Patent Assignment Details
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Reel/Frame: | 021889/0160 | |
| Pages: | 2 |
| | Recorded: | 11/25/2008 | | |
Attorney Dkt #: | T5057-B001 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12277839
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Filing Dt:
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11/25/2008
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Publication #:
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Pub Dt:
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05/27/2010
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Title:
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METHOD AND APPARATUS FOR CLEANING SEMICONDUCTOR DEVICE FABRICATION EQUIPMENT USING SUPERCRITICAL FLUIDS
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Assignee
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NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK |
HSINCHU, TAIWAN 300 |
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Correspondence name and address
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LOWE HAUPTMAN HAM & BERNER LLP
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1700 DIAGONAL RD. SUITE 300
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ALEXANDRIA, VA 22314
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