Patent Assignment Details
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| Reel/Frame: | 012496/0150 | |
| Pages: | 3 |
| | Recorded: | 01/16/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/28/2005
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Application #:
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09788273
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Filing Dt:
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02/16/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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EVALUATING SIDEWALL COVERAGE IN A SEMICONDUCTOR WAFER
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Assignee
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| 125 CONSTITUTION DRIVE |
| MENLO PARK, CALIFORNIA 94025 |
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Correspondence name and address
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SKJERVEN MORRILL MACPHERSON LLP
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OMKAR K. SURVADEVARA
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25 METRO DRIVE, SUITE 700
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SAN JOSE, CA 95110
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