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Patent #:
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Issue Dt:
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09/14/2004
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Application #:
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10104887
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Filing Dt:
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03/21/2002
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Publication #:
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Pub Dt:
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09/25/2003
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Title:
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METHOD AND SYSTEM OF USING A SCANNING ELECTRON MICROSCOPE IN SEMICONDUCTOR WAFER INSPECTION WITH Z-STAGE FOCUS
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Patent #:
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Issue Dt:
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11/09/2004
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Application #:
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10302809
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Filing Dt:
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11/21/2002
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Publication #:
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Pub Dt:
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07/24/2003
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Title:
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METHOD FOR IN-LINE MONITORING OF VIA/CONTACT HOLES ETCH PROCESS BASED ON TEST STRUCTURES IN SEMICONDUCTOR WAFER MANUFACTURING
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Patent #:
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Issue Dt:
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09/12/2006
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Application #:
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10865230
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Filing Dt:
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06/09/2004
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Publication #:
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Pub Dt:
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02/03/2005
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Title:
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METHOD FOR IN-LINE MONITORING OF VIA/CONTACT HOLES ETCH PROCESS BASED ON TEST STRUCTURES IN SEMICONDUCTOR WAFER MANUFACTURING
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Patent #:
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Issue Dt:
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11/13/2007
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Application #:
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11035048
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Filing Dt:
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01/12/2005
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Publication #:
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Pub Dt:
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09/15/2005
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Title:
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SYSTEM AND METHOD FOR REMOVING CHARGES WITH ENHANCED EFFICIENCY
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Patent #:
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Issue Dt:
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01/10/2012
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Application #:
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11199898
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Filing Dt:
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08/08/2005
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Title:
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SYSTEM AND METHOD FOR REMOVING ORGANIC RESIDUE FROM A CHARGED PARTICLE BEAM SYSTEM
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Patent #:
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Issue Dt:
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02/26/2008
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Application #:
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11203674
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Filing Dt:
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08/12/2005
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Publication #:
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Pub Dt:
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02/23/2006
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Title:
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SYSTEM AND METHOD FOR SAMPLE CHARGE CONTROL
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Patent #:
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Issue Dt:
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01/06/2009
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Application #:
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11452544
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Filing Dt:
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06/13/2006
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Publication #:
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Pub Dt:
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10/19/2006
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Title:
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METHOD FOR IN-LINE MONITORING OF VIA/CONTACT HOLES ETCH PROCESS BASED ON TEST STRUCTURES IN SEMICONDUCTOR WAFER MANUFACTURING
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Patent #:
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Issue Dt:
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02/22/2011
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Application #:
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11476411
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Filing Dt:
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06/27/2006
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Title:
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ELECTRON GUN WITH MAGNETIC IMMERSION DOUBLE CONDENSER LENSES
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Patent #:
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Issue Dt:
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06/10/2014
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Application #:
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11515328
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Filing Dt:
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08/31/2006
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Publication #:
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Pub Dt:
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03/06/2008
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Title:
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METHOD AND SYSTEM FOR DETECTING OR REVIEWING OPEN CONTACTS ON A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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01/18/2011
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Application #:
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11668846
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Filing Dt:
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01/30/2007
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Publication #:
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Pub Dt:
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04/09/2009
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Title:
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CHARGED PARTICLE DETECTION DEVICES
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11755705
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Filing Dt:
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05/30/2007
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Publication #:
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Pub Dt:
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01/10/2008
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Title:
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ELECTRON BEAM APPARATUS TO COLLECT SIDE-VIEW AND/OR PLANE-VIEW IMAGE WITH IN-LENS SECTIONAL DETECTOR
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Patent #:
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Issue Dt:
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08/03/2010
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Application #:
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11759138
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Filing Dt:
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06/06/2007
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Publication #:
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Pub Dt:
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12/11/2008
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Title:
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OPTICAL AUTO FOCUSING SYSTEM AND METHOD FOR ELECTRON BEAM INSPECTION TOOL
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Patent #:
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Issue Dt:
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11/02/2010
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Application #:
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11923012
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Filing Dt:
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10/24/2007
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Publication #:
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Pub Dt:
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05/29/2008
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Title:
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SYSTEM AND METHOD FOR A CHARGED PARTICLE BEAM
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11939530
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Filing Dt:
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11/13/2007
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Publication #:
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Pub Dt:
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04/30/2009
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Title:
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SYSTEM AND METHOD TO DETERMINE FOCUS PARAMETERS DURING AN ELECTRON BEAM INSPECTION
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Patent #:
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Issue Dt:
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08/30/2011
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Application #:
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11951173
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Filing Dt:
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12/05/2007
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Publication #:
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Pub Dt:
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09/04/2008
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Title:
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IN-LINE OVERLAY MEASUREMENT USING CHARGED PARTICLE BEAM SYSTEM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12109243
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Filing Dt:
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04/24/2008
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Publication #:
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Pub Dt:
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10/30/2008
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Title:
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METHOD FOR DETERMINING ABNORMAL CHARACTERISTICS IN INTEGRATED CIRCUIT MANUFACTURING PROCESS
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Patent #:
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Issue Dt:
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01/03/2012
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Application #:
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12110147
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Filing Dt:
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04/25/2008
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Publication #:
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Pub Dt:
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10/30/2008
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Title:
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STRUCTURE AND METHOD FOR DETERMINING A DEFECT IN INTEGRATED CIRCUIT MANUFACTURING PROCESS
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Patent #:
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Issue Dt:
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07/20/2010
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Application #:
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12130879
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Filing Dt:
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05/30/2008
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Publication #:
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Pub Dt:
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12/03/2009
| | | | |
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Title:
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ELECTRON BEAM APPARATUS
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Patent #:
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Issue Dt:
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09/20/2011
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Application #:
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12145036
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Filing Dt:
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06/24/2008
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Publication #:
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Pub Dt:
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12/24/2009
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Title:
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THERMAL FIELD EMISSION CATHODE
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Patent #:
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Issue Dt:
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07/10/2012
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Application #:
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12179560
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Filing Dt:
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07/24/2008
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Publication #:
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Pub Dt:
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01/28/2010
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Title:
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APPARATUS FOR INCREASING ELECTRIC CONDUCTIVITY TO A SEMICONDUCTOR WAFER SUBSTRATE WHEN EXPOSURE TO ELECTRON BEAM
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Patent #:
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Issue Dt:
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04/19/2011
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Application #:
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12204282
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Filing Dt:
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09/04/2008
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Publication #:
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Pub Dt:
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12/25/2008
| | | | |
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Title:
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CHARGED PARTICLE SYSTEM INCLUDING SEGMENTED DETECTION ELEMENTS
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|
|
|
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Patent #:
|
|
Issue Dt:
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07/05/2011
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Application #:
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12232834
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Filing Dt:
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09/25/2008
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|
Publication #:
|
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Pub Dt:
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03/25/2010
| | | | |
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Title:
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METHOD FOR REGULATING SCANNING SAMPLE SURFACE CHARGE IN CONTINUOUS AND LEAP-AND-SCAN SCANNING MODE IMAGING PROCESS
|
|
|
|
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Patent #:
|
|
Issue Dt:
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06/05/2012
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Application #:
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12240048
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Filing Dt:
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09/29/2008
|
|
Publication #:
|
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Pub Dt:
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04/01/2010
| | | | |
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Title:
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STRUCTURE AND METHOD FOR DETERMINING A DEFECT IN INTEGRATED CIRCUIT MANUFACTURING PROCESS
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|
|
|
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Patent #:
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Issue Dt:
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02/07/2012
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Application #:
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12247536
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Filing Dt:
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10/08/2008
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Publication #:
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Pub Dt:
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04/08/2010
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Title:
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METHOD OF CONTROLLING PARTICLE ABSORPTION ON A WAFER SAMPLE BEING INSPECTED BY A CHARGED PARTICLE BEAM IMAGING SYSTEM
|
|
|
|
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Patent #:
|
|
Issue Dt:
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01/11/2011
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Application #:
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12249640
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Filing Dt:
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10/10/2008
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|
Publication #:
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Pub Dt:
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04/15/2010
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Title:
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METHOD AND HANDLING APPARATUS FOR PLACING PATTERNING DEVICE ON SUPPORT MEMBER FOR CHARGED PARTICLE BEAM IMAGING
|
|
|
|
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Patent #:
|
|
Issue Dt:
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11/23/2010
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Application #:
|
12256828
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Filing Dt:
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10/23/2008
|
|
Publication #:
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Pub Dt:
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04/29/2010
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Title:
|
PATTERNING DEVICE HOLDING APPARATUS AND APPLICATION THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/14/2011
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Application #:
|
12257304
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Filing Dt:
|
10/23/2008
|
|
Publication #:
|
|
Pub Dt:
|
04/29/2010
| | | | |
|
Title:
|
ELECTRON BEAM APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/10/2012
|
Application #:
|
12259216
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Filing Dt:
|
10/27/2008
|
|
Publication #:
|
|
Pub Dt:
|
04/29/2010
| | | | |
|
Title:
|
WAFER GROUNDING METHODOLOGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/15/2010
|
Application #:
|
12289353
|
Filing Dt:
|
10/27/2008
|
|
Publication #:
|
|
Pub Dt:
|
04/29/2010
| | | | |
|
Title:
|
TEST STRUCTURE FOR CHARGED PARTICLE BEAM INSPECTION AND METHOD FOR FABRICATING THE SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/05/2011
|
Application #:
|
12331336
|
Filing Dt:
|
12/09/2008
|
|
Publication #:
|
|
Pub Dt:
|
06/10/2010
| | | | |
|
Title:
|
OPERATION STAGE FOR WAFER EDGE INSPECTION AND REVIEW
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/10/2012
|
Application #:
|
12335458
|
Filing Dt:
|
12/15/2008
|
|
Publication #:
|
|
Pub Dt:
|
06/17/2010
| | | | |
|
Title:
|
E-BEAM DEFECT REVIEW SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/19/2014
|
Application #:
|
12339558
|
Filing Dt:
|
12/19/2008
|
|
Publication #:
|
|
Pub Dt:
|
06/24/2010
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR HEATING SUBSTRATE IN VACUUM ENVIRONMENT AND METHOD AND SYSTEM FOR IDENTIFYING DEFECTS ON SUBSTRATE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/08/2011
|
Application #:
|
12342821
|
Filing Dt:
|
12/23/2008
|
|
Publication #:
|
|
Pub Dt:
|
06/24/2010
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR DETERMINING A DEFECT DURING SAMPLE INSPECTION INVOLVING CHARGED PARTICLE BEAM IMAGING
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12343201
|
Filing Dt:
|
12/23/2008
|
|
Publication #:
|
|
Pub Dt:
|
06/24/2010
| | | | |
|
Title:
|
METHOD AND SYSTEM OF CLASSIFYING DEFECTS ON A WAFER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/03/2012
|
Application #:
|
12344328
|
Filing Dt:
|
12/26/2008
|
|
Publication #:
|
|
Pub Dt:
|
07/01/2010
| | | | |
|
Title:
|
APPARATUS FOR DETECTING A SAMPLE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/08/2011
|
Application #:
|
12357969
|
Filing Dt:
|
01/22/2009
|
|
Publication #:
|
|
Pub Dt:
|
07/22/2010
| | | | |
|
Title:
|
CHARGED PARTICLE BEAM IMAGING METHOD AND SYSTEM THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/26/2011
|
Application #:
|
12397042
|
Filing Dt:
|
03/03/2009
|
|
Publication #:
|
|
Pub Dt:
|
09/09/2010
| | | | |
|
Title:
|
METHOD FOR CHARACTERIZING VIBRATIONAL PERFORMANCE OF CHARGED PARTICLE BEAM MICROSCOPE SYSTEM AND APPLICATION THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/22/2011
|
Application #:
|
12400757
|
Filing Dt:
|
03/09/2009
|
|
Publication #:
|
|
Pub Dt:
|
10/01/2009
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR CHARGED PARTICLE BEAM INSPECTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/29/2011
|
Application #:
|
12414130
|
Filing Dt:
|
03/30/2009
|
|
Publication #:
|
|
Pub Dt:
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09/30/2010
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR DETERMINING A DEFECT DURING CHARGED PARTICLE BEAM INSPECTION OF A SAMPLE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/19/2011
|
Application #:
|
12416047
|
Filing Dt:
|
03/31/2009
|
|
Publication #:
|
|
Pub Dt:
|
10/01/2009
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR OBTAINING IMAGES BY RASTER SCANNING CHARGED PARTICLE BEAM OVER PATTERNED SUBSTRATE ON A CONTINUOUS MODE STAGE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/11/2014
|
Application #:
|
12420200
|
Filing Dt:
|
04/08/2009
|
|
Publication #:
|
|
Pub Dt:
|
10/14/2010
| | | | |
|
Title:
|
CHARGED PARTICLE BEAM IMAGING ASSEMBLY AND IMAGING METHOD THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/16/2013
|
Application #:
|
12420224
|
Filing Dt:
|
04/08/2009
|
|
Publication #:
|
|
Pub Dt:
|
10/14/2010
| | | | |
|
Title:
|
TEST STRUCTURE FOR CHARGED PARTICLE BEAM INSPECTION AND METHOD FOR DEFECT DETERMINATION USING THE SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/06/2012
|
Application #:
|
12430453
|
Filing Dt:
|
04/27/2009
|
|
Publication #:
|
|
Pub Dt:
|
10/28/2010
| | | | |
|
Title:
|
METHOD FOR VENTING GAS INTO CLOSED SPACE AND GAS SUPPLY ASSEMBLY THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/01/2011
|
Application #:
|
12433762
|
Filing Dt:
|
04/30/2009
|
|
Publication #:
|
|
Pub Dt:
|
11/04/2010
| | | | |
|
Title:
|
METHOD FOR INSPECTING OVERLAY SHIFT DEFECT DURING SEMICONDUCTOR MANUFACTURING AND APPARATUS THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/04/2016
|
Application #:
|
12468026
|
Filing Dt:
|
05/18/2009
|
|
Publication #:
|
|
Pub Dt:
|
11/18/2010
| | | | |
|
Title:
|
DISCHARGING METHOD FOR CHARGED PARTICLE BEAM IMAGING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/24/2014
|
Application #:
|
12483220
|
Filing Dt:
|
06/11/2009
|
|
Publication #:
|
|
Pub Dt:
|
12/16/2010
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR IDENTIFYING PLUG-TO-PLUG SHORT FROM A CHARGED PARTICLE MICROSCOPIC IMAGE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/04/2014
|
Application #:
|
12489804
|
Filing Dt:
|
06/23/2009
|
|
Publication #:
|
|
Pub Dt:
|
12/23/2010
| | | | |
|
Title:
|
METHOD FOR CHARACTERIZING IDENTIFIED DEFECTS DURING CHARGED PARTICLE BEAM INSPECTION AND APPLICATION THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/30/2012
|
Application #:
|
12491013
|
Filing Dt:
|
06/24/2009
|
|
Publication #:
|
|
Pub Dt:
|
12/30/2010
| | | | |
|
Title:
|
METHOD FOR EXAMINING A SAMPLE BY USING A CHARGED PARTICLE BEAM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/08/2014
|
Application #:
|
12540357
|
Filing Dt:
|
08/12/2009
|
|
Publication #:
|
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Pub Dt:
|
02/17/2011
| | | | |
|
Title:
|
CHARGED PARTICLE BEAM INSPECTION METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/09/2014
|
Application #:
|
12552270
|
Filing Dt:
|
09/01/2009
|
|
Publication #:
|
|
Pub Dt:
|
03/03/2011
| | | | |
|
Title:
|
WAFER GROUNDING AND BIASING METHOD, APPARATUS, AND APPLICATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/10/2015
|
Application #:
|
12553067
|
Filing Dt:
|
09/02/2009
|
|
Publication #:
|
|
Pub Dt:
|
03/03/2011
| | | | |
|
Title:
|
METHOD FOR FORMING MEMORY CELL TRANSISTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/23/2012
|
Application #:
|
12553072
|
Filing Dt:
|
09/02/2009
|
|
Publication #:
|
|
Pub Dt:
|
03/03/2011
| | | | |
|
Title:
|
SUBSTRATE AND DIE DEFECT INSPECTION METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/04/2011
|
Application #:
|
12609262
|
Filing Dt:
|
10/30/2009
|
|
Publication #:
|
|
Pub Dt:
|
05/05/2011
| | | | |
|
Title:
|
Z-STAGE CONFIGURATION AND APPLICATION THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/23/2011
|
Application #:
|
12636007
|
Filing Dt:
|
12/11/2009
|
|
Publication #:
|
|
Pub Dt:
|
06/16/2011
| | | | |
|
Title:
|
MULTI-AXIS MAGNETIC LENS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/08/2013
|
Application #:
|
12715766
|
Filing Dt:
|
03/02/2010
|
|
Publication #:
|
|
Pub Dt:
|
09/08/2011
| | | | |
|
Title:
|
Charged Particle Beam Detection Unit with Multi Type Detection Subunits
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/07/2012
|
Application #:
|
12764890
|
Filing Dt:
|
04/21/2010
|
|
Publication #:
|
|
Pub Dt:
|
10/27/2011
| | | | |
|
Title:
|
PARTICLE DETECTION SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/29/2014
|
Application #:
|
12764902
|
Filing Dt:
|
04/21/2010
|
|
Publication #:
|
|
Pub Dt:
|
10/27/2011
| | | | |
|
Title:
|
DYNAMIC FOCUS ADJUSTMENT WITH OPTICAL HEIGHT DETECTION APPARATUS IN ELECTRON BEAM SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/07/2014
|
Application #:
|
12787139
|
Filing Dt:
|
05/25/2010
|
|
Publication #:
|
|
Pub Dt:
|
12/01/2011
| | | | |
|
Title:
|
MOVABLE DETECTOR FOR CHARGED PARTICLE BEAM INSPECTION OR REVIEW
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/24/2012
|
Application #:
|
12832127
|
Filing Dt:
|
07/08/2010
|
|
Publication #:
|
|
Pub Dt:
|
10/28/2010
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR A CHARGED PARTICLE BEAM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/10/2012
|
Application #:
|
12850899
|
Filing Dt:
|
08/05/2010
|
|
Publication #:
|
|
Pub Dt:
|
02/09/2012
| | | | |
|
Title:
|
METHOD FOR INSPECTING EUV RETICLE AND APPARATUS THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/2012
|
Application #:
|
12862590
|
Filing Dt:
|
08/24/2010
|
|
Publication #:
|
|
Pub Dt:
|
03/01/2012
| | | | |
|
Title:
|
CHARGED PARTICLE APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/30/2012
|
Application #:
|
12890200
|
Filing Dt:
|
09/24/2010
|
|
Publication #:
|
|
Pub Dt:
|
01/20/2011
| | | | |
|
Title:
|
TEST STRUCTURE FOR CHARGED PARTICLE BEAM INSPECTION AND METHOD FOR DEFECT DETERMINATION USING THE SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/20/2012
|
Application #:
|
12896110
|
Filing Dt:
|
10/01/2010
|
|
Publication #:
|
|
Pub Dt:
|
01/27/2011
| | | | |
|
Title:
|
ELECTRON GUN WITH MAGNETIC IMMERSION DOUBLE CONDENSER LENSES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/25/2014
|
Application #:
|
12909745
|
Filing Dt:
|
10/21/2010
|
|
Publication #:
|
|
Pub Dt:
|
04/26/2012
| | | | |
|
Title:
|
FILAMENT FOR ELECTRON SOURCE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/23/2012
|
Application #:
|
12968201
|
Filing Dt:
|
12/14/2010
|
|
Publication #:
|
|
Pub Dt:
|
06/14/2012
| | | | |
|
Title:
|
APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC LENS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/21/2013
|
Application #:
|
12968221
|
Filing Dt:
|
12/14/2010
|
|
Publication #:
|
|
Pub Dt:
|
06/14/2012
| | | | |
|
Title:
|
APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC LENS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/08/2013
|
Application #:
|
12968229
|
Filing Dt:
|
12/14/2010
|
|
Publication #:
|
|
Pub Dt:
|
06/14/2012
| | | | |
|
Title:
|
PARTICLE DETECTION SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/10/2015
|
Application #:
|
13012710
|
Filing Dt:
|
01/24/2011
|
|
Publication #:
|
|
Pub Dt:
|
08/11/2011
| | | | |
|
Title:
|
SELECTABLE COULOMB APERTURE IN E-BEAM SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/30/2013
|
Application #:
|
13032105
|
Filing Dt:
|
02/22/2011
|
|
Publication #:
|
|
Pub Dt:
|
08/23/2012
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR MEASURING CRITICAL DIMENSION AND MONITORING FABRICATION UNIFORMITY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/10/2013
|
Application #:
|
13073161
|
Filing Dt:
|
03/28/2011
|
|
Title:
|
METHOD FOR INSPECTING LOCALIZED IMAGE AND SYSTEM THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/02/2016
|
Application #:
|
13073405
|
Filing Dt:
|
03/28/2011
|
|
Title:
|
METHODS FOR PROMOTING SEMICONDUCTOR MANUFACTURING YIELD AND CLASSIFYING DEFECTS DURING FABRICATING A SEMICONDUCTOR DEVICE, AND COMPUTER READABLE MEDIUMS ENCODED WITH A COMPUTER PROGRAM IMPLEMENTING THE SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/25/2012
|
Application #:
|
13111851
|
Filing Dt:
|
05/19/2011
|
|
Title:
|
MONOCHROMATOR FOR CHARGED PARTICLE BEAM APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/05/2013
|
Application #:
|
13112536
|
Filing Dt:
|
05/20/2011
|
|
Publication #:
|
|
Pub Dt:
|
11/22/2012
| | | | |
|
Title:
|
STRUCTURE FOR DISCHARGING EXTREME ULTRAVIOLET MASK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/15/2016
|
Application #:
|
13154483
|
Filing Dt:
|
06/07/2011
|
|
Title:
|
METHOD AND SYSTEM FOR FAST INSPECTING DEFECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/23/2012
|
Application #:
|
13211206
|
Filing Dt:
|
08/16/2011
|
|
Title:
|
METHOD AND APPARATUS FOR REDUCING SUBSTRATE EDGE EFFECT DURING INSPECTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/10/2013
|
Application #:
|
13236108
|
Filing Dt:
|
09/19/2011
|
|
Publication #:
|
|
Pub Dt:
|
01/12/2012
| | | | |
|
Title:
|
METHOD OF CONTROLLING PARTICLE ABSORPTION ON A WAFER SAMPLE BEING INSPECTED BY A CHARGED PARTICLE BEAM IMAGING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/30/2014
|
Application #:
|
13240721
|
Filing Dt:
|
09/22/2011
|
|
Publication #:
|
|
Pub Dt:
|
03/22/2012
| | | | |
|
Title:
|
METHOD FOR INSPECTING OVERLAY SHIFT DEFECT DURING SEMICONDUCTOR MANUFACTURING AND APPARATUS THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/12/2014
|
Application #:
|
13269038
|
Filing Dt:
|
10/07/2011
|
|
Publication #:
|
|
Pub Dt:
|
02/02/2012
| | | | |
|
Title:
|
METHOD AND SYSTEM OF CLASSIFYING DEFECTS ON A WAFER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/15/2014
|
Application #:
|
13271811
|
Filing Dt:
|
10/12/2011
|
|
Publication #:
|
|
Pub Dt:
|
04/18/2013
| | | | |
|
Title:
|
PHASE DETECTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/30/2013
|
Application #:
|
13288563
|
Filing Dt:
|
11/03/2011
|
|
Publication #:
|
|
Pub Dt:
|
02/23/2012
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR CHARGED PARTICLE BEAM INSPECTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/07/2013
|
Application #:
|
13292455
|
Filing Dt:
|
11/09/2011
|
|
Publication #:
|
|
Pub Dt:
|
05/09/2013
| | | | |
|
Title:
|
WIEN FILTER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/16/2013
|
Application #:
|
13298651
|
Filing Dt:
|
11/17/2011
|
|
Title:
|
WIEN FILTER WITH REDUCED FIELD LEAKAGE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/29/2014
|
Application #:
|
13311043
|
Filing Dt:
|
12/05/2011
|
|
Title:
|
METHOD AND SYSTEM FOR FILTERING NOISES IN AN IMAGE SCANNED BY CHARGED PARTICLES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/17/2014
|
Application #:
|
13312152
|
Filing Dt:
|
12/06/2011
|
|
Publication #:
|
|
Pub Dt:
|
03/29/2012
| | | | |
|
Title:
|
STRUCTURE AND METHOD FOR DETERMINING A DEFECT IN INTEGRATED CIRCUIT MANUFACTURING PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/15/2014
|
Application #:
|
13315189
|
Filing Dt:
|
12/08/2011
|
|
Publication #:
|
|
Pub Dt:
|
04/26/2012
| | | | |
|
Title:
|
METHOD FOR FORMING MEMORY CELL TRANSISTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/19/2015
|
Application #:
|
13323634
|
Filing Dt:
|
12/12/2011
|
|
Publication #:
|
|
Pub Dt:
|
04/05/2012
| | | | |
|
Title:
|
STRUCTURE AND METHOD FOR DETERMINING A DEFECT IN INTEGRATED CIRCUIT MANUFACTURING PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/25/2014
|
Application #:
|
13417404
|
Filing Dt:
|
03/12/2012
|
|
Publication #:
|
|
Pub Dt:
|
09/12/2013
| | | | |
|
Title:
|
HIGH EFFICIENCY SECONDARY AND BACK SCATTERED ELECTRON DETECTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/28/2017
|
Application #:
|
13437107
|
Filing Dt:
|
04/02/2012
|
|
Publication #:
|
|
Pub Dt:
|
10/03/2013
| | | | |
|
Title:
|
METAL SEAL FOR ULTRA HIGH VACUUM SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/27/2013
|
Application #:
|
13463208
|
Filing Dt:
|
05/03/2012
|
|
Publication #:
|
|
Pub Dt:
|
11/08/2012
| | | | |
|
Title:
|
CHARGED PARTICLE SYSTEM FOR RETICLE / WAFER DEFECTS INSPECTION AND REVIEW
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/07/2015
|
Application #:
|
13464261
|
Filing Dt:
|
05/04/2012
|
|
Publication #:
|
|
Pub Dt:
|
06/20/2013
| | | | |
|
Title:
|
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/08/2014
|
Application #:
|
13479702
|
Filing Dt:
|
05/24/2012
|
|
Publication #:
|
|
Pub Dt:
|
09/13/2012
| | | | |
|
Title:
|
METHOD FOR INSPECTING EUV RETICLE AND APPARATUS THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/09/2014
|
Application #:
|
13495102
|
Filing Dt:
|
06/13/2012
|
|
Publication #:
|
|
Pub Dt:
|
12/19/2013
| | | | |
|
Title:
|
HIGH EFFICIENCY SCINTILLATOR DETECTOR FOR CHARGED PARTICLE DETECTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/20/2015
|
Application #:
|
13541618
|
Filing Dt:
|
07/03/2012
|
|
Publication #:
|
|
Pub Dt:
|
11/01/2012
| | | | |
|
Title:
|
METHOD FOR EXAMINING A SAMPLE BY USING A CHARGED PARTICLE BEAM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/26/2013
|
Application #:
|
13551947
|
Filing Dt:
|
07/18/2012
|
|
Publication #:
|
|
Pub Dt:
|
12/20/2012
| | | | |
|
Title:
|
Monochromator for Charged Particle Beam Apparatus
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/19/2017
|
Application #:
|
13589378
|
Filing Dt:
|
08/20/2012
|
|
Publication #:
|
|
Pub Dt:
|
12/13/2012
| | | | |
|
Title:
|
METHOD AND MACHINE FOR EXAMINING WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/20/2015
|
Application #:
|
13737065
|
Filing Dt:
|
01/09/2013
|
|
Publication #:
|
|
Pub Dt:
|
07/11/2013
| | | | |
|
Title:
|
Reticle Operation System
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/16/2014
|
Application #:
|
13741654
|
Filing Dt:
|
01/15/2013
|
|
Publication #:
|
|
Pub Dt:
|
07/18/2013
| | | | |
|
Title:
|
Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/07/2015
|
Application #:
|
13776939
|
Filing Dt:
|
02/26/2013
|
|
Title:
|
METHOD AND SYSTEM FOR ENHANCING IMAGE QUALITY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/26/2015
|
Application #:
|
13785222
|
Filing Dt:
|
03/05/2013
|
|
Publication #:
|
|
Pub Dt:
|
07/25/2013
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR MEASURING CRITICAL DIMENSION AND MONITORING FABRICATION UNIFORMITY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/08/2016
|
Application #:
|
13785240
|
Filing Dt:
|
03/05/2013
|
|
Publication #:
|
|
Pub Dt:
|
08/08/2013
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR MEASURING CRITICAL DIMENSION AND MONITORING FABRICATION UNIFORMITY
|
|
