
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Title:
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CHEMICAL MECHANICAL PLANARIZATION TOOL HAVING A LINEAR POLISHING ROLLER
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Patent #:
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Issue Dt:
|
08/17/1999
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Application #:
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08868110
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Filing Dt:
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06/03/1997
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Title:
|
METHODS AND APPARATUS FOR CONDITIONING GRINDING STONES
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Patent #:
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Issue Dt:
|
08/17/1999
|
Application #:
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08868491
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Filing Dt:
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06/03/1997
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Title:
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APPARATUS FOR HANDLING POLISHING CARRIERS
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Patent #:
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Issue Dt:
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07/13/1999
|
Application #:
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08868878
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Filing Dt:
|
06/04/1997
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Title:
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METHOD AND APPARATUS FOR DISTRIBUTING A POLISHING AGENT ONTO A POLISHING ELEMENT
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Patent #:
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Issue Dt:
|
03/07/2000
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Application #:
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08869112
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Filing Dt:
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06/04/1997
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Title:
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TILT MECHANISM FOR WAFER CASSETTE
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Patent #:
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Issue Dt:
|
03/23/1999
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Application #:
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08877154
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Filing Dt:
|
06/17/1997
|
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Title:
|
GRINDING COMPOSITION USING ABRASIVE PARTICLES ON BUBBLES
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Patent #:
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Issue Dt:
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05/01/2001
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Application #:
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08883404
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Filing Dt:
|
06/26/1997
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Title:
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METHODS AND APPARATUS FOR CHEMICAL MECHANICAL PLANARIZATION USING A MICROREPLICATED SURFACE
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Patent #:
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Issue Dt:
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11/10/1998
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Application #:
|
08889999
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Filing Dt:
|
07/10/1997
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Title:
|
METHODS AND APPARATUS FOR THE IN-PROCESS DETECTION OF WORKPIECES WITH A PHYSICAL CONTACT PROBE
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Patent #:
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Issue Dt:
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09/28/1999
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Application #:
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08895284
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Filing Dt:
|
07/16/1997
|
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Title:
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METHOD FOR CLEANING WORKPIECE SURFACES AND MONITORING PROBES DURING WORKPIECE PROCESSING
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Patent #:
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Issue Dt:
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02/29/2000
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Application #:
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08899180
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Filing Dt:
|
07/23/1997
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Title:
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APPARATUS FOR HOLDING WORKPIECES DURING LAPPING, HONING, AND POLISHING
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Patent #:
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Issue Dt:
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06/29/1999
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Application #:
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08900479
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Filing Dt:
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07/25/1997
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Title:
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WAFER CARRIER FOR SEMICONDUCTOR WAFER POLISHING MACHINE
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Patent #:
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Issue Dt:
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11/02/1999
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Application #:
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08908902
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Filing Dt:
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08/08/1997
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Title:
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INDEX TABLE AND DRIVE MECHANISM FOR A CHEMICAL MECHANICAL PLANARIZATION MACHINE
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Patent #:
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Issue Dt:
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04/10/2001
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Application #:
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08926700
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Filing Dt:
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09/10/1997
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Title:
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COMBINED CMP AND WAFER CLEANING APPARATUS AND ASSOCIATED METHODS
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Patent #:
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Issue Dt:
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11/02/1999
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Application #:
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08927661
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Filing Dt:
|
09/10/1997
|
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Title:
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APPARATUS FOR SPIN DRYING A WORKPIECE
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Patent #:
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Issue Dt:
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09/14/1999
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Application #:
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08944937
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Filing Dt:
|
10/02/1997
|
|
Title:
|
METHOD AND APPARATUS FOR MONITORING AND CONTROLLING THE FLATNESS OF A POLISHING PAD
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Patent #:
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Issue Dt:
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09/08/1998
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Application #:
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08962979
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Filing Dt:
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10/30/1997
|
|
Title:
|
DUAL COLUMN ABRADING MACHINE
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|
Patent #:
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|
Issue Dt:
|
08/15/2000
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Application #:
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08964975
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Filing Dt:
|
11/05/1997
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Title:
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METHOD AND APPARATUS FOR IMPROVED GEAR CLEANING ASSEMBLY IN POLISHING MACHINE
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|
Patent #:
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Issue Dt:
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12/28/1999
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Application #:
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08967162
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Filing Dt:
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11/10/1997
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Title:
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WORKPIECE CLEANING ELEMENT WITH IMPROVED RIB CONFIGURATION
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Patent #:
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Issue Dt:
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11/02/1999
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Application #:
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08978809
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Filing Dt:
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11/26/1997
|
|
Title:
|
METHOD AND APPARATUS FOR PROCESSING WORKPIECES WITH MULTIPLE POLISHING ELEMENTS
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Patent #:
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|
Issue Dt:
|
11/02/1999
|
Application #:
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08979098
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Filing Dt:
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11/26/1997
|
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Title:
|
METHOD AND APPARATUS FOR ENHANCED CLEANING OF A WORKPIECE WITH MECHANICAL ENERGY
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|
Patent #:
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|
Issue Dt:
|
04/16/2002
|
Application #:
|
08984243
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Filing Dt:
|
12/03/1997
|
|
Title:
|
METHOD AND APPARATUS FOR CONDITIONING POLISHING PADS UTILIZING BRAZED DIAMOND TECHNOLOGY AND TITANIUM NITRIDE
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|
Patent #:
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|
Issue Dt:
|
11/09/1999
|
Application #:
|
08986898
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Filing Dt:
|
12/08/1997
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|
Title:
|
METHODS AND APPARATUS FOR POLISHING USING AN IMPROVED PLATE STABILIZER
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Patent #:
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|
Issue Dt:
|
11/23/1999
|
Application #:
|
09005889
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Filing Dt:
|
01/12/1998
|
|
Title:
|
WORKPIECE CARRIER WITH MONOPIECE PRESSURE PLATE AND LOW GIMBAL POINT
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|
|
Patent #:
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|
Issue Dt:
|
08/01/2006
|
Application #:
|
09008148
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Filing Dt:
|
01/16/1998
|
|
Title:
|
METHODS AND APPARATUS FOR THE CHEMICAL MECHANICAL PLANARIZATION OF ELECTRONIC DEVICES
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|
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|
Patent #:
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Issue Dt:
|
01/02/2001
|
Application #:
|
09010008
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Filing Dt:
|
01/21/1998
|
|
Title:
|
APPARATUS FOR POLISHING USING IMPROVED PLATE SUPPORTS
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|
|
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Patent #:
|
|
Issue Dt:
|
09/21/1999
|
Application #:
|
09020979
|
Filing Dt:
|
02/09/1998
|
|
Title:
|
POST-CMP WET-HF CLEANING STATION
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|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
09024723
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Filing Dt:
|
02/17/1998
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Publication #:
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Pub Dt:
|
08/09/2001
| | | | |
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Title:
|
METHODS AND APPARATUS FOR THE IN-PROCESS MEASUREMENT OF THIN FILM LAYERS
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|
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Patent #:
|
|
Issue Dt:
|
11/30/1999
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Application #:
|
09035319
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Filing Dt:
|
03/05/1998
|
|
Title:
|
METHODS FOR THE IN-PROCESS DETECTION OF WORKPIECES IN A CMP ENVIRONMENT
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/03/2000
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Application #:
|
09058647
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Filing Dt:
|
04/10/1998
|
|
Title:
|
POST-CMP WET-HF CLEANING STATION
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/05/1999
|
Application #:
|
09090666
|
Filing Dt:
|
06/04/1998
|
|
Title:
|
METHODS AND APPARATUS FOR THE IN-PROCESS DETECTION OF WORKPIECES WITH A MONOCHROMATIC LIGHT SOURCE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/18/2001
|
Application #:
|
09096066
|
Filing Dt:
|
06/11/1998
|
|
Title:
|
DISTRIBUTED CONTROL SYSTEM FOR A SEMICONDUCTOR WAFER PROCESSING MACHINE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/05/2000
|
Application #:
|
09097914
|
Filing Dt:
|
06/16/1998
|
|
Title:
|
METHOD AND APPARATUS FOR IMPROVING DIE PLANARITY AND GLOBAL UNIFORMITY OF SEMICONDUCTOR WAFERS IN A CHEMICAL MECHANICAL POLISHING CONTEXT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/12/2002
|
Application #:
|
09196261
|
Filing Dt:
|
11/19/1998
|
|
Title:
|
AUTOMATIC WAFER MAPPING IN A WET ENVIRONMENT ON A WAFER CLEANER
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/14/2002
|
Application #:
|
09261868
|
Filing Dt:
|
03/03/1999
|
|
Title:
|
PAD CONDITIONING FOR COPPER-BASED SEMICONDUCTOR WAFERS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2001
|
Application #:
|
09264066
|
Filing Dt:
|
03/08/1999
|
|
Title:
|
DUAL PURPOSE HANDOFF STATION FOR WORKPIECE POLISHING MACHINE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2001
|
Application #:
|
09264067
|
Filing Dt:
|
03/08/1999
|
|
Title:
|
NON-ABRASIVE CONDITIONING FOR POLISHING PADS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/01/2000
|
Application #:
|
09276983
|
Filing Dt:
|
03/26/1999
|
|
Title:
|
METHOD FOR MANUFACTURING A WORKPIECE CARRIER BACKING PAD AND PRESSURE PLATE FOR POLISHING SEMICONDUCTOR WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/10/2001
|
Application #:
|
09277261
|
Filing Dt:
|
03/26/1999
|
|
Title:
|
METHOD FOR OBTAINING A DESIRED FILM THICKNESS USING CHEMICAL MECHANICAL POLISHING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/29/2003
|
Application #:
|
09280767
|
Filing Dt:
|
03/29/1999
|
|
Title:
|
TWO-STEP CHEMICAL-MECHANICAL PLANARIZATION FOR DAMASCENE STRUCTURES ON SEMICONDUCTOR WAFERS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/12/2001
|
Application #:
|
09281202
|
Filing Dt:
|
03/30/1999
|
|
Title:
|
METHOD AND APPARATUS FOR PAD REMOVAL AND REPLACEMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/05/2000
|
Application #:
|
09286702
|
Filing Dt:
|
04/06/1999
|
|
Title:
|
WAFER PLANARIZATION CARRIER HAVING FLOATING PAD LOAD RING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/19/2002
|
Application #:
|
09303463
|
Filing Dt:
|
04/30/1999
|
|
Title:
|
METHOD AND APPARATUS FOR CONDITIONING POLISHING PADS UTILIZING BRAZED DIAMOND TECHNOLOGY AND TITANIUM NITRIDE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/19/2002
|
Application #:
|
09303483
|
Filing Dt:
|
04/30/1999
|
|
Title:
|
METHOD FOR MAKING A POLISHING APPARATUS UTILIZING BRAZED DIAMOND TECHNOLOGY AND TITANIUM NITRIDE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
|
Application #:
|
UNAVAILABLE
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Filing Dt:
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|
|
Title:
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|
|
|
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|
Patent #:
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Issue Dt:
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|
Application #:
|
UNAVAILABLE
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Filing Dt:
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Title:
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