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Total properties:
26
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Patent #:
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Issue Dt:
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03/02/2010
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Application #:
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11786145
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Filing Dt:
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04/10/2007
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Publication #:
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Pub Dt:
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07/31/2008
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Title:
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LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
|
02/08/2011
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Application #:
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11787180
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Filing Dt:
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04/13/2007
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Publication #:
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Pub Dt:
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05/06/2010
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Title:
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LASER SYSTEM
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Patent #:
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Issue Dt:
|
12/21/2010
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Application #:
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11787463
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Filing Dt:
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04/16/2007
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Publication #:
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Pub Dt:
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11/01/2007
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Title:
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EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER
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Patent #:
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Issue Dt:
|
11/16/2010
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Application #:
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11796065
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Filing Dt:
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04/25/2007
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Publication #:
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Pub Dt:
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08/28/2008
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Title:
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LASER GAS INJECTION SYSTEM
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Patent #:
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Issue Dt:
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08/12/2014
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Application #:
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11805596
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Filing Dt:
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05/23/2007
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Publication #:
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Pub Dt:
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12/06/2007
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Title:
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Device and method to create a low divergence, high power laser beam for material processing applications
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Patent #:
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Issue Dt:
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08/26/2014
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Application #:
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11818829
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Filing Dt:
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06/15/2007
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Publication #:
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Pub Dt:
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12/18/2008
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Title:
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CROSS-FLOW FAN IMPELLER FOR A TRANSVERSLEY EXCITED, PULSED, GAS DISCHARGE LASER
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Patent #:
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Issue Dt:
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03/01/2011
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Application #:
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11827803
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Filing Dt:
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07/13/2007
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Publication #:
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Pub Dt:
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01/15/2009
| | | | |
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Title:
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LASER PRODUCED PLASMA EUV LIGHT SOURCE HAVING A DROPLET STREAM PRODUCED USING A MODULATED DISTURBANCE WAVE
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Patent #:
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Issue Dt:
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02/02/2010
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Application #:
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11897644
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Filing Dt:
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08/31/2007
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Publication #:
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Pub Dt:
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03/05/2009
| | | | |
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Title:
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GAS MANAGEMENT SYSTEM FOR A LASER-PRODUCED-PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
|
11/09/2010
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Application #:
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11900527
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Filing Dt:
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09/11/2007
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Publication #:
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Pub Dt:
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03/12/2009
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Title:
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ULTRAVIOLET LASER LIGHT SOURCE PULSE ENERGY CONTROL SYSTEM
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Patent #:
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Issue Dt:
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01/05/2010
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Application #:
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11973671
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Filing Dt:
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10/10/2007
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Publication #:
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Pub Dt:
|
03/26/2009
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Title:
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IMMERSION LITHOGRAPHY LASER LIGHT SOURCE WITH PULSE STRETCHER
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|
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Patent #:
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Issue Dt:
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08/16/2011
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Application #:
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11981450
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Filing Dt:
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10/30/2007
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|
Publication #:
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Pub Dt:
|
07/10/2008
| | | | |
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Title:
|
LASER SYSTEM
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|
|
|
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Patent #:
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|
Issue Dt:
|
10/12/2010
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Application #:
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12002073
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Filing Dt:
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12/14/2007
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Publication #:
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Pub Dt:
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06/18/2009
| | | | |
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Title:
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SYSTEM MANAGING GAS FLOW BETWEEN CHAMBERS OF AN EXTREME ULTRAVIOLET (EUV) PHOTOLITHOGRAPHY APPARATUS
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Patent #:
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Issue Dt:
|
02/09/2010
|
Application #:
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12002939
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Filing Dt:
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12/18/2007
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|
Publication #:
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Pub Dt:
|
10/16/2008
| | | | |
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Title:
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METHOD AND APPARATUS FOR VIBRATION REDUCTION IN LASER SYSTEM LINE NARROWING UNIT WAVELENGTH SELECTION OPTICAL ELEMENT
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Patent #:
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Issue Dt:
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03/29/2011
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Application #:
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12004905
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Filing Dt:
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12/20/2007
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Publication #:
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Pub Dt:
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06/25/2009
| | | | |
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Title:
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DRIVE LASER FOR EUV LIGHT SOURCE
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|
|
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Patent #:
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|
Issue Dt:
|
05/13/2014
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Application #:
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12027442
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Filing Dt:
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02/07/2008
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Publication #:
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Pub Dt:
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08/13/2009
| | | | |
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Title:
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ILLUMINATION APPARATUS AND METHOD FOR CONTROLLING ENERGY OF A LASER SOURCE
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Patent #:
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|
Issue Dt:
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10/26/2010
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Application #:
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12082253
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Filing Dt:
|
04/09/2008
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|
Publication #:
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Pub Dt:
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09/25/2008
| | | | |
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Title:
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METHOD AND APPARATUS FOR STABILIZING AND TUNING THE BANDWIDTH OF LASER LIGHT
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|
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Patent #:
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|
Issue Dt:
|
03/01/2011
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Application #:
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12082301
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Filing Dt:
|
04/09/2008
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Publication #:
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Pub Dt:
|
10/16/2008
| | | | |
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Title:
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LASER LITHOGRAPHY SYSTEM WITH IMPROVED BANDWIDTH CONTROL
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|
|
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Patent #:
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|
Issue Dt:
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11/22/2011
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Application #:
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12210086
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Filing Dt:
|
09/12/2008
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|
Publication #:
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Pub Dt:
|
03/18/2010
| | | | |
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Title:
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BLIND MOTORIZED COUPLING ARRANGEMENTS FOR COUPLING UV LIGHT SOURCE SUBSYSTEM AND SCANNER SUBSYSTEM IN A UV LITHOGRAPHY SYSTEM AND METHODS THEREFOR
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Patent #:
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|
Issue Dt:
|
01/18/2011
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Application #:
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12214736
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Filing Dt:
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06/19/2008
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Publication #:
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Pub Dt:
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09/17/2009
| | | | |
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Title:
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SYSTEMS AND METHODS FOR TARGET MATERIAL DELIVERY IN A LASER PRODUCED PLASMA EUV LIGHT SOURCE
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|
|
|
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Patent #:
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|
Issue Dt:
|
08/27/2013
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Application #:
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12221822
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Filing Dt:
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08/06/2008
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Publication #:
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Pub Dt:
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02/11/2010
| | | | |
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Title:
|
Debris protection system having a magnetic field for an EUV light source
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/09/2012
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Application #:
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12577077
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Filing Dt:
|
10/09/2009
|
|
Publication #:
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Pub Dt:
|
04/22/2010
| | | | |
|
Title:
|
VERY HIGH POWER LASER CHAMBER OPTICAL IMPROVEMENTS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/21/2013
|
Application #:
|
12945719
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Filing Dt:
|
11/12/2010
|
|
Publication #:
|
|
Pub Dt:
|
03/10/2011
| | | | |
|
Title:
|
EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/01/2012
|
Application #:
|
12987039
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Filing Dt:
|
01/07/2011
|
|
Publication #:
|
|
Pub Dt:
|
05/05/2011
| | | | |
|
Title:
|
LASER SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/09/2014
|
Application #:
|
13231882
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Filing Dt:
|
09/13/2011
|
|
Publication #:
|
|
Pub Dt:
|
01/05/2012
| | | | |
|
Title:
|
LASER SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/03/2013
|
Application #:
|
13469009
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Filing Dt:
|
05/10/2012
|
|
Publication #:
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Pub Dt:
|
08/30/2012
| | | | |
|
Title:
|
EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER
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|
|
|
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Patent #:
|
|
Issue Dt:
|
07/22/2014
|
Application #:
|
13493871
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Filing Dt:
|
06/11/2012
|
|
Publication #:
|
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Pub Dt:
|
12/06/2012
| | | | |
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Title:
|
LASER-PRODUCED-PLASMA EUV LIGHT SOURCE
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