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Reel/Frame:014446/0150   Pages: 12
Recorded: 07/30/2003
Conveyance: SECURITY AGREEMENT
Total properties: 57
1
Patent #:
4484820
Issue Dt:
11/27/1984
Application #:
06381891
Filing Dt:
05/25/1982
Title:
METHOD FOR EVALUATING THE QUALITY OF THE BOND BETWEEN TWO MEMBERS UTILIZING THERMOACOUSTIC MICROSCOPY
2
Patent #:
4513384
Issue Dt:
04/23/1985
Application #:
06389623
Filing Dt:
06/18/1982
Title:
THIN FILM THICKNESS MEASUREMENTS AND DEPTH PROFILING UTILIZING A THERMAL WAVE DETECTION SYSTEM
3
Patent #:
4521118
Issue Dt:
06/04/1985
Application #:
06401511
Filing Dt:
07/26/1982
Title:
METHOD FOR DETECTION OF THERMAL WAVES WITH A LASER PROBE
4
Patent #:
4522510
Issue Dt:
06/11/1985
Application #:
06481275
Filing Dt:
04/01/1983
Title:
THIN FILM THICKNESS MEASUREMENT WITH THERMAL WAVES
5
Patent #:
4636088
Issue Dt:
01/13/1987
Application #:
06612076
Filing Dt:
05/21/1984
Title:
METHOD AND APPARATUS FOR EVALUATING SURFACE CONDITIONS OF A SAMPLE
6
Patent #:
4679946
Issue Dt:
07/14/1987
Application #:
06612077
Filing Dt:
05/21/1984
Title:
EVALUATING BOTH THICKNESS AND COMPOSITIONAL VARIABLES IN A THIN FILM SAMPLE
7
Patent #:
4632561
Issue Dt:
12/30/1986
Application #:
06728759
Filing Dt:
04/30/1985
Title:
EVALUATION OF SURFACE AND SUBSURFACE CHARACTERISTICS OF A SAMPLE
8
Patent #:
4634290
Issue Dt:
01/06/1987
Application #:
06797949
Filing Dt:
11/14/1985
Title:
METHOD AND APPARATUS FOR DETECTING THERMAL WAVES
9
Patent #:
4750822
Issue Dt:
06/14/1988
Application #:
06845606
Filing Dt:
03/28/1986
Title:
METHOD AND APPARATUS FOR OPTICALLY DETECTING SURFACE STATES IN MATERIALS
10
Patent #:
4795260
Issue Dt:
01/03/1989
Application #:
07050911
Filing Dt:
05/15/1987
Title:
APPARATUS FOR LOCATING AND TESTING AREAS OF INTEREST ON A WORKPIECE
11
Patent #:
4854710
Issue Dt:
08/08/1989
Application #:
07076876
Filing Dt:
07/23/1987
Title:
METHOD AND APPARATUS FOR EVALUATING SURFACE AND SUBSURFACE FEATURES IN A SEMICONDUCTOR
12
Patent #:
4999014
Issue Dt:
03/12/1991
Application #:
07347812
Filing Dt:
05/04/1989
Title:
METHOD AND APPARATUS FOR MEASURING THICKNESS OF THIN FILMS
13
Patent #:
4952063
Issue Dt:
08/28/1990
Application #:
07351540
Filing Dt:
05/15/1989
Title:
METHOD AND APPARATUS FOR EVALUATING SURFACE AND SUBSURFACE FEATURES IN A SEMICONDUCTOR
14
Patent #:
5042951
Issue Dt:
08/27/1991
Application #:
07409393
Filing Dt:
09/19/1989
Title:
HIGH RESOLUTION ELLIPSOMETRIC APPARATUS
15
Patent #:
5074669
Issue Dt:
12/24/1991
Application #:
07448882
Filing Dt:
12/12/1989
Title:
METHOD AND APPARATUS FOR EVALUATING ION IMPLANT DOSAGE LEVELS IN SEMICONDUCTORS
16
Patent #:
5042952
Issue Dt:
08/27/1991
Application #:
07550333
Filing Dt:
07/09/1990
Title:
METHOD AND APPARATUS FOR EVALUATING SURFACE AND SUBSURFACE AND SUBSURFACE FEATURES IN A SEMICONDUCTOR
17
Patent #:
5149978
Issue Dt:
09/22/1992
Application #:
07624036
Filing Dt:
12/07/1990
Title:
APPARATUS FOR MEASURING GRAIN SIZES IN METALIZED LAYERS
18
Patent #:
5159412
Issue Dt:
10/27/1992
Application #:
07670040
Filing Dt:
03/15/1991
Title:
OPTICAL MEASUREMENT DEVICE WITH ENHANCED SENSITIVITY
19
Patent #:
5181080
Issue Dt:
01/19/1993
Application #:
07813900
Filing Dt:
12/23/1991
Title:
METHOD AND APPARATUS FOR EVALUATING THE THICKNESS OF THIN FILMS
20
Patent #:
5228776
Issue Dt:
07/20/1993
Application #:
07879760
Filing Dt:
05/06/1992
Title:
APPARATUS FOR EVALUATING THERMAL AND ELECTRICAL CHARACTERISTICS IN A SAMPLE
21
Patent #:
5412473
Issue Dt:
05/02/1995
Application #:
08093178
Filing Dt:
07/16/1993
Title:
MULTIPLE ANGLE SPECTROSCOPIC ANALYZER UTILIZING INTERFEROMETRIC AND ELLIPSOMETRIC DEVICES
22
Patent #:
5596406
Issue Dt:
01/21/1997
Application #:
08532871
Filing Dt:
08/15/1995
Title:
SAMPLE CHARACTERISTIC ANALYSIS UTILZING MULTI WAVELENGTH AND MULTI ANGLE POLARIZATION AND MAGNITUDE CHANGE DETECTION
23
Patent #:
5596411
Issue Dt:
01/21/1997
Application #:
08614522
Filing Dt:
03/18/1996
Title:
INTEGRATED SPECTROSCOPIC ELLIPSOMETER
24
Patent #:
5978074
Issue Dt:
11/02/1999
Application #:
08887865
Filing Dt:
07/03/1997
Title:
APPARATUS FOR EVALUATING METALIZED LAYERS ON SEMICONDUCTORS
25
Patent #:
5798837
Issue Dt:
08/25/1998
Application #:
08890697
Filing Dt:
07/11/1997
Title:
THIN FILM OPTICAL MEASUREMENT SYSTEM AND METHOD WITH CALIBRATING ELLIPSOMETER
26
Patent #:
6278519
Issue Dt:
08/21/2001
Application #:
09015839
Filing Dt:
01/29/1998
Title:
APPARATUS FOR ANALYZING MULTI-LAYER THIN FILM STACKS ON SEMICONDUCTORS
27
Patent #:
5973787
Issue Dt:
10/26/1999
Application #:
09076673
Filing Dt:
05/12/1998
Title:
BROADBAND SPECTROSCOPIC ROTATING COMPENSATOR ELLIPSOMETER
28
Patent #:
5900939
Issue Dt:
05/04/1999
Application #:
09098880
Filing Dt:
06/17/1998
Title:
THIN FILM OPTICAL MEASUREMENT SYSTEM AND METHOD WITH CALIBRATING ELLIPSOMETER
29
Patent #:
5953446
Issue Dt:
09/14/1999
Application #:
09169753
Filing Dt:
10/09/1998
Title:
METHOD AND APPARATUS FOR OPTICAL DATA ANALYSIS
30
Patent #:
6304326
Issue Dt:
10/16/2001
Application #:
09247121
Filing Dt:
02/08/1999
Title:
THIN FILM OPTICAL MEASUREMENT SYSTEM AND METHOD WITH CALIBRATING ELLIPSOMETER
31
Patent #:
6134012
Issue Dt:
10/17/2000
Application #:
09345560
Filing Dt:
06/30/1999
Title:
BROADBAND SPECTROSCOPIC ROTATING COMPENSATOR ELLIPSOMETER
32
Patent #:
6191846
Issue Dt:
02/20/2001
Application #:
09431654
Filing Dt:
11/01/1999
Title:
APPARATUS FOR EVALUATING METALIZED LAYERS ON SEMICONDUCTORS
33
Patent #:
6181421
Issue Dt:
01/30/2001
Application #:
09434678
Filing Dt:
11/05/1999
Title:
ELLIPSOMETER AND POLARIMETER WITH ZERO-ORDER PLATE COMPENSATOR
34
Patent #:
6261853
Issue Dt:
07/17/2001
Application #:
09499478
Filing Dt:
02/07/2000
Title:
Method and appaaratus for preparing semiconductor wafers for measurement
35
Patent #:
6535285
Issue Dt:
03/18/2003
Application #:
09499974
Filing Dt:
02/08/2000
Title:
COMBINATION THERMAL WAVE AND OPTICAL SPECTROSCOPY MEASUREMENT SYSTEM
36
Patent #:
6472238
Issue Dt:
10/29/2002
Application #:
09500744
Filing Dt:
02/09/2000
Title:
EVALUATION OF ETCHING PROCESSES IN SEMICONDUCTORS
37
Patent #:
6453006
Issue Dt:
09/17/2002
Application #:
09527389
Filing Dt:
03/16/2000
Title:
CALIBRATION AND ALIGNMENT OF X-RAY REFLECTOMETRIC SYSTEMS
38
Patent #:
6532076
Issue Dt:
03/11/2003
Application #:
09542724
Filing Dt:
04/04/2000
Title:
METHOD AND APPARATUS FOR MULTIDOMAIN DATA ANALYSIS
39
Patent #:
6297880
Issue Dt:
10/02/2001
Application #:
09563152
Filing Dt:
05/02/2000
Title:
Apparatus for analyzing multi-layer thin film stacks on semiconductors
40
Patent #:
6563586
Issue Dt:
05/13/2003
Application #:
09613176
Filing Dt:
07/10/2000
Title:
WAFER METROLOGY APPARATUS AND METHOD
41
Patent #:
6320657
Issue Dt:
11/20/2001
Application #:
09619456
Filing Dt:
07/19/2000
Title:
Broadband spectroscopic rotating compensator ellipsometer
42
Patent #:
6320666
Issue Dt:
11/20/2001
Application #:
09688562
Filing Dt:
10/16/2000
Title:
Apparatus for evaluating metalized layers on semiconductors
43
Patent #:
6408048
Issue Dt:
06/18/2002
Application #:
09761132
Filing Dt:
01/16/2001
Publication #:
US20020001364
Pub Dt:
01/03/2002
Title:
APPARATUS FOR ANALYZING SAMPLES USING COMBINED THERMAL WAVE AND X-RAY REFLECTANCE MEASUREMENTS
44
Patent #:
6515744
Issue Dt:
02/04/2003
Application #:
09779761
Filing Dt:
02/08/2001
Publication #:
US20020105647
Pub Dt:
08/08/2002
Title:
SMALL SPOT ELLIPSOMETER
45
Patent #:
6465265
Issue Dt:
10/15/2002
Application #:
09804765
Filing Dt:
03/13/2001
Publication #:
US20020045282
Pub Dt:
04/18/2002
Title:
ANALYSIS OF INTERFACE LAYER CHARACTERISTICS
46
Patent #:
6429943
Issue Dt:
08/06/2002
Application #:
09818703
Filing Dt:
03/27/2001
Title:
CRITICAL DIMENSION ANALYSIS WITH SIMULTANEOUS MULTIPLE ANGLE OF INCIDENCE MEASUREMENTS
47
Patent #:
6417921
Issue Dt:
07/09/2002
Application #:
09880203
Filing Dt:
06/13/2001
Publication #:
US20010033378
Pub Dt:
10/25/2001
Title:
APPARATUS FOR ANALYZING MULTI-LAYER THIN FILM STACKS ON SEMICONDUCTORS
48
Patent #:
6532070
Issue Dt:
03/11/2003
Application #:
09884262
Filing Dt:
06/19/2001
Title:
METHOD FOR DETERMINING ION CONCENTRATION AND ENERGY OF SHALLOW JUNCTION IMPLANTS
49
Patent #:
6411385
Issue Dt:
06/25/2002
Application #:
09886514
Filing Dt:
06/21/2001
Publication #:
US20010046049
Pub Dt:
11/29/2001
Title:
THIN FILM OPTICAL MEASUREMENT SYSTEM AND METHOD WITH CALIBRATING ELLIPSOMETER
50
Patent #:
6449043
Issue Dt:
09/10/2002
Application #:
09944831
Filing Dt:
08/31/2001
Publication #:
US20020018205
Pub Dt:
02/14/2002
Title:
BROADBAND SPECTROSCOPIC ROTATING COMPENSATOR ELLIPSOMETER
51
Patent #:
6452685
Issue Dt:
09/17/2002
Application #:
09957478
Filing Dt:
09/20/2001
Publication #:
US20020015157
Pub Dt:
02/07/2002
Title:
APPARATUS FOR EVALUATING METALIZED LAYERS ON SEMICONDUCTORS
52
Patent #:
6509199
Issue Dt:
01/21/2003
Application #:
09973130
Filing Dt:
10/09/2001
Publication #:
US20020045284
Pub Dt:
04/18/2002
Title:
SPATIAL AVERAGING TECHNIQUE FOR ELLIPSOMETRY AND REFLECTOMETRY
53
Patent #:
6507634
Issue Dt:
01/14/2003
Application #:
10067604
Filing Dt:
02/04/2002
Title:
SYSTEM AND METHOD FOR X-RAY REFLECTOMETRY MEASUREMENT OF LOW DENSITY FILMS
54
Patent #:
6522413
Issue Dt:
02/18/2003
Application #:
10098641
Filing Dt:
03/15/2002
Publication #:
US20020097403
Pub Dt:
07/25/2002
Title:
APPARATUS FOR EVALUATING METALIZED LAYERS ON SEMICONDUCTORS
55
Patent #:
6515746
Issue Dt:
02/04/2003
Application #:
10138984
Filing Dt:
05/03/2002
Publication #:
US20020176081
Pub Dt:
11/28/2002
Title:
THIN FILM OPTICAL MEASUREMENT SYSTEM AND METHOD WITH CALIBRATING ELLIPSOMETER
56
Patent #:
6512815
Issue Dt:
01/28/2003
Application #:
10139727
Filing Dt:
05/06/2002
Publication #:
US20020154736
Pub Dt:
10/24/2002
Title:
APPARATUS FOR ANALYZING SAMPLES USING COMBINED THERMAL WAVE AND X-RAY REFLECTANCE MEASUREMENTS
57
Patent #:
6567213
Issue Dt:
05/20/2003
Application #:
10141256
Filing Dt:
05/08/2002
Publication #:
US20020154302
Pub Dt:
10/24/2002
Title:
APPARATUS FOR ANALYZING MULTI-LAYER THIN FILM STACKS ON SEMICONDUCTORS
Assignor
1
THERMA-WAVE, INC.
Exec Dt:
06/13/2003
Assignee
1
SILICON VALLEY BANK
3003 TASMAN DR.
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
BUCHALTER, NEMER & FIELD & YOUNGER
MRS. KIM WALKER
601 SOUTH FIGUEROA ST., STE. 2400
LOS ANGELES, CA 90017

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