Patent Assignment Details
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| Reel/Frame: | 042160/0159 | |
| Pages: | 4 |
| | Recorded: | 04/27/2017 | | |
| Attorney Dkt #: | 2857.3480007 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/19/2017
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Application #:
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15438376
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Filing Dt:
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02/21/2017
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Publication #:
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Pub Dt:
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06/08/2017
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Title:
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Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature
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Assignee
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL - 5504 DR |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
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1100 NEW YORK AVENUE, N.W.
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WASHINGTON, DC 20005
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